Lars Mattsson

Professor Emeritus

Contact

Telephone: +46(0)8-790 9175

Fax: 08-21 08 51

E-mail: larsm@kth.se 

Background

Lars Mattsson was born in Norberg, Västmanland, Sweden, in 1950. He attended the University of Uppsala, majoring in mathematics and physics and received a B.S. degree in physics in 1973 after completing the compulsory year of military duty in 1970-1971. He did his graduate thesis work under Nobel laureate Kai Siegbahn in the Electron Spectroscopy group of the Physics Department at the University of Uppsala, and received his Ph.D. degree in 1980. His thesis research involved developing an efficient focusing vacuum-ultraviolet polarizer for strongly enhanced irradiation of gases in angle-resolved photoelectron spectroscopy.

From 1981 to 1988 Dr. Mattsson was involved in several projects at the University of Uppsala to develop high-quality extreme-ultraviolet (EUV) mirrors and to characterize mirror surfaces and thin films by scattering measurements in the EUV and visible regions. He built an in situ angle-resolved scattering system that was later used by CERN in Geneva for the assessment of EUV mirrors for the DELPHI detector in the Large Electron-Positron Collider project. In 1984 he became an associate professor and joined the staff of the Institute of Optical Research in Stockholm on a part-time basis. There he built a low-noise total integrated scattering (TIS) system making surface roughness studies feasible in the subangstrom range, and he quantified the extremely low scatter and roughness of high quality silicon wafers in 1986. Dr. Mattsson moved his laboratory from Uppsala to Stockholm in 1988 and, with former president of the Optical Society of America Dr. Jean M. Bennett, set up the Surface Evaluation Laboratory at the Institute of Optical Research. He continuously expanded the laboratory and by 1998 it comprised 13 instruments including angle-resolved scatterometers, total integrated scattering facilities, an instrument for near-specular stray light measurement of infrared optical systems, scanning probe and Nomarski microscopes with image processing facilities and a Talystep surface profiler. In 1991 he became research manager and established the surface characterization group, which by 1998 had expanded to 10 scientists. His main research area has been the exploitation of light scattering at different wavelengths for surface characterization from atomic levels of semiconductor substrates through thin metal films to paper and engineering surfaces with micron roughness. Dr. Mattsson and his group have demonstrated the use of 10.6 mm infrared radiation for rapid assessment of surface roughness over large areas of engineering surfaces and have developed an instrument for simultaneous deformation and stress-relaxation analysis of metal films. In the last years of the 1990ies his work was focused on the optics of paper and paper surfaces and he set up the project that has provided Grace, the first thorough light and paper simulation software tool. Efforts were also put on stray light characterization in infrared optical systems. In 1998 Dr. Mattsson was appointed a full professor in industrial metrology at KTH - the Royal Institute of Technology, Stockholm, Sweden. His research has covered laser metrology, measurement of surface deformations, surface characterization by mechanical and optical techniques, ultra-precision dimensional metrology, optical coherence tomography (OCT) in ceramics, measurement of high aspect ratio microstructures, 3D-holographic visualization, and assessment of surfaces with respect to cosmetic appearance. He has also contributed to the development of technical aids for visually disabled persons by adapting techniques from industrial metrology. In 2002-2005 he was appointed deputy director of the KTH/KI Nano- and Microtechnology Centre, and in 2004-2009 he was the head of the Metrology Division in the 4M European Network of Excellence for Multi Material Micro Manufacture, a joint project between 30 European universities and research institutes. Within this project an outstanding world record in high aspect ratio micro structure measurements was set in 2007 after finding that optical profilers suffered badly of poor lateral accuracy when measuring such structures. From 2005 to 2013 he was Head of the Department of Production Engineering at KTH. 2006 he established a joint national metrology project, SIMET, with the objective of increasing the interaction between people active in dimensional metrology people within Sweden. The purpose of the project was also to raise the status and setting industrial metrology on the agenda for the future in both education and research. He has been work package leader in the FP7-projects EUMINAfab, Multilayer, Locomachs and NEMI. After incorporating Dr. Peter Ekberg, formerly at Mycronic, in the research group, self-calibration and image analysis have been the main issues over the last years. The results are the most advanced 2D-large area metrology system ever built, capable of measurement uncertainties < 90 nm over square meter sized chromium/glass masks. The continued work with self-calibration has opened up for single nm-accuracy in X,Y on ordinary optical microscope systems and the KTH Image metrology system (KIMS), based on stereo photography, has proven that highly repeatable (< 10 um) 3D measurements can be done on half-meter sized objects, at an instrument cost of 2% of normal measurement systems, by using standard consumer products. Before retiring in August 2017, professor Mattsson delivered an optical innovation to a small Swedish company, making them best in test at Rolls Royce. His discovery of a potential non-destructive white layer test on hard turned steel surfaces is under patent negotiations.  

Prof. Mattsson is the author or co-author of more than 130 scientific papers, three editions of the book “Introduction to Surface Roughness and Scattering” published by the Optical Society of America / Rozhhdetvensky Optical Society of Russia, and three chapters on metrology in other books. He has given invited lectures in Sweden, Norway, England, Belgium, Bulgaria, France, the Netherlands, Germany, Austria, Switzerland, Hungary, Poland, Slovenia, Russia, China, and the United States. He is a Fellow of the Society of Photo-Optical Instrumentation Engineers and is appointed as a metrology evaluator and expert by the European Commission.

Curriculum Vitae

2017

Professor emeritus

Industrial Metrology

Royal Institute of Technology

Stockholm, Sweden

1998 - 2017

Professor

Royal Institute of Technology

Stockholm, Sweden

1984

Docent - Associate Professor

Uppsala University

Uppsala, Sweden

1980

Ph.D

Physics

Uppsala University

Uppsala, Sweden

1973

B.Sc

Mathematics and Physics

Uppsala University

Uppsala, Sweden

Appointments

2015

CEO

LM Lightinteract AB

2005 - 2015

Head of department

Manufacturing and Metrology Systems / IIP

Royal Institute of Technology

Stockholm, Sweden

2003 - 2005

Deputy Department Head

Manufacturing and Metrology Systems / IIP

Royal Institute of Technology

Stockholm, Sweden

1998

Professor

Industrial metrology

Royal Institute of Technology

Stockholm, Sweden

1991 - 1999

Research manager

Inst. of Optical Research (now Acreo)

