EK2360 Hands-On Microelectromechanical Systems Engineering 7.5 credits

• Educational level

  Second cycle

• Academic level (A-D)

  C

• Subject area

  Electrical Engineering
  

• Grade scale

  A, B, C, D, E, FX, F

• Course page on KTH Social

Learning outcomes

During the course, the student will gain in-depth knowledge and understanding on microsystems, with emphasis on different micro-electromechanical actuator types, on their working principles, concept and design, process technology, clean-room fabrication, device characterization, and failure analysis. Upon successfully completing the course, the student will be able to:

-      develop different concepts of microsystem actuators for real-world applications

-      design microsystem devices and adapt them to different application requirements

-      predict the behaviour of microsystem devices by (1) qualified guessing based on general understanding of the microsystem and the application; (2) rough estimation by using/adapting text book formulas; (3) accurate modelling and simulating by modelling using state-of-the-art multi-physics finite-element based design tools (FEM)

-      work out design concepts under consideration of fabrication-technology limitations

-      develop a fabrication process flow

-      carry out basic microsystem fabrication steps in a class-100 clean-room environment under the safety requirements of such an environment

-      characterize the devices for their electrical, mechanical, and thermal behaviour

-      identify failure mechanisms, conclude on device limitations and reflect on device improvements based on the characterization results of the prototype devices

-      write a project report summarizing design, fabrication, characterization, failure analysis, and potential future device improvements

-      present and defend the results to a critical audience

-      work in a small microsystem development team, including taking management responsibility from project plan writing to work distribution and task assignment to the team members

Course main content

EK2360 is a project course worth 7.5 ECTS credits, which is equivalent to 200 work hours of full-time study. As the course runs about 8 weeks, this implies that about 25 hours a week must be devoted to various course activities, including introductory lectures and reading of course material, together comprising about 20% of the course activities, and carrying out the project work, which comprises 80% of the course work.

The introductory lectures on basic MEMS design and fabrication, with special focus on the following project work, will be taught by the course responsible. Attendance of the introductory lectures is compulsory.

After the introductory lectures, a brief written intermediate examination will be carried out, assessing whether the knowledge and understanding of the student is sufficient for continuing with the actual project work.

The project work is supervised by senior PhD students and the course responsible.

The report writing and the final presentation and a brief post-discussion are supervised by the course responsible.

Eligibility

For single course students: 120 credits and documented proficiency in English B or equivalent

Prerequisites

The course level is adapted to students enrolled in an engineering master programme at KTH, but may also be taken by PhD students.

The students must have basic knowledge in electrical engineering, engineering physics, or an equivalent basic education. It is recommended that the students already some basic knowledge in micro-electromechanical systems (MEMS). The student should have successfully completed the “EK2350:Microsystem Technology” basic course given at KTH, or any equivalent basic microsystem technology or semiconductor fabrication course. Practical experience with general engineering design tools, such a FEM and CAD software, is useful.

All students without MEMS background which are interested in course participation should contact the course responsible in advance, in order to assess their qualification for participation.

Literature

Nödvändig kurslitteratur kommer att distribueras under kursen.

PDF-versioner av de inledande föreläsningsbilderna kommer att göras tillgängliga i förväg genom BILDA och är obligatorisk läsning före respektive föreläsning

För ytterligare läsning, särskilt för studenter med begränsade förkunskaper inom MEMS, rekommenderas följande böcker (ett begränsat antal exemplar finns tillgängliga för kursdeltagare hos Mikrosystemteknik, och kan också finnas på KTH-biblioteket):

-         Marc J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization, CRC, 2:a upplagan (13 mars 2002), ISBN-10: 0849308267, ISBN-13: 978-0849308260

-         Gregory T. Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill, 1:a upplagan (1 februari 1998), ISBN-10: 0072907223, ISBN-13: 978-0072907223

-         Sami Franssila, Introduction to Microfabrication, Wiley, 1:a upplagan (14 juni 2004), ISBN-10: 0470851066, ISBN-13: 978-0470851067

Examination

• PRO1 - Project, 7.5 credits, grade scale: A, B, C, D, E, FX, F

Requirements for final grade

The student’s final grade in the course will be based on

-         attendance of the introductory lectures (pass/fail criteria)

-         performance on an intermediate assessment inform of a written examination test after the introductory lecture. The examination will test the student’s overall comprehension of the various topics covered in the lectures. It will mainly be used as a pass/fail criteria for the student being allowed to carry on with the practical course part, but will also be used to influence the of final mark (10%)

-         project work: overall evaluation of the project work of the project team as a whole, including the project report and the final project presentation to a critical audience, adding up to 90% of the final mark. Individual adjustments might be done. Criteria for the evaluation of project work, report, and presentation will be communicated before the start of the actual project work. The grading of the project work is given independent on the outcome of the student competition. The summary of the expected device performance after the design phase (see previous section) will not be used for determining the grade.

-         after the presentation, the course responsible will have a short discussion with the individual student teams, which might be used for adjusting the final mark of the teams and of the individuals

The course is worth 7.5 ECTS points; grading will be on a scale from A to F, with A being the highest mark and E being the lowest mark for passing the course, and F being a failing mark.

Offered by

EES/Micro and Nanosystems

Contact

Joachim Oberhammer

Examiner

Joachim Oberhammer <joachimo@kth.se>

Add-on studies

EK211X Master's Project in Electrical Measurements

EK2230 Individual Project in Microsystem Technology

Version

Course plan valid from: Autumn 10.
Examination information valid from: Autumn 10.