Class information for:
Level 1: FOCUSED ION BEAM//SHAVE OFF//SHAVE OFF DEPTH PROFILING

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
10895 957 19.4 65%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
740 11887 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//MICROELECTRONIC ENGINEERING//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 FOCUSED ION BEAM Author keyword 33 16% 20% 193
2 SHAVE OFF Author keyword 18 89% 1% 8
3 SHAVE OFF DEPTH PROFILING Author keyword 17 100% 1% 8
4 FIB Author keyword 15 14% 10% 99
5 LIFT OUT Author keyword 11 69% 1% 9
6 TEM SAMPLE PREPARATION Author keyword 6 40% 1% 12
7 TEM SPECIMEN PREPARATION Author keyword 5 45% 1% 9
8 FOCUSED ION BEAM FIB Author keyword 5 13% 4% 38
9 PRECIS ENGN NANOTECHNOL Address 5 19% 2% 23
10 3D MICROANALYSIS Author keyword 4 67% 0% 4

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 FOCUSED ION BEAM 33 16% 20% 193 Search FOCUSED+ION+BEAM Search FOCUSED+ION+BEAM
2 SHAVE OFF 18 89% 1% 8 Search SHAVE+OFF Search SHAVE+OFF
3 SHAVE OFF DEPTH PROFILING 17 100% 1% 8 Search SHAVE+OFF+DEPTH+PROFILING Search SHAVE+OFF+DEPTH+PROFILING
4 FIB 15 14% 10% 99 Search FIB Search FIB
5 LIFT OUT 11 69% 1% 9 Search LIFT+OUT Search LIFT+OUT
6 TEM SAMPLE PREPARATION 6 40% 1% 12 Search TEM+SAMPLE+PREPARATION Search TEM+SAMPLE+PREPARATION
7 TEM SPECIMEN PREPARATION 5 45% 1% 9 Search TEM+SPECIMEN+PREPARATION Search TEM+SPECIMEN+PREPARATION
8 FOCUSED ION BEAM FIB 5 13% 4% 38 Search FOCUSED+ION+BEAM+FIB Search FOCUSED+ION+BEAM+FIB
9 3D MICROANALYSIS 4 67% 0% 4 Search 3D+MICROANALYSIS Search 3D+MICROANALYSIS
10 FOCUSED ION BEAM SYSTEM 4 67% 0% 4 Search FOCUSED+ION+BEAM+SYSTEM Search FOCUSED+ION+BEAM+SYSTEM

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 FOCUSED ION BEAM 16 16% 9% 90
2 FIB 14 33% 4% 36
3 TEM SAMPLES 10 73% 1% 8
4 TEM SPECIMEN PREPARATION 10 37% 2% 21
5 3 DIMENSIONAL MICROANALYSIS 8 100% 1% 5
6 LIFT OUT 8 50% 1% 11
7 SPECIMEN PREPARATION 7 17% 4% 40
8 SPECIMEN PREPARATION TECHNIQUE 7 64% 1% 7
9 TEM SAMPLE PREPARATION 7 64% 1% 7
10 DEVICE TRANSPLANTATION 6 100% 0% 4

Journals

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
A review of focused ion beam milling techniques for TEM specimen preparation 1999 423 6 67%
In situ lift-out: Steps to improve yield and a comparison with other FIB TEM sample preparation techniques 2008 19 7 100%
Recent developments in micromilling using focused ion beam technology 2004 162 50 50%
A Review of Focused Ion Beam Sputtering 2010 22 61 67%
Reducing focused ion beam damage to transmission electron microscopy samples 2004 74 24 75%
Review: Developments in micro/nanoscale fabrication by focused ion beams 2012 21 182 45%
In situ lift-out dedicated techniques using FIB-SEM system for TEM specimen preparation 2013 7 11 36%
Cross-sectional sample preparation by focused ion beam: A review of ion-sample interaction 1996 55 36 53%
Applications of focused ion beam microscopy to materials science specimens 1999 131 34 44%
Serial sectioning methods for 3D investigations in materials science 2014 4 54 31%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 PRECIS ENGN NANOTECHNOL 5 19% 2.4% 23
2 INNOVAT MFG SYST TECHNOL 4 67% 0.4% 4
3 MICROELECT IMAGING ANAL 4 75% 0.3% 3
4 FIB SEM BOMBAY 3 50% 0.4% 4
5 LEHRSTUHL ADHAS INTERPHASEN POLYMEREN 2 67% 0.2% 2
6 MICROBRIDGE SERV LTD 2 67% 0.2% 2
7 RELIABIL MAT ENGN 2 67% 0.2% 2
8 MICRONANO MFG TECHNOL 1 12% 0.9% 9
9 LEHRSTUHL FUNKT WERKSTOFFE 1 30% 0.3% 3
10 BROOKFIELD BUSINESS 1 40% 0.2% 2

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000235280 LIQUID METAL ION SOURCE//LIQUID METAL ION SOURCES//ION BEAMS MAT
2 0.0000217929 ELECTRON BEAM INDUCED DEPOSITION//FOCUSED ELECTRON BEAM INDUCED DEPOSITION//FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION FIB CVD
3 0.0000193100 ION BEAM THINNING//MAT SCI PROD TECHNOL//TECHNOL PLANNING CENT ELECT S
4 0.0000072691 ION SPUTTERING//HBEREICH AUTOMATISIERUNG INFORMAT//ION EROSION
5 0.0000063377 ELECTRON TOMOGRAPHY//TILT SERIES//MISSING WEDGE
6 0.0000062822 WET ETCHING OF GLASS//DEEP GLASS ETCHING//TECH SUPPORT MACHINERY MET IND
7 0.0000060109 UPR 6412//PT CR CO MULTILAYER//UPR 020
8 0.0000058069 SIMS MICROSCOPY//ION MICROSCOPY//ANALYTICAL ION MICROSCOPY
9 0.0000050850 TIP CHARACTERIZATION//TIP CHARACTERIZER//SIDEWALL MEASUREMENT
10 0.0000045546 KIKUCHI LINES//ELECTRON CHANNELING CONTRAST IMAGING ECCI//ACOM