Stockholm, Sweden

1988 - 1991

Senior Scientist

Institute of Optical Research

Stockholm, Sweden

1984 - 1988

Scientist

Institute of Optical Research

Stockholm, Sweden

1981 - 1984

Researcher

Uppsala University

Uppsala, Sweden

1979 - 1981 Personal research assistant to Prof. Kai Siegbahn
1974 - 1979

Research assistant

Uppsala University

Uppsala, Sweden

Commissions of trust

  • Member of 4M2020 advisory board 2014 - 2015
  • Sub-cluster leader in Characterization Cluster, EU NMBP program 2014 - 2015
  • Scientific board member EU MNT infrastructure 2014 - 2015
  • Joint research action-leader – EU MNT infrastructure 2014 - 2015
  • WP-project EUMINAfab 2009 - 2013
  • WP-leader – EU NMP project NEMI 2013 - 2016
  • WP-leader – EU MNT project Multilayer 2008 - 2013
  • Invited Expert, Semi Europe standards MEMS committee
  • European Commission (IST) Invited specialist to Metrology Expert Group 
  • Executive board member and Conference Committee member of 4M Network of Excellence 2004 - 2009
  • Scientific Committee member of euspen 2011 –2013
  • Chairman, euspen Stockholm 2012, local organising committee
  • 4M Metrology division head, 4M European Network of Excellence, 2004 – 2009
  • Academic Research coordinator, Swedish Industrial Metrology Forum 2006 – 2013
  • Guest Professor, Chang Chun University, China 2004 - 2009
  • Expert member in Surface Structure, Swedish ISO Standardisation committee for Surface Structure 1998 – 2017
  • Deputy Director, KTH-KI Nano- and Microtechnology Centre, 2003 – 2006
  • Board member, Surface Treatment Programme at Karlstad University, 1999 – 2007
  • Invited speaker at conferences: 25 times, in 16 different countries
  • Referee in Optical Engineering, Precision Engineering, Applied Optics, Measurement Science and Technology, Optics Express, Computer Methods in Biomechanics and Biomedical Engineering

Entrepreneurial achievements

  • Set up a consulting business, LM Lightinteract AB, in Dec 2015
  • Designed and developed manufacturing method for optimized surface properties of the optics in commercial UV-inspection lamps – best in test at Rolls Royce evaluation 2015
  • Pending patent application: Non-destructive detection of white layers in hard turned steel 
  • Initiated SIMET- Forum
  • Developed light scattering technique for sub-Ångström surface roughness measurement of silicon wafers – achievements overtaken by Wacker Chemitronic AG
  • Initiated “Light and Paper” project with the objective of developing a software simulation tool for light interacting with paper. The final software package – Grace, is now applied in Paper and Pulp Industry, with its own user group, and supported from Innventia, Stockholm
  • Set up “Surface Evaluation Laboratory” – a business unit within the Institute of Optical Research with 11 scientists active and state of the art light scattering / surface metrology systems.

Other merits

World record:

Responsible for a world record set in High Aspect Micro Structure Measurement on Sept 17, 2007, (Nanotechnology e-news bulletin: March 18, 2008)

Awards:

SPIE-fellow 2003, for significant scientific and technical contributions in the field of optics

Tutorial book:

Introduction to Surface Roughness and Scattering, Co-author with Jean M. Bennett, published by the Optical Society of America 1989, 2:nd ed. 1999, and by the Rozhdestvensky Optical Society, St Petersburg, Russia 1993.

Recently received research grants:

  • EU-FP7 NEMI – project under theme Nanoscale mechanical metrology for industrial processes and products, 2013 – 2016, 0.3 MEuro
  • EU-FP7 Locomachs in the AAT call, 2012 – 2016, 0.4 MEuro
  • EU-FP7 EUMINAfab - Infrastructure project for micromanufacturing 2009-12, 0.4 MEuro
  • EU-FP7 Multilayer – Metrology of embedded microstructures, 2009-12, 0.3 MEuro
  • HOE Development of the autostereoscopic display of tomorrow - Investigation of how to implement LED-projectors to the holographic 3D display. 2009-10, 386 kSEK
  • PRICE – Sub-micron metrology for airfoil waviness, 2009-11, 500 kSEK  
  • OPRO - Sub-micron metrology of non-imaging optics, 2010 – 11, 728 kSEK
  • SIMET GICP – Inspection and control planning in the automotive industry, 2010-12, 3.4 MSEK

Publications

SCIENTIFIC OUTPUT - L. Mattsson 1974 - 2017

A: Books

  1. J.M. Bennett and L. Mattsson: "Introduction to surface roughness and scattering", Optical Society of America, Washington D.C., 1989
  2. (J.M. Bennett and L. Mattsson, Introduction to surface roughness and scattering, Russian edition) Rozhhdetvensky Optical Society, St Petersburg, 1993
  3. L. Mattsson: "Scanning Probe Microscopy" , p 77-81, in Surface Characterization, a users source book, by ed D. Brune, R. Hellborg, H.J. Whitlow and O. Hunderi, Wiley-VCH, Weinheim, 1997
  4. L. Mattsson: "Surface Roughness and Microtopography", p 82-100, in Surface Characterization, a users source book, by ed D. Brune, R. Hellborg, H.J. Whitlow and O. Hunderi, Wiley-VCH, Weinheim, 1997
  5. J.M. Bennett and L. Mattsson: "Introduction to surface roughness and scattering, 2:nd revised edition", Optical Society of America, Washington D.C., 1999
  6. L.Mattsson, V.Schulze and J. Schneider: “Quality assurance and metrology,” pp 305 – 325, in Ceramics Processing in Microtechnology, by ed. H.-J. Ritzhaupt-Kleissl and P.Johander, Whittles Publishing, Dunbeath, 2009

