Class information for:
Level 1: PLASMA IMMERSION ION IMPLANTATION//PLASMA BASED ION IMPLANTATION//PLASMA SOURCE ION IMPLANTATION

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
378 3       NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//NUCLEAR SCIENCE & TECHNOLOGY//INSTRUMENTS & INSTRUMENTATION 34252
1498 2             PLASMA IMMERSION ION IMPLANTATION//PLASMA BASED ION IMPLANTATION//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 7805
8355 1                   PLASMA IMMERSION ION IMPLANTATION//PLASMA BASED ION IMPLANTATION//PLASMA SOURCE ION IMPLANTATION 1291

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PLASMA IMMERSION ION IMPLANTATION authKW 1783184 14% 42% 176
2 PLASMA BASED ION IMPLANTATION authKW 1228568 6% 70% 72
3 PLASMA SOURCE ION IMPLANTATION authKW 396745 2% 51% 32
4 SHUNTING ARC authKW 390577 1% 100% 16
5 PLASMA IMMERSION ION IMPLANTATION PIII authKW 378709 2% 48% 32
6 PLASMA BASED ION IMPLANTATION PBII authKW 255120 1% 58% 18
7 PLASMA DOPING PLAD authKW 242669 1% 76% 13
8 ION SHEATH authKW 239206 2% 47% 21
9 PIII authKW 233143 3% 29% 33
10 PBIID authKW 179751 1% 82% 9

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 28704 34% 0% 438
2 Physics, Applied 12851 63% 0% 815
3 Physics, Fluids & Plasmas 3565 13% 0% 171
4 Instruments & Instrumentation 2073 13% 0% 171
5 Physics, Nuclear 1458 10% 0% 134
6 Nuclear Science & Technology 1429 10% 0% 133
7 Physics, Atomic, Molecular & Chemical 742 11% 0% 136
8 Nanoscience & Nanotechnology 263 6% 0% 76
9 Materials Science, Multidisciplinary 154 11% 0% 145
10 Engineering, Electrical & Electronic 123 8% 0% 109

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 702 175738 1% 40% 18
2 PLASMA SCI MICROELECT 156228 1% 80% 8
3 MAT COMPONENT DEV 146466 0% 100% 6
4 ASSOCIADO MAT SENSO 130187 1% 67% 8
5 ASSOC PLASMA 120171 1% 62% 8
6 ASSOCIADO PLASMA 113600 1% 29% 16
7 ASSOCIATED PLASMA 108359 2% 20% 22
8 STATE WELDING PROD TECHNOL 82376 1% 38% 9
9 PHYS MAT SCI 66126 13% 2% 163
10 CAULT 48822 0% 100% 2

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SURFACE & COATINGS TECHNOLOGY 149123 27% 2% 350
2 IEEE TRANSACTIONS ON PLASMA SCIENCE 22897 8% 1% 97
3 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 12999 10% 0% 131
4 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 5503 5% 0% 62
5 PLASMA SOURCES SCIENCE & TECHNOLOGY 4095 2% 1% 22
6 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 1701 2% 0% 32
7 JOURNAL OF APPLIED PHYSICS 1679 7% 0% 89
8 JOURNAL OF PHYSICS D-APPLIED PHYSICS 1412 3% 0% 36
9 NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY 1397 0% 1% 4
10 VACUUM 1288 2% 0% 23

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 PLASMA IMMERSION ION IMPLANTATION 1783184 14% 42% 176 Search PLASMA+IMMERSION+ION+IMPLANTATION Search PLASMA+IMMERSION+ION+IMPLANTATION
2 PLASMA BASED ION IMPLANTATION 1228568 6% 70% 72 Search PLASMA+BASED+ION+IMPLANTATION Search PLASMA+BASED+ION+IMPLANTATION
3 PLASMA SOURCE ION IMPLANTATION 396745 2% 51% 32 Search PLASMA+SOURCE+ION+IMPLANTATION Search PLASMA+SOURCE+ION+IMPLANTATION
4 SHUNTING ARC 390577 1% 100% 16 Search SHUNTING+ARC Search SHUNTING+ARC
5 PLASMA IMMERSION ION IMPLANTATION PIII 378709 2% 48% 32 Search PLASMA+IMMERSION+ION+IMPLANTATION+PIII Search PLASMA+IMMERSION+ION+IMPLANTATION+PIII
6 PLASMA BASED ION IMPLANTATION PBII 255120 1% 58% 18 Search PLASMA+BASED+ION+IMPLANTATION+PBII Search PLASMA+BASED+ION+IMPLANTATION+PBII
7 PLASMA DOPING PLAD 242669 1% 76% 13 Search PLASMA+DOPING+PLAD Search PLASMA+DOPING+PLAD
8 ION SHEATH 239206 2% 47% 21 Search ION+SHEATH Search ION+SHEATH
9 PIII 233143 3% 29% 33 Search PIII Search PIII
10 PBIID 179751 1% 82% 9 Search PBIID Search PBIID

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 3814 ION IMPLANTATION//RADIAT BEAM MAT ENGN//CARBON ION IMPLANTATION
2 1726 PLASMA NITRIDING//EXPANDED AUSTENITE//NITRIDING
3 2736 VACUUM ARC//CATHODE SPOT//VACUUM INTERRUPTER
4 5695 BOHM CRITERION//OXFORD UNIT//PLASMA SHEATHS
5 1716 DIAMOND LIKE CARBON//DLC//DLC COATINGS
6 26765 HOLLOW CATHODE//FUSED HOLLOW CATHODE//PLASMA GRP
7 27771 TI O FILM//ADV TECHNOL MAT//BIOMAT SUR E ENGN
8 12851 DOUBLE GLOW//LASER NITRIDING//PLASMA SURFACE ALLOYING
9 34646 FIS LICADA DESARROLLO TECNOL//FURAN RESIN DERIVED CARBON GLASS LIKE CARBON//ION MIXED INTERFACES
10 171 DIAMOND LIKE CARBON//AMORPHOUS CARBON//TETRAHEDRAL AMORPHOUS CARBON

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