Research Projects at the Microsystem Technology Lab
MST Start |MST Publications | More about our research | Master Thesis Projects | What is MEMSResearch topics and projects
3D-MEMS Integration on ICs | |
 | IC-Compatible Wafer-Level Packaging The focus of this project are low-temperature wafer-level packaging and hermetic sealing techniques for MEMS devices. >>> |
 | Uncooled Infrared Bolometer Arrays KTH-MST develops low-cost, uncooled infrared bolometer arrays for automotive and security applications using foundry-compatible 3D IC integrated MEMS technology in the framework of EU and nationally funded projects. >>> |
 | Q2M - Wafer-scale heterogeneous integration of high quality materials to microsystems Q2M is a European sponsored project that develops methods for the wafer-scale heterogeneous integration of piezoelectric, shape memory and crystalline materials and MEMS components on polymer, silicon or CMOS substrates. >>> |
 | IC Integrated Mono-Crystalline Silicon Micro-Mirror Arrays In this project, large arrays of IC integrated mono-crystalline silicon micro-mirror arrays for maskless lithography systems and adaptive optics systems are developed. >>> |
 | Through-Silicon Vias (TSVs) with Wire-Bonded Metal Cores Researchers from MST introduce an entirely novel and cost-effective process for the fabrication of TSVs with void-free high quality wire-bonded metal cores. >>> |
Bio-Micro-Nanofluidics | |
 | Microfluidic components for lab-on-chip applications We develop liquid control components for microfluidic systems by engineering the flow channel geometry and by tailoring the microchannel surface properties. Valves, mixers, pumps, interfacing, liquid dosing components, etc, are designed, tested and evalua >>> |
 | Gas microvalves We design, fabricate and evaluate low-footprint microvalves for large gas flow control. The research includes optimisation of flow nozzle and valve actuator design. >>> |
 | Micro- and Nano Fuel Cells We develop novel fuel cells using micro- and nanofabrication techniques. >>> |
 | Rapid Pathogen Analyzer Infectious diseases require in most cases rapid diagnosis and urgent treatment. Thus, life threatening, acute infections would greatly benefit from a close to instantaneous diagnosis such as in certain bacterial, septic conditions where minutes and hours >>> |
 | Low friction fluidic surfaces The vision of this project is to allow for spatial and temporal control of viscous drag and turbulence using MEMS techniques. >>> |
 | INTOPSENS - photonic biosensors for whole blood sepsis diagnostics Intopsens develops a highly integrated optical sensor for point of care label free identification of sepsis bacteria strains and their antibiotic resistance. For more information: please visit the project website www.ee.kth.se/intopsens. >>> |
| Shape Memory Alloy microactuators Shape memory microactuators are the highest energy density microactuators known. Our research focusses on development of wafer scale integration of such actuators. >>> | |
High frequency / radio frequency microsystems (RF MEMS) | |
 | Novel concepts for RF MEMS switches Unconventional, novel RF MEMS switch concepts developed at KTH-EE-MST since 2002, addressing major obstacles in RF MEMS switch technology >>> |
 | MEMS switch arrays for reconfiguration of telecommunication networks Large, single chip integrated MEMS switch arrays for the reconfiguration of copper-wire telecommunication networks >>> |
 | Wafer-scale packaging of RF MEMS devices by patterned, full-wafer adhesive bonding Patterned polymer layers used as adhesive bonding layer create cavities between two bonded wafers. This technology was initially developed for wafer-scale packaging of RF MEMS devices >>> |
 | NORDITE - SARFA: RF MEMS for automotive radar (77 GHz) This project focuses on the utilization of RF MEMS technology for automotive radar sensors at 76-81 GHz. This project is a collaboration within the NORDITE ICT Programme, with three Scandinavian universities and ten industrial supporters >>> |
 | Piezoelectrically actuated RF MEMS switches A project within the RF MEMS workpackage of the European project Q2M (FP6, STREP). >>> |
Optical MEMS at MST | |
 | SABIO - Nanophotonic biosensors for immunoassays Ultrahigh sensitivity Slot-wAveguide BIOsensor on a highly integrated chip for simultaneous diagnosis of multiple diseases >>> |
 | PHODYE New PHOtonic Systems on a Chip based on DYEs for Sensor Applications scalable at Wafer Fabrication >>> |
| IC Integrated Mono-Crystalline Silicon Micro-Mirror Arrays In this project, large arrays of IC integrated mono-crystalline silicon micro-mirror arrays for maskless lithography systems and adaptive optics systems are developed. >>> |
| Uncooled Infrared Bolometer Arrays KTH-MST develops low-cost, uncooled infrared bolometer arrays for automotive and security applications using foundry-compatible 3D IC integrated MEMS technology in the framework of EU and nationally funded projects. >>> |
Previous projects | |
| Thermal polymer actuators for optical applications >>> | |
| Transdermal drug delivery >>> | |
| Fibre Optic Refractive Index Sensor >>> | |
| Fibre Optic Sensors for Cutting Tool Diagnostics >>> | |
| Fiber optic magnetic field sensing using YIG >>> | |
| Bead-based microfluidic platform for biochemical applications >>> | |
| Gas flow measurements >>> | |
| Ultra-minaturized Pressure Sensors for Intravascular Blood Pressure Measurements >>> | |
| Flow and Pressure Sensors for Anaesthesia and Respirator Equipment >>> | |
| Resonant Fluid Density and Coriolis mass flow sensor >>> | |
| Integrated Micromechanical IR Gas Analysis System for Anesthesia and Ventilator Equipment >>> | |
| Micro-robots and micro-conveyers realized by Polyimide Joint Actuators >>> | |
| Polyimide Joints - static and dynamic behavior >>> | |
| Microspray tips >>> | |
| Spiked biopotential electrodes >>> | |
| Valve-less Diffuser Micropumps >>> | |
| Micromachined filter for bead-based processes >>> | |
| Turbulent gas flow measurement >>> | |
| Microfluidic Chips for Cells in Asymmetric Environment >>> | |