B: Refereed papers in journals

  1. T. Bergmark, L. Karlsson, R. Jadrny, L. Mattsson, R.G. Albridge and K. Siegbahn: "Isotopic effects in the electron spectra of H216O, H218O and D216O", J. Electron Spectr. 15, (1974) 85 - 89
  2. L. Karlsson, L. Mattsson, R. Jadrny, R.G. Albridge, S. Pinchas, T. Bergmark and K. Siegbahn: "Isotopic and vibronic coupling effects in the valence electron spectra of H216O, H218O and D216O", J. Chem. Phys. 62, (1975) 4745 - 4752
  3. L. Karlsson, L. Mattsson, R. Jadrny, T. Bergmark and K. Siegbahn: "Valence electron spectra of benzene, and the hexafluorides of sulphur, tungsten, molybdenum and uranium. An application of multichannel detector technique to UV-valence electron spectroscopy", Physica Scripta 14, (1976) 230 - 241
  4. L. Karlsson, L. Mattsson, R. Jadrny, T. Bergmark and K. Siegbahn: "Vibrational and vibronic structure in the valence electron spectrum of H2S", Physica Scripta 13, (1976) 229 - 234
  5. L. Karlsson, L. Mattsson, R. Jadrny, K. Thimm and K. Siegbahn: "Valence electron spectroscopy using polarized He I radiation", Phys. Lett. 58A, (1976) 381 - 384
  6. R. Jadrny, L. Karlsson, L. Mattsson, and K. Siegbahn: "The valence electron spectrum of SiF4" Chem Phys Lett 49, (1977) 203 - 206
  7. R. Jadrny, L. Karlsson, L. Mattsson, and K. Siegbahn: "Valence electron spectra of the chlorofluoromethanes CF3Cl, CF2Cl2 and CFCl3" Physica Scripta 16, (1977) 235 - 241
  8. L. Karlsson, R. Jadrny, L. Mattsson, F. T. Chau and K. Siegbahn: "Vibrational and vibronic structure in the valence electron spectra of CH3X molecules, (X = F, Cl, Br, I, OH)" Physica Scripta 16, (1977) 225 - 234
  9. L. Mattsson, L. Karlsson, R. Jadrny and K. Siegbahn: "Valence electron spectrum of C6H6 excited by linearly polarized He I radiation", Physica Scripta 16, (1977) 221 – 224
  10. L. Mattsson: "Contamination of VUV-optics", Israel Phys Soc 6, (1983) 48 - 50 
  11. L. Mattsson: "Reflector system for improved VUV-irradiance of molecular beams in photoelectron spectroscopy", Israel Phys Soc 6, (1983) 69 - 71
  12. L. Mattsson, H. Veenhuizen, S. Bergström, L. Karlsson, B. Wannberg and K. Siegbahn: "Photoelectron angular distributions of CO2 obtained with focused, polarized He I radiation", Israel Phys Soc 6, (1983) 176 – 178
  13. I. Reineck, B. Wannberg, H. Veenhuizen, C. Nohre, R. Maripuu, K.-E. Norell, L. Mattsson, L. Karlsson and K. Siegbahn: "Inelastic scattering and satellite fine structure in the high resolution UV photoelectron spectrum of CS2", J. Electron Spectr. 34 (1984) 235 - 252
  14. B. Wannberg, H. Veenhuizen, L. Mattsson, K.-E. Norell, L. Karlsson, and K. Siegbahn: "High resolution angle-resolved photoelectron spectrum of B 2S+g in CO2+" J. Phys. B: At. Mol. Phys. 17 (1984) L259-L264
  15. H. Veenhuizen, B. Wannberg, L. Mattsson, K.-E. Norell, L. Karlsson, and K. Siegbahn: "Acquisition and processing of angle-resolved photoelectron spectra recorded with focused polarized resonance radiation" J. Electron Spectr. 41 (1986) 187 - 203
  16. H. Veenhuizen, B. Wannberg, L. Mattsson, K.-E. Norell, C. Nohre, L. Karlsson, and K. Siegbahn:"High resolution angle-resolved photoelectron spectrum of CO2 excited with polarized resonance radiation", J. Electron Sectr. 41 (1986) 205 - 223
  17. B. Wannberg, H. Veenhuizen, K.-E. Norell, L. Karlsson, L. Mattsson, and K. Siegbahn: "Angular distribution of photoelectrons from the p-levels in Ar, Kr and Xe close to the threshold". J. Phys. B: At. Mol. Phys 19 (1986) 2267 - 2277
  18. M. Bergkvist, A. Roos, C.G. Ribbing, J. M. Bennett and L. Mattsson: "Optical scattering from oxidized metals, 2. Model verification for oxidized copper", Applied Optics 28 (1989) 3902 - 3907
  19. B. Wannberg, D. Nordfors, K.L. Tan, L. Karlsson and L. Mattsson: "High resolution angle resolved spectrum of CO excited with polarized resonance radiation", J. Electron Spectr. 47 (1988) 147 - 166
  20. J. M. Bennett, L. Mattsson, M. P. Keane and L. Karlsson: "Test of Strip Coating Materials for Protecting Optics", Applied Optics, 28 (1988) 1018.
  21. L. Mattsson, Y.- H. Le Page and F. Ericson: "Real-time study of migration in aluminium films by means of sub-Ångström sensitive scattering and profiling methods", Thin Solid Films, Vol 198, p. 149 - 156, 1991
  22. R. D. Jacobson, S. R. Wilson, G. A. Al-Jumaily, J. R. McNeil, J. M. Bennett, and L. Mattsson: "Microstructure Characterization by Angle-Resolved Scatter and Comparison to Measurements made by Other Techniques". Applied Optics, 31, (1992), 1426 - 1435
  23. T. E. Karlin, S. Nygren, L. Mattsson, E. André, M. Bjuggren and F. M. d'Heurle: "The influence of silicon substrate crystallinity and doping on TiSi2 thin film morphology", Appl. Surface Sci. 73, (1993), 280 - 284.
  24. L. Mattsson and P. Wågberg: "Assessment of surface finish on bulk scattering materials. A comparison between optical laser stylus and mechanical stylus profilometers", Precision Engineering, 15, (1993), 141 – 149
  25. L. Mattsson, J. Ingers and J. M. Bennett: "Wavelength dependence of angle-resolved scattering in the EUV-visible.", Applied Optics 33, (1994), 3523 - 3532.
  26. M. Bjuggren, L. Krummenacher and L. Mattsson:"Infrared diffuser for application in transmission and reflection at 10.6 µm" Applied Optics 36 (1997) 940-948
  27. M. Bjuggren, L. Krummenacher and L. Mattsson:"Characterization of engineering surfaces by infrared scattering" Optical Engineering, 36, (1997) 874 - 882.
  28. C. Kylner and L. Mattsson: "Initial development of the lateral hillock distribution in optical quality Al thin films studied in real-time", Thin Solid Films, 307 pp.169-177, (1997)
  29. M.-C. Béland and L. Mattsson: "Optical print quality of coated papers", Journal of Pulp and Paper Science, 23, (1997) J493 - J498
  30. C. Kylner and L. Mattsson: "An optical instrument for overall stress and local stress relaxation analysis in thin metal films", Review of Scientific Instruments, 68 (1997)143-149
  31. M. Bjuggren, L. Krummenacher and L. Mattsson:"Noncontact surface roughness measurement of engineering surfaces by total integrated infrared scattering", Precision Engineering, 20, (1997) 33 - 45.
  32. C. Kylner and L. Mattsson: "Simultaneous real-time study of initial hillocking and changes in overall stress in evaporated Al films during heating", Journal-of-Materials-Research.13, p.1666-71 (1998)
