Class information for:
Level 1: WAFER RINSING//SINGLE WAFER CLEANING TOOLS//ACTIVATED CARBON ADSORPTION PROCESS

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
3 4 GEOSCIENCES, MULTIDISCIPLINARY//GEOCHEMISTRY & GEOPHYSICS//METEOROLOGY & ATMOSPHERIC SCIENCES 1953906
152 3       WATER SCIENCE AND TECHNOLOGY//ENGINEERING, ENVIRONMENTAL//ANAEROBIC DIGESTION 64424
1049 2             CONSTRUCTED WETLANDS//CONSTRUCTED WETLAND//WATER SCIENCE AND TECHNOLOGY 10359
35421 1                   WAFER RINSING//SINGLE WAFER CLEANING TOOLS//ACTIVATED CARBON ADSORPTION PROCESS 112

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 WAFER RINSING authKW 1172508 4% 83% 5
2 SINGLE WAFER CLEANING TOOLS authKW 562804 2% 100% 2
3 ACTIVATED CARBON ADSORPTION PROCESS authKW 281402 1% 100% 1
4 ACUTE EXPOSURE VALVE authKW 281402 1% 100% 1
5 ADSORPTION OUTGASSING authKW 281402 1% 100% 1
6 AMENITY USE OF TREATED WATER authKW 281402 1% 100% 1
7 ARTIFICIAL STREAM SESERAGI authKW 281402 1% 100% 1
8 BADAN SRODOWISKIEM ZROWNOWAZONYCH TECHNOL address 281402 1% 100% 1
9 BASIC ENVIRONMENTAL POLLUTION CONTROL LAW authKW 281402 1% 100% 1
10 BASIC EPC LAW authKW 281402 1% 100% 1

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Engineering, Environmental 2442 38% 0% 42
2 Water Resources 2377 39% 0% 44
3 Environmental Sciences 790 41% 0% 46
4 Engineering, Chemical 224 20% 0% 22
5 Engineering, Manufacturing 65 4% 0% 5
6 Limnology 50 3% 0% 3
7 Biotechnology & Applied Microbiology 45 10% 0% 11
8 Literature, American 36 1% 0% 1
9 Engineering, Electrical & Electronic 27 12% 0% 13
10 Food Science & Technology 15 5% 0% 6

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 BADAN SRODOWISKIEM ZROWNOWAZONYCH TECHNOL 281402 1% 100% 1
2 CHEM ULTR URE WATER TECHNOL GRP 281402 1% 100% 1
3 ENVIRONM BENIGN SEMICOND MFG 281402 1% 100% 1
4 INTEGRATED SOLUT BUSINESS ENGN 281402 1% 100% 1
5 NSFSRC 281402 1% 100% 1
6 ORG ALIMENTAT AGR NATIONS UNIES 281402 1% 100% 1
7 PROC DESIGN CONSULTING CATCHMENT BASIN MANAGEME 281402 1% 100% 1
8 PROD ST ANIM 281402 1% 100% 1
9 SEWAGE TREATMENT STORAGE REUSE 281402 1% 100% 1
10 SRC ENGN 281402 1% 100% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MICRO 14384 3% 2% 3
2 JOURNAL OF THE INSTITUTE OF ENVIRONMENTAL SCIENCES 8525 1% 3% 1
3 WATER SCIENCE AND TECHNOLOGY 7879 21% 0% 24
4 PDA JOURNAL OF PHARMACEUTICAL SCIENCE AND TECHNOLOGY 4180 2% 1% 2
5 LEVIATHAN-A JOURNAL OF MELVILLE STUDIES 3516 1% 1% 1
6 WATER-ENGINEERING & MANAGEMENT 3006 2% 1% 2
7 IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 2810 4% 0% 4
8 INTERNATIONAL SUGAR JOURNAL 2092 3% 0% 3
9 GENETIC ENGINEERING & BIOTECHNOLOGY NEWS 2022 1% 1% 1
10 RESOURCES CONSERVATION AND RECYCLING 1770 4% 0% 4

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 WAFER RINSING 1172508 4% 83% 5 Search WAFER+RINSING Search WAFER+RINSING
2 SINGLE WAFER CLEANING TOOLS 562804 2% 100% 2 Search SINGLE+WAFER+CLEANING+TOOLS Search SINGLE+WAFER+CLEANING+TOOLS
3 ACTIVATED CARBON ADSORPTION PROCESS 281402 1% 100% 1 Search ACTIVATED+CARBON+ADSORPTION+PROCESS Search ACTIVATED+CARBON+ADSORPTION+PROCESS
4 ACUTE EXPOSURE VALVE 281402 1% 100% 1 Search ACUTE+EXPOSURE+VALVE Search ACUTE+EXPOSURE+VALVE
5 ADSORPTION OUTGASSING 281402 1% 100% 1 Search ADSORPTION+OUTGASSING Search ADSORPTION+OUTGASSING
6 AMENITY USE OF TREATED WATER 281402 1% 100% 1 Search AMENITY+USE+OF+TREATED+WATER Search AMENITY+USE+OF+TREATED+WATER
7 ARTIFICIAL STREAM SESERAGI 281402 1% 100% 1 Search ARTIFICIAL+STREAM+SESERAGI Search ARTIFICIAL+STREAM+SESERAGI
8 BASIC ENVIRONMENTAL POLLUTION CONTROL LAW 281402 1% 100% 1 Search BASIC+ENVIRONMENTAL+POLLUTION+CONTROL+LAW Search BASIC+ENVIRONMENTAL+POLLUTION+CONTROL+LAW
9 BASIC EPC LAW 281402 1% 100% 1 Search BASIC+EPC+LAW Search BASIC+EPC+LAW
10 BASIN WIDE MANAGEMENT 281402 1% 100% 1 Search BASIN+WIDE+MANAGEMENT Search BASIN+WIDE+MANAGEMENT

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 16861 RECYCLED WATER//WATER RECYCLING//WATER REUSE
2 33039 METAL FINISHING//ABYSSAL LITTER//BEET SUGAR EFFLUENTS
3 34736 METALLIC DIAPHRAGM CELL METHOD//1 BUTANOL RICH PHASE//ACTIVE OPTICAL ELEMENTS
4 37460 SHOALWATER BAY TRAINING AREA//BIOCYCLE//ACRU AGROHYDROLOGICAL MODEL
5 38419 ACCOUNTABILITY HCBS//CARBON RISK PREDICTION//COMPOSITE HAZARDOUS WASTES
6 33297 INTEGRATED SAFEGUARDS//WATER POLLUTION CONTROL//COMBINING DISTRIBUTIONS
7 27503 CABOOLTURE WATER RECLAMATION PLANT//CONFECTIONARY DECORAT//FORCED VORTEX ASSISTED LIQUID PHASE MICROEXTRACTION
8 37476 CLIN TECHNOL INNOVAT ARCH AREA//EQUIPMENT MANAGEMENT PROGRAM//INVEST RUMENTAC IMAGENOL MED CI3M
9 37448 ALLOCATION AND MANAGEMENT//ADMINISTRATIVE AND LEGAL STRUCTURE//AUSTRALIAN SPECIALIST ENVIRONMENTAL COURTS
10 34947 PHARMAZEUTISCHE INDUSTRIE//ABT BIOPHARMAZEUT QUALITAT COMPLIANCE MIKROBIOL//ABT BIOPHARMAZEUT QUALITAT ENTWICKLUNG MIKROBIO

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