Class information for:
Level 1: LOW INDUCTANCE ANTENNA//LOW DAMAGE PROCESS//INDUCTIVELY COUPLED PLASMA

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
8609 1168 21.7 66%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 2)


ID, lev.
above		 Publications Label for level above
512 14399 PLASMA SOURCES SCIENCE & TECHNOLOGY//PLASMA DISPLAY PANEL PDP//PLASMA DISPLAY PANEL

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 LOW INDUCTANCE ANTENNA Author keyword 21 85% 1% 11
2 LOW DAMAGE PROCESS Author keyword 20 100% 1% 9
3 INDUCTIVELY COUPLED PLASMA Author keyword 10 10% 7% 87
4 INTERNAL ANTENNA Author keyword 5 22% 2% 22
5 PLASMA UNIFORMITY Author keyword 5 38% 1% 11
6 LARGE AREA PLASMA SOURCE Author keyword 5 63% 0% 5
7 LARGE AREA PLASMA Author keyword 5 37% 1% 10
8 PLASMA ATOM PHYS Address 4 21% 2% 18
9 E H TRANSITION Author keyword 3 100% 0% 3
10 PLASMA NANO SCIENCE Author keyword 3 100% 0% 3

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 LOW INDUCTANCE ANTENNA 21 85% 1% 11 Search LOW+INDUCTANCE+ANTENNA Search LOW+INDUCTANCE+ANTENNA
2 LOW DAMAGE PROCESS 20 100% 1% 9 Search LOW+DAMAGE+PROCESS Search LOW+DAMAGE+PROCESS
3 INDUCTIVELY COUPLED PLASMA 10 10% 7% 87 Search INDUCTIVELY+COUPLED+PLASMA Search INDUCTIVELY+COUPLED+PLASMA
4 INTERNAL ANTENNA 5 22% 2% 22 Search INTERNAL+ANTENNA Search INTERNAL+ANTENNA
5 PLASMA UNIFORMITY 5 38% 1% 11 Search PLASMA+UNIFORMITY Search PLASMA+UNIFORMITY
6 LARGE AREA PLASMA SOURCE 5 63% 0% 5 Search LARGE+AREA+PLASMA+SOURCE Search LARGE+AREA+PLASMA+SOURCE
7 LARGE AREA PLASMA 5 37% 1% 10 Search LARGE+AREA+PLASMA Search LARGE+AREA+PLASMA
8 E H TRANSITION 3 100% 0% 3 Search E+H+TRANSITION Search E+H+TRANSITION
9 PLASMA NANO SCIENCE 3 100% 0% 3 Search PLASMA+NANO+SCIENCE Search PLASMA+NANO+SCIENCE
10 INDUCTIVELY COUPLED PLASMAS 3 29% 1% 9 Search INDUCTIVELY+COUPLED+PLASMAS Search INDUCTIVELY+COUPLED+PLASMAS

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 ARGON DISCHARGE 33 72% 2% 26
2 PLANAR COIL 30 100% 1% 12
3 LOW INDUCTANCE ANTENNA 15 71% 1% 12
4 ICP DISCHARGE 15 88% 1% 7
5 H TRANSITION 12 31% 3% 32
6 HEATING MODE TRANSITION 12 50% 1% 17
7 ENERGY DISTRIBUTION FUNCTION 11 22% 4% 44
8 ATTACHING GASES 10 61% 1% 11
9 METASTABLE LEVELS 9 43% 1% 16
10 ANTENNA CONFIGURATION 9 83% 0% 5

Journals

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
Optical emission spectroscopy in low-temperature plasmas containing argon and nitrogen: determination of the electron temperature and density by the line-ratio method 2010 26 106 37%
Plasma electron temperatures and electron energy distributions measured by trace rare gases optical emission spectroscopy 2004 106 58 28%
Laser Thomson scattering for low-temperature plasmas 2011 15 24 42%
Ferromagnetic enhanced inductive plasma sources 2013 3 34 68%
Application of excitation cross sections to optical plasma diagnostics 2004 88 95 26%
The anomalous skin effect in gas discharge plasmas 1997 37 13 85%
Linear Plasma Sources for Large Area Film Deposition: A Brief Review 2014 1 50 40%
Diagnostics of low-density glow discharge plasmas using Thomson scattering 1998 35 12 42%
On simplifying approaches to the solution of the Boltzmann equation in spatially inhomogeneous plasmas 1996 121 52 19%
Electron-impact excitation of rare-gas atoms from the ground level and metastable levels 2007 1 84 38%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 PLASMA ATOM PHYS 4 21% 1.5% 18
2 VACUUM TECHNOL 2 17% 1.1% 13
3 PLASMAS LICADOS 2 67% 0.2% 2
4 NANOSCALE SEMICOND ENGN 2 11% 1.5% 17
5 PLASMA NANOTECHNOL 2 12% 1.1% 13
6 ADV FILM BARRIER SOLUT 1 100% 0.2% 2
7 VARIAN SEMICOND EQUIPMENT 1 33% 0.2% 2
8 ADV MAT TECHNOL DEV 1 50% 0.1% 1
9 GAS ELECT 1 50% 0.1% 1
10 PHYS WERPUNKT MAT WISSEN 1 50% 0.1% 1

Related classes at same level (level 1)


Rank Relatedness score Related classes
1 0.0000281005 LADDER SHAPED ELECTRODE//PLASMA ATOM PHYS//VHF PLASMA
2 0.0000210130 VACUUM TECHNOL//ACTIVE PLASMA RESONANCE SPECTROSCOPY//CUTOFF PROBE
3 0.0000195455 SPATIALLY INHOMOGENEOUS BOLTZMANN EQUATION//IONIZATION WAVES//ELECTRON VELOCITY DISTRIBUTION FUNCTION
4 0.0000185277 SPACE PLASMA POWER PROP GRP//SPACE PLASMA POWER PROP//HELICON WAVE
5 0.0000163844 MAGNETIC NEUTRAL LINE//NEUTRAL LOOP DISCHARGE//TCO LESS DSCS
6 0.0000155247 ELECT DEVICES MAT TECHNOL//SIO2 ETCHING//PLASMA ETCHING
7 0.0000133467 SURFACE WAVE PLASMA//GRP ESPE OSCOPIA PLASMAS//GRP PHYS PLASMAS
8 0.0000126904 BOHM CRITERION//PLASMA SOLID INTERACTION//EMISSIVE PROBE
9 0.0000123660 ECR PLASMA//UNIFORM PLASMA//MAGNETIC MULTIPOLE FIELD
10 0.0000114998 HIGH TEMP SCI S//ATOM PHYS SPECT//AR HG DISCHARGE