  33. C. Kylner and L. Mattsson: "Enhanced optical performance of aluminum films by copper inclusion", Thin-Solid-Films, vol 348, pp.222-6, 1999
  34. C. Kylner and L. Mattsson: "Initial hillock formation and changes in overall stress in Al-Cu films and pure Al films during heating" Journal-of-Materials-Research.14, 1999; p.4087-92. DOI: 10.1557/JMR.1999.0551
  35. L. Mattsson: "Understanding the visual appearance of aluminum surfaces", ATB Metallurgie, Volume 42, Issue 1-2, pp 3-7, 2002 
  36. S. Van Gils, S. Holten, E. Stijns, M. Vancaldenhoven, H Terryn, L. Mattsson: "Electropolishing of aluminium: processing and assessment of visual appearance", Surface and Interface Analysis, vol 35, pp. 121-127, 2003
  37. H. Granberg, J.Jensen, L. Mattsson: "Forward scattering of fiber-containing surfaces studied by 3-dimensional reflectance distribution simulations and measurements", Optical Engineering, vol. 42, pp. 2384 - 2390, 2003
  38. H. Granberg, M. Rundlöf, L. Mattsson: "Influence of surface-induced non-uniform reflectance on the diffuse reflectance factor - Part I. Model predictions", Journal of Pulp and Paper Science, vol. 29, pp. 247-253, 2003
  39. H. Granberg, M. Rundlöf, L. Mattsson: "Influence of surface-induced non-uniform reflectance on the diffuse reflectance factor - Part II. Experimental verification on coated substrates", Journal of Pulp and Paper Science, vol. 29, pp. 254-259, 2003
  40. Arino, I., Kleist, U.; Mattsson, L. Rigdahl, M.:“On the relation between surface texture and gloss of injection-molded pigmented plastics”, Polymer Engineering and Science, Vol 45, p 1343-56, 2005
  41. B. Nilsson, D. Tilert, A. Temun, T. E. Carlsson och L. Mattsson: "Fast four-channel fibre-optic displacement sensor for measuring impact waves at low cost", Meas. Sci. Technol. 17 1162-1166, 2006
  42. C.A. Rubio, L. Grimelius, J. Lindholm, H. Hamberg, A. Porwit, G. Elmberger, A. Höög, L. Kanter, E. Eriksson, S. Stemme, A. Orrego, L. Saft, F. Petersson, M. de la Torre, C. Ekström, Åström, Å. Rundgren, M. Djokic, E. Chandanos, C. Lenander, M. Machado, P. Nilsson and L. Mattsson: “Reliability of the reported size of removed colorectal polyps”, Anticancer Research 26, issue No 6C, 4895 – 4900, 2006
  43. D. Tilert, G. Svedbjörk, F. Ouchterlony, B. Nilsson, A. Temun, L. Mattsson: "Measurement of Explosively Induced Movement and Spalling of Granite Model Blocks", International Journal of Impact Engineering 34 (2007) 1936–1952.
  44. C. Suzuki, L. Mattsson, C.A. Rubio: “Assessing polyp size by improved digitalized computed tomography”, Anticancer Research 28, issue No 3A, p 1911-1916, 2008
  45. C.A. Rubio, C.M. Höög, O. Broström, J. Gustavsson, M. Karlsson, P. Moritz, R. Stig, O. Wikman, L. Mattsson, D. Palli: “Assessing the size of polyp phantoms in tandem colonoscopies”, Anticancer Research 29, issue No 5, p 1539-45, 2009
  46. R. Lindqvist, M. Lundgren, S. Hedman, P. Lindahl, T. Vångell and L. Mattsson: “An information-model approach for systematic and holistic geometrical inspection and control planning (GICP)", Journal of the CMSC, Vol. 4, autumn issue,p. 20-26, 2009-10-27
  47.  P. Ekberg, L. Stiblert and L.Mattsson: “Ultra-precision geometrical measurement technique based on a statistical random phase clock combined with acoustic-optical deflection”, Measurement Science and Technology, Vol 21, 2010, 125103, 7 pages
  48. Rong Su, Mikhail Kirillin, Peter Ekberg, Arne Roos, Ekaterina Sergeeva, and Lars Mattsson: Optical coherence tomography for quality assessment of embedded microchannels in alumina ceramic”, Optics Express Vol. 20, Iss. 4, pp. 4603–4618 (2012)
  49. Peter Ekberg, Lars Stiblert and Lars Mattsson: “Large area ultra precision 2D geometrical measurement technique based on statistical random phase detection”, Measurement Science and Technology, Vol 23, 2012, 035007, 9 pages
  50. Caroline Hyll, Hannes Vomhoff, Lars Mattsson:“A method for measurement of the directional emittance of paper in the infrared range”, Nordic Pulp & Paper Research Journal, Vol.27, Iss. 5, (2012) pp. 958-967
  51. C. Rubio, G. Svane, G. Ilescu, B. Adalsteinsson, T. Mathiesen, M. Tholin, M. Machida, E. C. Cervantes, L. Mattsson, E. Azavedo: “Pitfall in Assessing the Size of Tumor Phantoms on Mammograms”, Anticancer Research, Vol. 33, Iss. 3, (2013) pp. 1131-1134
  52. Caroline Hyll, Hannes Vomhoff, Lars Mattsson: ”Directional emittance of dry and moist paper”, Nordic Pulp & Paper Research Journal Vol 29 no (2) 2014
  53. Peter Ekberg, Lars Stiblert and Lars Mattsson: “A new general approach for solving the self-calibration problem on large area 2D ultra-precision coordinate measurement machines”, Measurement Science and Technology, Vol 25, 2014, 055001 (11pp), doi:10.1088/0957-0233/25/5/055001
  54. Peter Ekberg, Lars Stiblert and Lars Mattsson: “Z-correction, a method for achieving ultraprecise self-calibration on large area coordinates measurement machines for photo masks”, Measurement Science and Technology, Vol 25, 2014, 055002 (8pp), doi:10.1088/0957-0233/25/5/055002
  55. Peter Ekberg, Rong Su, Ernest W. Chang, Seok Hyun Yun, Lars Mattsson: “Fast and accurate metrology of multi-layered ceramic materials by an automated boundary detection algorithm developed for optical coherence tomography data”, Vol. 31, No. 2 / February 2014 / J. Opt. Soc. Am. A 217-226
  56. Rong Su, Mikhail Kirillin, Ernest W. Chang, Ekaterina Sergeeva, Seok H. Yun, and Lars Mattsson: “Perspectives of mid-infrared optical coherence tomography for inspection and micrometrology of industrial ceramics”, Optics Express Vol. 22, Iss. 13, pp. 15804–15819 (2014), DOI:10.1364/OE.22.015804
  57. Rong Su, Peter Ekberg, Michael Leitner and Lars Mattsson: “Accurate and automated image segmentation of 3D optical coherence tomography data suffering from low signal-to-noise levels”, Vol. 31, No. 12 / December 2014 / J. Opt. Soc. Am. A 2551-2560
  58. Ekberg, P., Daemi, B., Mattsson, L.: “3D precision measurements of meter sized surfaces using low cost illumination and camera techniques”, 2017, Meas. Sci. Technol. 28 045403 (16pp) doi:10.1088/1361-6501/aa5ae6
  59. Ekberg, P. and Mattsson, L.: “Traceable X,Y self-calibration at single nm level of an optical microscope used for coherence scanning interferometry”, 2017, Meas. Sci. Technol. https://doi.org/10.1088/1361-6501/aaa39d

