Class information for:
Level 2: INTERFACIAL SILICON EMISSION//SILICON OXIDATION//GENIE URBAIN ENVIRONM

Basic class information
ID Publications Average number
of references		 Avg. shr. active
ref. in WoS
2557 3267 19.0 45%


Bar chart of Publication_year

Last years might be incomplete

Classes in level above (level 3)


ID, lev.
above		 Publications Label for level above
15 127408 IEEE TRANSACTIONS ON ELECTRON DEVICES//IEEE ELECTRON DEVICE LETTERS//SOLID-STATE ELECTRONICS

Classes in level below (level 1)


ID, lev. below Publications Label for level below
7628 1266 INTERFACIAL SILICON EMISSION//SILICON OXIDATION//LOW TEMPERATURE SILICON OXIDATION
14795 680 BOROPHOSPHOSILICATE GLASS BPSG//ATMOSPHERIC PRESSURE CVD//BPSG
20142 411 IRRADIATED P N JUNCTION LEAKAGE//JUNCTION SHAPE//P N JUNCTION LEAKAGE
21535 357 GENIE URBAIN ENVIRONM//COMPUTERISING//OXYNITRIDE FILMS
24944 247 SIPOS//MSOS O P STRUCTURE//SEMI INSULATING POLYCRYSTALLINE SILICON
30693 134 ELECTRICAL PASSIVATION OF STRUCTURAL DEFECTS//GAAS DIODE//TRIPLE CRYSTAL DIFFRACTOMETRY
33328 94 HITACHI ADM//SOLAR CELL METALLIZATION//
34107 78 CONE DEFECT//DYED RESIST//NITRIDE BUBBLES

Terms with highest relevance score


Rank Term Type of term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 INTERFACIAL SILICON EMISSION Author keyword 11 100% 0% 6
2 SILICON OXIDATION Author keyword 7 36% 0% 16
3 GENIE URBAIN ENVIRONM Address 6 80% 0% 4
4 SEMI INSULATING POLYCRYSTALLINE SILICON Author keyword 4 75% 0% 3
5 LOW TEMPERATURE SILICON OXIDATION Author keyword 3 100% 0% 3
6 THERMALLY GROWN SIO2 Author keyword 3 60% 0% 3
7 SI OXIDATION Author keyword 3 42% 0% 5
8 THERMAL SIO2 Author keyword 3 42% 0% 5
9 BOROPHOSPHOSILICATE GLASS BPSG Author keyword 2 67% 0% 2
10 COMPUTERISING Author keyword 2 67% 0% 2

Web of Science journal categories

Author Key Words


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class		 LCSH search Wikipedia search
1 INTERFACIAL SILICON EMISSION 11 100% 0% 6 Search INTERFACIAL+SILICON+EMISSION Search INTERFACIAL+SILICON+EMISSION
2 SILICON OXIDATION 7 36% 0% 16 Search SILICON+OXIDATION Search SILICON+OXIDATION
3 SEMI INSULATING POLYCRYSTALLINE SILICON 4 75% 0% 3 Search SEMI+INSULATING+POLYCRYSTALLINE+SILICON Search SEMI+INSULATING+POLYCRYSTALLINE+SILICON
4 LOW TEMPERATURE SILICON OXIDATION 3 100% 0% 3 Search LOW+TEMPERATURE+SILICON+OXIDATION Search LOW+TEMPERATURE+SILICON+OXIDATION
5 THERMALLY GROWN SIO2 3 60% 0% 3 Search THERMALLY+GROWN+SIO2 Search THERMALLY+GROWN+SIO2
6 SI OXIDATION 3 42% 0% 5 Search SI+OXIDATION Search SI+OXIDATION
7 THERMAL SIO2 3 42% 0% 5 Search THERMAL+SIO2 Search THERMAL+SIO2
8 BOROPHOSPHOSILICATE GLASS BPSG 2 67% 0% 2 Search BOROPHOSPHOSILICATE+GLASS+BPSG Search BOROPHOSPHOSILICATE+GLASS+BPSG
9 COMPUTERISING 2 67% 0% 2 Search COMPUTERISING Search COMPUTERISING
10 CONCENTRATED OZONE 2 67% 0% 2 Search CONCENTRATED+OZONE Search CONCENTRATED+OZONE

