Class information for:
Level 1: BIASED DC PLASMA SPUTTERING//CIRCUIT PATTERN//AL2O3 ABRASIVE

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
29943 145 13.7 41%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
2776 2621 CHEMICAL MECHANICAL POLISHING//CHEMICAL MECHANICAL PLANARIZATION//CMP

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 BIASED DC PLASMA SPUTTERING Author keyword 1 100% 1% 2
2 CIRCUIT PATTERN Author keyword 1 40% 1% 2
3 AL2O3 ABRASIVE Author keyword 1 50% 1% 1
4 CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY X TEM Author keyword 1 50% 1% 1
5 MATHEMATICAL BILLIARD Author keyword 1 50% 1% 1
6 PLASMA SPUTTER DEPOSITION Author keyword 1 50% 1% 1
7 S IPNS Address 1 50% 1% 1
8 TIME DOMAIN MAPPING Author keyword 1 50% 1% 1
9 POLISHED SUBSTRATE Author keyword 0 33% 1% 1
10 XHRTEM Author keyword 0 33% 1% 1

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class		 LCSH search Wikipedia search
1 BIASED DC PLASMA SPUTTERING 1 100% 1% 2 Search BIASED+DC+PLASMA+SPUTTERING Search BIASED+DC+PLASMA+SPUTTERING
2 CIRCUIT PATTERN 1 40% 1% 2 Search CIRCUIT+PATTERN Search CIRCUIT+PATTERN
3 AL2O3 ABRASIVE 1 50% 1% 1 Search AL2O3+ABRASIVE Search AL2O3+ABRASIVE
4 CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY X TEM 1 50% 1% 1 Search CROSS+SECTIONAL+TRANSMISSION+ELECTRON+MICROSCOPY+X+TEM Search CROSS+SECTIONAL+TRANSMISSION+ELECTRON+MICROSCOPY+X+TEM
5 MATHEMATICAL BILLIARD 1 50% 1% 1 Search MATHEMATICAL+BILLIARD Search MATHEMATICAL+BILLIARD
6 PLASMA SPUTTER DEPOSITION 1 50% 1% 1 Search PLASMA+SPUTTER+DEPOSITION Search PLASMA+SPUTTER+DEPOSITION
7 TIME DOMAIN MAPPING 1 50% 1% 1 Search TIME+DOMAIN+MAPPING Search TIME+DOMAIN+MAPPING
8 POLISHED SUBSTRATE 0 33% 1% 1 Search POLISHED+SUBSTRATE Search POLISHED+SUBSTRATE
9 XHRTEM 0 33% 1% 1 Search XHRTEM Search XHRTEM
10 NI DEPOSITION 0 25% 1% 1 Search NI+DEPOSITION Search NI+DEPOSITION

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 XHRTEM CHARACTERIZATION 3 100% 2% 3
2 COHERENT TILT 3 45% 3% 5
3 TWIST BOUNDARY 1 40% 1% 2
4 BEAM TOPOGRAPHY 0 33% 1% 1
5 GROWTH STRUCTURE 0 33% 1% 1
6 35 GHZ 0 11% 2% 3
7 RIGID UNDERLAYERS 0 100% 1% 1

Journals

Reviews


Title Publ. year Cit. Active
references		 % act. ref.
to same field
Tuning exchange bias in epitaxial Ni/MgO/TiN heterostructures integrated on Si(100) 2014 2 25 28%
Polishing of advanced ceramics 1997 1 4 50%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 S IPNS 1 50% 0.7% 1
2 ODDZIAL WROCLAW 0 25% 0.7% 1
3 THE ANGSTROM 0 100% 0.7% 1
4 ZAKLAD MAT DIAGNOSTYKI 0 100% 0.7% 1

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000121365 NIFE FILM//ANISOTROPIC MAGNETORESISTANCE//PERMALLOY FILM
2 0.0000098840 FERROMAGNETIC SILICIDE//FE GAAS//PSEUDOMORPHIC STRUCTURE
3 0.0000097097 LANGMUIR SORPTION MODEL//ION CLUSTER BEAM DEPOSITION//IONIZED CLUSTER BEAM TECHNIQUE
4 0.0000093358 X RAY SURFACE DIFFRACTION//MHATT//BM25 SPLINE
5 0.0000083250 AU NI50FE50//ECS ENGN//CIENCIAS FIS LCFIS
6 0.0000072979 CD2RE2O7//KOS2O6//BETA PYROCHLORE OXIDE
7 0.0000072155 AMERG//PHYS PROCEDES VIDE//INTRINSIC STRESS
8 0.0000069306 THIN NB FILMS//SLOW POSITRON IMPLANTATION SPECTROSCOPY//IONENSTRAHLPHYS MATERIALFOR UNG
9 0.0000066572 QUANTUM SCI GRP//AVADH BHATIA PHYS//GARCIA MRSEC POLYMERS ENGINEERED INTER ES
10 0.0000066137 BATUMI POLYTECH//PRECESSION PHASE//SPIN WAVES SURFACE MODES