C: Papers in conference proceedings, refereed by editors

  1. M. Breidne and L. Mattsson: "Fabrication and optimization of X-ray and VUV-gratings", in Application, Theory, and Fabrication of Periodic Structures, SPIE 503, 92 - 97 (1984)
  2. J. Walz, B. Andrén, L. Mattsson and K. Biedermann: "Veiling glare in camera systems", in proceedings of Image Science '85, Helsinki, June 11 -14, 1985, publ in Acta Polytech. Scand. Appl. Phys. Ser. no Ph 149, (1985) 286 - 289
  3. L. Mattsson: "An instrument for angle-resolved scattering measurements in the VUV-visible wavelength region", in Measurements of Effects and Surface Defects and Quality of Polish, Eds. H.E. Bennett and L.E. Baker, Proc. SPIE 525, 189 (1985).
  4. L. Mattsson: "Total Integrated Scatter Measurement System for Quality Assessment of Coatings on Optical Surfaces", in Thin Film Technologies, Ed. J. R. Jacobsson, Proc. SPIE 652, 264 (1986).
  5. L. Mattsson and S. Johansson: "Quality control and ageing tests on replicated, Al/MgF2 coated aspheric mirrors for the far UV" in Thin Film Technologies, Ed. J. R. Jacobsson, Proc. SPIE 652, 124 (1986).
  6. L. Mattsson: "Light scattering and characterization of thin films", in Thin Film Technologies, Ed. J. R. Jacobsson, Proc. SPIE 652, 215 (1986)
  7. L. Mattsson:"Surface roughness of Al-films studied by Total integrated Scattering", in Extended Abstracts of the Second Nordic Conference on Surface Science, Linköping, 1987, page P-70
  8. L. Mattsson: "Surface roughness of Al-coatings measured by sub-Å sensitive totally integrated scattering technique", Workshop on Optical Fabrication and Testing Technical Digest 1987, Vol 19, (Optical Society of America, Washington D.C. 1987) p. 85
  9. L. Mattsson: "Characterization of supersmooth surfaces by light scattering techniques.", Surface Measurement and Characterization, J. M. Bennett, ed., Proc. SPIE 1009 (1988) 165.
  10. R.D. Jacobson, S.R. Wilson, G.A. Al-Jumaily, J.R. McNeil, J. M. Bennett and L. Mattsson: "Comparison of optical scatterometer and profilometer techniques for characterizing smooth surfaces", Surface Measurement and Characterization, J. M. Bennett, ed., Proc. SPIE 1009 (1988) 77.
  11. L. Mattsson and P. Wågberg: "Comparison between laser stylus and contact stylus measurements on rough surfaces", in Surface Roughness and Scattering Technical Digest, 1992, (Optical society of America, Washington, D.C. 1992) Vol. 14, pp. 26-27
  12. T. E. Karlin, S. Nygren, L. Mattsson, E. André, M. Bjuggren and F. M. d'Heurle: "TiSi2 thin film morphology: Influence of silicon substrate crystallinity and doping", Proceedings of the 15:th Nordic Semiconductor Meeting, Tavastehus, June 8-11, 1992
  13. L. Mattsson and N. Gräns: "Onset of stress release in thin metal films revealed by total integrated scattering", presented at Laser 91, Munich, 1991 and published in Laser in Engineering, W. Waidelich, ed., (Springer-Verlag, Berlin, 1992) p. 649 - 651
  14. C. Kylner, J. Ingers, M. Bjuggren and L. Mattsson: "Scattering signatures of isolated surface features", SPIE Proceeding 1995, Optical Scattering, (1993), 66 - 73, presented at Optical Scatter: Applications, Measurement, and Theory II, SPIE 1993 International Symposium on Optical Applied Science and Engineering, 11 - 16 July, 1993 in San Diego.
  15. L. Mattsson: "Elastic light scattering in materials research", invited talk at the 16th Congress of the International Commision for Optics, 9 - 13 Aug, 1993, Budapest, printed in Optics as a Key to High Technology, G. Akos, T. Lippényi, G. Lupkovics, A. Podmaniczky, Eds., Proc. SPIE 1983 (1993) 964 - 968
  16. L. Mattsson: "Non-contact evaluation of machined surfaces by IR-light scattering", invited presentation at "Optical Measuring Techniques," Laser 95, June 19 - 21, 1995, Munich. Published in Proceedings of the 12th International Congress, Laser 95; Eds. W. Waidelich, H. Hugel, H. Opower, H. Tiziani, R. Wallenstein, W. Zinth, Laser in Research and Engineering, Springer-Verlag, Berlin Heidelberg, 1996, p 584 - 591.
  17. M. Bjuggren, L. Krummenacher and L. Mattsson: "Quality assessment of engineering surfaces by infrared scattering", in Optical Manufacturing and Testing, Eds. V. J. Doherty and H.P. Stahl, SPIE Proceeding 2536, (1995), 327 - 336, presented at the International Symposium on Optical Science, Engineering and Instrumentation, San Diego, July 9 - 14, 1995.
  18. L. Mattsson and R. Usbeck: "A technique for analysis of surface and bulk scattering of paper sheets", in Proceedings of the 1996 International Printing and Graphic Arts Conference, Minneapolis, (1996) 131 - 137.
  19. C. Kylner and L. Mattsson: "Simultaneous overall and local stress analysis of thin metal films by light scattering and beam deflection measurements", presented at Symposium on Thin Films-Stresses and Mechanical Properties, 1996 Materials Research Society Spring Meeting, San-Francisco, April 8 - 12, 1996, in Thin Films: Stresses and Mechanical Properties VI, Eds: W. W. Gerberich, H. Gao, J.-E. Sundgren, S. P. Baker, Mat. Res. Soc. Symp. Proc. Vol 436, (1997) 257 - 262.
  20. M. Bjuggren, L. Krummenacher and L. Mattsson: "High-speed assessment of surface roughness on engineering surfaces", Proc. 7th Int. Conf. on Metrology and Properties of Engineering Surfaces, pp. 515-516, (1997)
  21. S. Baumer, A. Duparre, T. Herrmann, U. Schumann, C. Smorenburg, V. Kirschner, L. Mattsson, T. Quinteros, R. Berglind, S. Schippel: “SLIOS-a contribution to standard procedures in stray light measurements”, Proceedings-of-the-SPIE The-International-Society-for-Optical-Engineering. vol.3739; pp. 414-21, (1999)
  22. R. Hainzl, R. Berglind, M. Bjuggren, M.-C. Béland, T. Quinteros, H. Granberg and L. Mattsson: “A New Light Scattering Model for Simulating the Interaction Between Light and Paper”, Proceeding of the 2000 TAPPI International Printing & Graphic Arts Conference, pp 9-17
  23. H. Granberg, J. Jensen and L. Mattsson: "Anisotropic scatter behavior of fiber-containing surfaces analyzed by 3D-BRDF measurements and simulations", in Surface Scattering and Diffraction for Advanced Metrology II, Z.H. Gu and A.A. Maradudin, eds., Proc. SPIE 4780 (2002) p 138-145
  24. J. Gustafsson, C. Lindfors, L. Mattsson, T. Kjellberg: “Large-format 3D interaction table”, in Stereoscopic Displays and Virtual Reality Systems XII, Andrew J. Woods, Mark T. Bolas, John O. Merritt, Ian E. McDowall, Editors, Proc. SPIE 5664, 589-595, 2005
  25. B. Nilsson, D. Tilert, A. Temun, T. E. Carlsson, L. Mattsson: “Fast, low-cost fiber-optic displacement sensor”, in 17th InternationalConference on Optical Fibre Sensors, edited by Marc Voet, Reinhardt Willsch, Wolfgang Ecke, Julian Jones, Brian Culshaw, Proceedings of SPIE Vol. 5855 (SPIE, Bellingham, WA, 2005) 783-786
  26. A. Temun and L. Mattsson:“Assessment of digital cameras for micro-structural sensing of low contrast surface features”, in Proceedings of the 1st International Conference in Multi Material Micro manufacture, Eds. W.Menz and S. Dimov, Elsevier Ltd, Oxford, pp. 253-257, 2005
  27. R. Teti, L.Mattsson, A.Lebar and M. Junkar: “Metrology applications of two-dimensional frequency analysis for micro-features characterization.”, in Proceedings of the 1st International Conference in Multi Material Micro Manufacture, Eds. W.Menz and S. Dimov, Elsevier Ltd, Oxford, pp. 259-262, 2005