Key Words Plus


Rank Web of Science journal category Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ. in
class
1 DRY OXYGEN 27 46% 1% 44
2 LOW TEMPERATURE REFLOW 27 92% 0% 11
3 BOROPHOSPHOSILICATE GLASS 25 66% 1% 23
4 10 MTORR 18 89% 0% 8
5 SIPOS 17 68% 0% 15
6 THIN REGIME 14 59% 0% 16
7 SI001 SIO2 INTERFACE 14 42% 1% 25
8 SI100 SIO2 INTERFACE 14 65% 0% 13
9 TEOS 13 21% 2% 55
10 PHOSPHOSILICATE GLASS 13 62% 0% 13

Journals

Reviews


Title Publ. year Cit. Active references % act. ref.
to same field
GROWTH-MECHANISM OF THIN SILICON-OXIDE FILMS ON SI(100) STUDIED BY MEDIUM-ENERGY ION-SCATTERING 1995 139 84 36%
Silicon oxidation by ozone 2009 9 82 51%
MODELS FOR THE OXIDATION OF SILICON 1988 63 60 72%
PROCESS AND FILM CHARACTERIZATION OF LOW-PRESSURE TETRAETHYLORTHOSILICATE-BOROPHOSPHOSILICATE GLASS 1986 69 26 85%
Photon-assisted oxidation and oxide thin film synthesis: A review 2009 22 267 10%
Characterization and production metrology of thin transistor gate oxide films 1999 41 48 27%
Electrical and optical properties of semi-insulating polycrystalline silicon thin films: The role of microstructure and doping 1996 21 55 47%
OXIDATION OF SILICON - THE VLSI GATE DIELECTRIC 1995 73 91 21%
THE PULSED MIS CAPACITOR - A CRITICAL-REVIEW 1985 53 8 100%
CVD of SiO2 and related materials: An overview 1996 14 37 54%

Address terms


Rank Address term Relevance score
(tfidf)		 Class's shr.
of term's tot.
occurrences		 Shr. of publ.
in class containing
term		 Num. of
publ.
in class
1 GENIE URBAIN ENVIRONM 6 80% 0.1% 4
2 THEORIE PHENOMENES PHYS ITP 2 67% 0.1% 2
3 QAS 1 100% 0.1% 2
4 SHIGA TECHNOL 1 29% 0.1% 4
5 LSI BUSINESS TECHNOL DEV GRP 1 40% 0.1% 2
6 PPH ECUBLENS 1 17% 0.2% 5
7 MAT PL SCI 1 11% 0.2% 7
8 IMAGE TECHNOL GRP 1 33% 0.1% 2
9 ADV EDRAM 1 50% 0.0% 1
10 CNC CO 1 50% 0.0% 1

Related classes at same level (level 2)


Rank Relatedness score Related classes
1 0.0000063006 PHOTORESIST REMOVAL//WET OZONE//HYDROGEN TERMINATION
2 0.0000020049 IEEE TRANSACTIONS ON ELECTRON DEVICES//IEEE ELECTRON DEVICE LETTERS//SOLID-STATE ELECTRONICS
3 0.0000015531 INTERFACIAL SHEARS//MICROBENDING LOSS//RAPID THERMAL PROCESSING RTP
4 0.0000014441 H CURIEN//PHYS ASTRON SCI//TRANSPARENT ELE OACT MAT PROJECT
5 0.0000012733 SWAMP//OXYGEN PRECIPITATION//GROWN IN DEFECT
6 0.0000012235 AC SURFACE PHOTOVOLTAGE//ELECTRON WORK FUNCTION//SUPERCONDUCTIVITY MECHANISM
7 0.0000011227 HFO2//HIGH K//HIGH K DIELECTRICS
8 0.0000011187 POROUS SILICON//SILICON NANOCRYSTALS//SI NANOCRYSTALS
9 0.0000010012 SCANNING TUNNELING MICROSCOPY//ATOM WI LAYERS//VICINAL SINGLE CRYSTAL SURFACES
10 0.0000009942 MICROCRYSTALLINE SILICON//JOURNAL OF NON-CRYSTALLINE SOLIDS//PHOTOVOLTA THIN FILM ELECT