Micro and Nanosystems
Micro and Nanosystems (MST) is one out of the twelve labs in the School of Electrical Engineering.
People at MST
Micro and Nanosystems is part of the School of Electrical engineering at KTH. You will find us at the main KTH Camus at Valhallavägen. The lab is headed by prof. Göran Stemme. There is also a group of senior researchers with different specializations as well as a number of PhD students. Click on the "Personnel" link to the right to find an updated list of the people at the MST Lab.
Education
We give courses in the areas of Measurement technology and Microsystem technology. Click the "Education" link to the right for more information.
Research
The major research field of Micro and Nanosystems (MST) is Micro- and Nanoelectromechanical Systems (MEMS/NEMS), where micro- and nanofabrication techniques and materials are adapted to the making of small, low-cost, high-performance electromechanical, optoelectromechanical, RF/microwave as well as micro- and nano-fluidic devices. Click Research on the right for more information.
Lab facilities
Much of the device fabrication takes place in the KTH ELAB laboratory. This laboratory comprises 1300m² of class-100 cleanroom area for fabrication and characterization of microelectronics, photonics and microsystem devices.
The ELAB laboratory is situated at the KTH Campus in Kista North-vest of the city. Through the my-fab network we also have acces to the other major cleanrooom labs in Sweden.
At the main KTH Campus on Valhallavägen we have a small lab for evaluation and other work that does no require the cleanroom environment.