  28. Olwal, A. Lindfors, C.; Gustafsson, J.; Kjellberg, T.; Mattsson, L.: “ASTOR: an autostereoscopic optical see-through augmented reality system”, Proceedings. International Symposium on Mixed and Augmented Reality, p 24-27, 2005
  29. Mattsson, L: “Metrology of micro-components – a real challenge for the future”, Published in the Proceedings of the 5th International Seminar on Intelligent Computation in Manufacturing Engineering (CIRP ISME ’06), 25 – 28 July 2006, Ischia, Italy. 547 -552
  30. Ferri, C., Brousseau, E., Dimov, S., Mattsson, L.: “Repeatability analysis of two methods for height measurements in the micrometer range”, accepted for publication in Proceedings of the 2:nd International Conference in Multi Material Micro Manufacture, Grenoble Sept 20 – 22, 2006, p 165 - 168
  31. A. Témun, L. Mattsson and Heikkilä I.: “Localizing micro-defects on rough metal surfaces.” accepted for publication in Proceedings of the 2:nd International Conference in Multi Material Micro Manufacture, Grenoble Sept 20 – 22, 2006, p. 169-172
  32. G. Tosello, B. Fillon, S. Azcarate, A. Schoth, L. Mattsson, C. Griffiths, L. Staemmler, P.J. Bolt: “HYBRID TOOLING TECHNOLOGIES AND STANDARDIZATION FOR THE MANUFACTURING OF INSERTS FOR MICRO INJECTION MOLDING”, presented at the Society of Plastics Engineers Annual Technical Conference, ANTEC 2007, Cincinnati, Ohio, May 6-10, 2007
  33. L. Mattsson: “The Challenge of Dimensional Metrology on High Aspect Ratio Micro Structures”, Book of Abstracts of 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology, Becanson, France, June 7-9, 2007, pp 63-64
  34. L. Mattsson: “Experiences and challenges in Multi Material Micro Metrology”, published in DVD-proceeding of 2nd International Conference on Micro Manufacturing, Clemson University, Sept 10-13, 2007
  35. S.S. Dimov, A.N. Bramley, W. Eberhardt, U. Engel, B. Fillon, P.Johander, E. Jung, P.B. Kirby, C.W. Matthews, L. Mattsson, M. Richter, H.-J. Ritzhaupt-Kleissl, A. Schoth, T. Velten and C. Wenzel: “4M Network of Excellence, Progress Report 2004-2006” in Proc of the 4M 2007 Conference, Borovets October 3-5, 2007, pp xvii-xxxi
  36. G. Tosello, B. Fillon, S. Azcarate, A. Schoth, L. Mattsson, C. Griffiths, L. Staemmler, P.J. Bolt: “Application of different process chains for polymer microfluidics fabrication including hybrid tooling technologies, standardization and replication: a benchmark investigation within 4M Polymer Division" in Proc of the 4M 2007 Conference, Borovets October 3-5, 2007, pp 77-80
  37. Richard Lindqvist, Lars Mattsson, Karl-Johan Karlsson, Peter Lindahl, Tomas Vångell: “Dimensional Inspection Planning (DIP) – A state of the art review of the related literature and a short presentation of a new generic DIP model and process”, to be presented at CMSC 2008, July 21 - 25, 2008, Charlotte, NC.
  38. S.S. Dimov, C. W. Matthews, E. Brousseau, S. Bigot, A. de Grave, H.N. Hansen, G. Bissacco, G. Tosselo, B. Fillon, P. Bolt, U. Engel, P.Johander, E. Jung, P.B. Kirby, L. Mattsson, M. Richter, H.-J. Ritzhaupt-Kleissl, A. Schoth, C. Wenzel and J. Matovic: “4M Network of Excellence, Progress Report 2006-2008” in Proc of the 4M 2008 Conference, Cardiff, September 9-11, 2008, pp xv-xxxi
  39. L. Mattsson, P.J. Bolt, S. Azcarate, E. Brousseau, B. Fillon, C. Fowler, E. Gelink, C. Griffiths, C.K. Malek, S. Marson, A. Retolaza, A. Schneider, A. Schoth, A. Temun, P.Tiquet, G. Tosselo: “How reliable are surface roughness measurements of micro-features – experiences of a Round Robin test within the 4M laboratories” in Proc of the 4M 2008 Conference, Cardiff, September 9-11, 2008, pp 139-142
  40. S.S. Dimov, C. W. Matthews, E. Brousseau, S. Bigot, A. de Grave, B. Fillon, M. Weinzierl, U. Engel, P.Johander, E. Jung, P.B. Kirby, L. Mattsson, M. Richter and A. Schoth: “4M Network of Excellence, Progress Report 2009” in Proc of the 4M/ICOMM 2009 Conference, eds. V. Saile, K.Ehmann and S. Dimov, Karlsruhe, September 23-25, 2009, pp 1-9  
  41. R. Su and L. Mattsson: ”Depth profiling in alumina ceramic by optical coherence tomography", in Proc of the 4M 2010 Conference, eds. B Fillon, C. Khan-Malek, S.Dimov, Bourg en Bresse November 17-19, 2010, pp 316-319
  42. R. Su, M. Kirillin, D. Jurków, K. Malecha, L. Golonka, L. Mattsson:“Optical coherence tomography – a potential tool for roughness assessment of free and embedded surfaces of laser-machined alumina ceramic.” in Proc of the 4M 2011 Conference, eds. H. Kück, H. Reinecke and S.Dimov, Stuttgart, November 8-10, 2011, pp 140-144
  43. B. Daemi and L. Mattsson: “Optical measurement of waviness on specular surfaces by Fringe Reflection Technique, FRT,” Proceedings of the 12th euspen International Conference – Stockholm – June 4-7, 2012, pp 117-120V1
  44. R. Su and L. Mattsson: “Evaluation of optical inspection methods for non-contact assessment of microstructures and defects in ceramic materials”, in Proc of the 4M 2012 Conference, eds. H. Noll, N. Adamovic and S.Dimov, Vienna, October 9-11, 2012, pp 109-112
  45. Y. Li, R. Su, m. Hedlind, P. Ekberg, T. Kjellberg, L. Mattsson: “Model based in-process monitoring with optical coherence tomography”, 1st CIRP Global Web Conference: Interdiciplinary Research in Production Engineering, Procedia CIRP, Volume 2, 2012, Pages 70-73
  46. M. Kirillin, R. Su, E. Sergeeva, L. Mattsson, R. Myllylä: “Monte Carlo simulation in optical coherence tomography for quality inspection of materials”, Proceedings of 1st International Symposium on Optical Coherence Tomography for Non-Destructive Testing, Febr. 13-14, 2013, Linz, Austria, pp 65-67
  47. R. Su, E. Chang, P. Ekberg, S.Yun, L. Mattsson: “Enhancement of probing depth and measurement accuracy of optical coherence tomography for metrology of multi-layered ceramics”, Proceedings of 1st International Symposium on Optical Coherence Tomography for Non-Destructive Testing, Febr. 13-14, 2013, Linz, Austria, pp 71-73
  48. B. Daemi, P. Ekberg, L. Mattsson: “Performance Evaluation of Micro Milling Installations” in Proc of the 4M 2013 Conference, eds. S. Azcárate and S.Dimov, San Sebastian, October 8-10, 2013, pp 213-216, Research Publishing, Singapore 2013
  49. B. Daemi, L. Mattsson: “Performance Evaluation of Laser Micro-Machining Installations” in Proc of the 4M 2013 Conference, eds. S. Azcárate and S.Dimov, San Sebastian, October 8-10, 2013, pp 114-117, Research Publishing, Singapore 2013
  50. P.L. Tam, J. Holmberg, P. Lundin, L. Mattsson, S.B. Hosseinia, L. Nyborg: “A Study of the Surface Integrity after Machining by means of some Non-Destructive Testing Techniques” in proceedings of the NewTech 2013 conference, Oct 27-30, 2013, Stockholm, pp 283-292.
  51. Rong Su, Mikhail Kirillin, Peter Ekberg, Lars Mattsson: “Three-dimensional metrology of embedded microfeatures in ceramics by infrared optical coherence tomography – advantages and limitations”, Invited Plenary paper, Proceedings of the Laser Metrology and Machine Performance (LAMBDAMAP) XI, Huddersfield, March 2015, pp74-83
  52. Peter Ekberg & Lars Mattson: “A new 2D-self-calibration method with large freedom and high-precision performance for imaging metrology devices”, in Proceeding of the 15th euspen conference, Leuven, June 2015, pp 159-160
  53. Richard P. Lindqvist, Karl-Johan Karlsson, Lars Mattsson: “A Theoretical and Practical Approach to Geometrical Part Assurance”, Procedia CIRP, Volume 43, 2016, Pages 351-355

