Class information for:
Level 1: CLEANROOM//FAN FILTER UNIT//ORGANIC CONTAMINATION

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
22426 325 16.2 42%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
2900 2299 PHOTORESIST REMOVAL//WET OZONE//HYDROGEN TERMINATION

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 CLEANROOM Author keyword 9 24% 10% 33
2 FAN FILTER UNIT Author keyword 4 75% 1% 3
3 ORGANIC CONTAMINATION Author keyword 4 19% 6% 19
4 AIRBORNE MOLECULAR CONTAMINANTS AMCS Author keyword 3 100% 1% 3
5 FAN FILTER UNIT FFU Author keyword 3 100% 1% 3
6 CLEAN ROOM Author keyword 3 18% 5% 15
7 WAFER CONTAMINATION Author keyword 2 44% 1% 4
8 FRONT OPENING UNIFIED POD FOUP Author keyword 2 67% 1% 2
9 PARALLEL ANGLE RESOLVED XPS Author keyword 2 67% 1% 2
10 PATTERN WAFER Author keyword 2 67% 1% 2

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 CLEANROOM 9 24% 10% 33 Search CLEANROOM Search CLEANROOM
2 FAN FILTER UNIT 4 75% 1% 3 Search FAN+FILTER+UNIT Search FAN+FILTER+UNIT
3 ORGANIC CONTAMINATION 4 19% 6% 19 Search ORGANIC+CONTAMINATION Search ORGANIC+CONTAMINATION
4 AIRBORNE MOLECULAR CONTAMINANTS AMCS 3 100% 1% 3 Search AIRBORNE+MOLECULAR+CONTAMINANTS+AMCS Search AIRBORNE+MOLECULAR+CONTAMINANTS+AMCS
5 FAN FILTER UNIT FFU 3 100% 1% 3 Search FAN+FILTER+UNIT+FFU Search FAN+FILTER+UNIT+FFU
6 CLEAN ROOM 3 18% 5% 15 Search CLEAN+ROOM Search CLEAN+ROOM
7 WAFER CONTAMINATION 2 44% 1% 4 Search WAFER+CONTAMINATION Search WAFER+CONTAMINATION
8 FRONT OPENING UNIFIED POD FOUP 2 67% 1% 2 Search FRONT+OPENING+UNIFIED+POD+FOUP Search FRONT+OPENING+UNIFIED+POD+FOUP
9 PARALLEL ANGLE RESOLVED XPS 2 67% 1% 2 Search PARALLEL+ANGLE+RESOLVED+XPS Search PARALLEL+ANGLE+RESOLVED+XPS
10 PATTERN WAFER 2 67% 1% 2 Search PATTERN+WAFER Search PATTERN+WAFER

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 MINIENVIRONMENT 15 88% 2% 7
2 ORGANIC CONTAMINATION 10 40% 6% 20
3 MOLECULAR CONTAMINATION 9 83% 2% 5
4 AIRBORNE MOLECULAR CONTAMINATION 5 60% 2% 6
5 MINIENVIRONMENTS 4 75% 1% 3
6 WAFER SURFACE 2 21% 2% 8
7 SILICON WAFER SURFACE 2 28% 2% 5
8 FAN FILTER UNIT 1 100% 1% 2
9 OPENING UNIFIED POD 1 100% 1% 2
10 SIHCL3 H 2 SYSTEM 1 18% 1% 4

Journals

Reviews

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 AIR CONDITIONING REFRIGERAT ENGN 2 19% 2.5% 8
2 EQUIPE RUMENTAT REACTIVITE ATMOSPHER 1 33% 0.6% 2
3 INCAM SOLUT 1 50% 0.3% 1
4 SEODAIMUN KU 1 50% 0.3% 1
5 MFG ENGN RD 1 25% 0.6% 2
6 AIRCONDITIONING REFRIGERAT ENGN 0 33% 0.3% 1
7 HIYOSHI KOUHOKU KU 0 33% 0.3% 1
8 PROC PLICAT DEV 0 33% 0.3% 1
9 PROD PLANNING GRP 0 33% 0.3% 1
10 SUBMICROMETER TECHNOL GRP 0 33% 0.3% 1

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000209317 WET OZONE//PHOTORESIST REMOVAL//RESIST REMOVAL
2 0.0000133817 HYDROGEN TERMINATION//SHIZUOKA TORY//LAYER BY LAYER OXIDATION
3 0.0000085836 WAFER RINSING//MICRO NANO FABRICAT//CIRCULATION COOLING WATER
4 0.0000082248 DISPLACEMENT VENTILATION//PERSONALIZED VENTILATION//STRATUM VENTILATION
5 0.0000068373 MICRO WETTABILITY//MACRO WETTING//MICRO CONTAMINANT
6 0.0000057471 AC SURFACE PHOTOVOLTAGE//SCANNING PHOTON MICROSCOPE//METAL AIR INSULATOR SEMICONDUCTOR
7 0.0000054512 WATER DEW POINT//ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETER//CAPACITOR SENSOR
8 0.0000052900 VACUUM COOLING//IMMERSION VACUUM COOLING//DISPLAY CABINET
9 0.0000048615 FILTER PACK//DIFFUSION SCRUBBER//FILTER PACK METHOD
10 0.0000045788 BREAZEALE NUCL REACTOR//MED RADIOL SHOWA KU//MED VIRGINIA NUCL MED