FEK3300 Applied Micro- and Nanofabrication 15.0 credits

The course consists of practical training on ten micro or nanofabrication tools. The choice of tools should reflect necessary tools to independently be able to fabricate and evaluate a micro or nanostructure.

After the completed course the student shall be able to:

•  Describe how a set microfabrication tool or processes work and critically assess performance limitations.
• Master operation of these microfabrication tools or processes.
• Evaluate fabrication results from these tools and processes.
• Fabricate micro or nanostructures independently.

This course is open for students enrolled in the KTH EES third-cycle study program.

EK2350 Microsystem technology or similar course.

If the course is discontinued, students may request to be examined during the following two academic years.

• EXA1 - Examination, 15.0 credits, grading scale: P, F

Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.

The examiner may apply another examination format when re-examining individual students.

To pass the course successful tool license or equivalent on ten microfabrication and characterization tools for micro or nanofabrication is required. The choice of tools should cover at least one pattern definition tool, one material removal tool, one material deposition tool and one characterization tool.

Niclas Roxhed

• All members of a group are responsible for the group's work.
• In any assessment, every student shall honestly disclose any help received and sources used.
• In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.