D: Invited conference presentations

  1. L. Mattsson: "Sub-Ångström sensitive techniques for determining surface roughness of high quality optical surfaces and thin films", invited paper to CLEO '89, Baltimore, 1989.
  2. L. Mattsson: "Elastic light scattering in materials research", invited talk at the 16th Congress of the International Commision for Optics, 9 - 13 Aug, 1993, Budapest, printed in Optics as a Key to High Technology, G. Akos, T. Lippényi, G. Lupkovics, A. Podmaniczky, Eds., Proc. SPIE 1983 (1993) 964 - 968
  3. L. Mattsson: "Scattering measurements at 10.6 um wavelength for engineering surface inspection", invited talk at EU Measurement and Testing Workshop on Surface Characterization and Microhardness Measurement, 17 - 18 March, 1994, Eindhoven
  4. L. Mattsson: "Elastic lightscattering - a tool for analysis of surface roughness from ball bearings to atoms", invited presentation at Swedish Optical Society conference "Optik i Sverige 1994", June 13 -14 1994
  5. L. Mattsson: "Papperets optiska funktion - en ytlig fråga?", invited presentation at Ekmandagarna 1995, January 24 - 25, 1995, Stockholm. IOF- Technical Report TR-295, 1995.
  6. L. Mattsson: "Surface topography of Si-wafers by profiling techniques", invited presentation at SEMICON Europe, April 4 - 6, 1995, Geneve.
  7. L. Mattsson: "Co2 Laser Scattering for Surface Characterisation of Engineering Surfaces”, invited presentation at "Optical Measuring Techniques," Laser 95, June 19 - 21, 1995, Munich. Published in Proceedings of the 12th International Congress, Laser 95; Eds. W. Waidelich, H. Hugel, H. Opower, H. Tiziani, R. Wallenstein, W. Zinth, Laser in Research and Engineering, Springer-Verlag, Berlin Heidelberg, 1996, p 584 - 591. DOI https://doi.org/10.1007/978-3-642-80263-8_121
  8. L. Mattson: “Roughness measurement in the micron range by IR-scattering at 10.6 µm", invited presentation at "Symposium on New Ways of Measuring Surface Roughness from the Nano to the Micro Range" Optical Society of America Annual Meeting, Oct. 12 -17, 1997, Long Beach
  9. L. Mattsson: “Light scattering from surface roughness and its influence on the visual appearance of solid materials”, invited talk at Symposium on Optical Appearance of Metallic Surfaces: Theory, Measurements and Applications”, Brussels, December 1999
  10. L. Mattsson: “Att mäta optiskt på papper – en lysande idé”, invited talk at symposium on Optisk mätteknik inom pappers- och massaindustrin, Stockholm, May 2000
  11. Lars Mattsson: "Ytkarakterisering", invited talk at Nordisk Trådteknisk Förenings Årsmöteskonferens, aug 2001, NTTF 2001, p.89-99
  12. L. Mattsson: “Understanding the visual appearance of Aluminium surfaces", invited talk at 5th Aluminium Chair - Aluminium for its Functional Surface Properties, Creating & Using Aluminium for Optical Properties, Brussels, March 2002
  13. L. Mattsson: "Mätteknikingenjören - en specialist eller generalist?", Presentation at the conference on "International Masters of Metrology", Högskolan Borås, February 26, 2003.
  14. L. Mattsson: “Karakterisering av ytstruktur med ljusspridningsteknik” invited talk at Swedoptronic symposium on Optisk beröringsfri mätteknik för verkstadsindustrin”, Stockholm, April 9, 2003
  15. L. Mattsson: “Ytstrukturens påverkan på utseendet - olika faktorer." invited talk at Swedoptronic symposium on "Optisk beröringsfri mätteknik för industrin”, -Ytstruktur och färgmätning, Stockholm, May 11, 2004
  16. L. Mattsson: “Measurement of ultra-smooth surfaces”, invited presentation at the 54th General Assembly of CIRP, Kraków, Poland, August 22–28, 2004
  17. L. Mattsson: “Light scattering – a tool for assessment of micromanufactured surfaces”, invited talk, published in Proceedings of 8th International Conference on Management of Innovative Technologies MIT’2005, eds. M. Junkar and P.R. Levy, Fiesa, Sept 22-24 2005, p.309-315
  18. L. Mattsson: “Surface roughness characterization at micro- and nano-levels” invited talk at 7th Workshop on Nanoscience and Nanotechnology, Sofia Nov 24 -26, 2005
  19. Mattsson, L.: “Light scattering – a quantitative of sub-micron and nm-structure of metal surfaces” invited talk, published in 4&2M Proceedings of Workshop on Multi-material micro manufacturing focusing on metal processing and metrology,” March 23-24, Budapest 2006, T. Szalay, Ed., BUTE Department of manufacturing Engineering (2006) 20-26
  20. Mattsson, L.: “A Technologists Perspective”, Invited talk, Workshop on Business and Technology Challenges in Micro-Manufacturing at Cardiff University Innovative Manufacturing Research Centre, Apr. 11, 2006
  21. Mattsson, L.: “Metrology of micro-components – a real challenge for the future”, CIRP ICME '06, 5th CIRP International Seminar on Intelligent Computation in Manufacturing Engineering, 25 - 28 July 2006, Ischia, Italy,  
  22. Mattsson, L.: “Industriell mätteknik - ett framtidsområde”, invited lecture on "Industriella mätningar för produktion och utveckling," Stockholm 28-29 aug, 2006)
  23. Mattsson, L., invited presentation given at Meeting on “Measurement techniques and applications for MNT", Cranfield (dec 2006)
  24. Mattsson, L.: “Industriell mätteknik – ett framtidsområde", Mät- & Kvalitetsdag i Parken Zoo, Eskilstuna 2006-12-07
  25. Mattsson, L.: ”Trender inom industriell mätteknik”, vid Conductive konferens Industriell Mätteknik och kvalitetssäkring, 27-28 aug 2008, Stockholm
  26. Mattsson, L.: ”Metoder för optisk mätning", Konferens: Optisk 3D-mätning i Produktionslinjen, 13 nov 2008, Stockholm
  27. Mattsson, L., Lindqvist, R: ”SIMET”, Konferens: Optisk 3D-mätning i Produktionslinjen, 13 nov 2008, Stockholm
  28. Mattsson, L: “LOCOMACHS: Predictive gaps simulation for robotics additive manufacturing shimming using low cost precision metrology,” LOCOMACHS Public Forum, Coventry (UK),16th June 2016

E: Conference contributions (not refereed)

  1. L. Mattsson: "Angular distributions of photoelectrons from UV-excited small molecules", oral presentation at Nat. Meeting in Atomic and Molecular Physics, Stockholm, June 6, 1983
  2. L. Mattsson: "Sub-Ångström sensitive techniques for determining surface roughness of high quality optical surfaces and thin films", CLEO '89, Baltimore, 1989
  3. L. Mattsson: "Optical and mechanical surface characterisation at atomic height levels", oral presentation at the 15th Congress of the International Commision for Optics, Aug 5 - 10, 1990, Garmisch Partenkirchen
  4. T. E. Karlin, S. Nygren, L. Mattsson, E. André, M. Bjuggren and F. M. d'Heurle: "TiSi2 thin film morphology: Influence of silicon substrate crystallinity and doping", Proceedings of the 15:th Nordic Semiconductor Meeting, Tavastehus, June 8-11, 1992
  5. L. Mattsson: "Scattering measurements at 10.6 um wavelength for engineering surface inspection", EU Measurement and Testing Workshop on Surface Characterization and Microhardness Measurement, 17 - 18 March, 1994, Eindhoven
  6. L. Mattsson: "Elastic lightscattering - a tool for analysis of surface roughness from ball bearings to atoms", Swedish Optical Society conference "Optik i Sverige 1994", June 13 -14 1994.
  7. C. Kylner and L. Mattsson: "Can light "see" the difference between submicronsized ridges and groves?" poster presentation at Swedish Optical Society conference "Optik i Sverige 1994", June 13 -14 1994
  8. M. Bjuggren, L. Mattsson: "Intercomparison of surface roughness measurements", poster presentation at Swedish Optical Society conference "Optik i Sverige 1994", June 13 -14 1994.
  9. L. Mattsson: "Surface topography of Si-wafers by profiling techniques", invited presentation at SEMICON Europe, April 4 - 6, 1995, Geneve.
  10. C. Kylner and L. Mattsson: "An optical instrument for simultaneous recording of micro-stress relaxation and overall stress in thin films", presentation at EMRS -1995 Spring Meeting in symposium on "Structure and properties of thin films and multi layers," May 22 - 26, Strassbourg
  11. L. Mattsson: "Roughness Characterization of Engineering Surfaces by CO2 Laser Scattering Techniques." presentation at "Technical Applications of Lasers," Laser Optics 95, June 27 - July 1, 1995, St. Petersburg.
  12. M.-C. Béland and L. Mattsson: "The influence of illumination and observation angle on the contrast of printed paper", poster presentation at Swedish Optical Society conference "Optik i Sverige 1995", October 18 -19 1995
  13. C. Kylner and L. Mattsson: "Simultaneous micro- and macro-stress analysis of thin metal films by scatter and beam deflection measurements", poster presentation at Swedish Optical Society conference "Optik i Sverige 1995", October 18 -19 1995
  14. M. Bjuggren, L. Krummenacher and L. Mattsson: "New facilities for characterization of surface features of both supersmooth and rough surfaces" poster presentation at Swedish Optical Society conference "Optik i Sverige 1995", October 18 -19 1995
  15. M. Bjuggren, L. Krummenacher, L. Mattsson and L. Sparf: "Evaluation of afocal infrared system by scatter measurements and modelling", poster presentation at Swedish Optical Society conference "Optik i Sverige 1995", October 18 -19 1995
  16. M. Bjuggren, L. Krummenacher and L. Mattsson: "High-speed roughness characterization of engineering surfaces by non-contact IR scatter techniques", poster presentation at Swedish Optical Society conference "Optik i Sverige 1995", October 18 -19 1995.
  17. L. Mattsson: "Vart tog ljuset vägen? En analys av papperets yt- och bulkspridningsförmåga", presented at Ekmandagarna 1996, Stockholm, January 23 - 24, 1996
  18. M.-C. Béland and L. Mattsson: "Scattering contrast - is it reflected in what you see?" presented at Ekmandagarna 1996, Stockholm, January 23 - 24, 1996
  19. M.-C. Béland and L. Mattsson: "Positive Scattering Contrast Range - A useful measure for print quality", poster presentation at Swedish Optical Society conference "Optik i Sverige 1997, Göteborg 2-3 juni 1997
  20. C. Kylner and L. Mattsson: "Study of initial deformation in thin films by light scattering methods", poster presentation at Swedish Optical Society conference "Optik i Sverige 1997, Göteborg 2-3 juni 1997
  21. M. Bjuggren, T. Quinteros, M.-C. Béland, L. Krummenacher and L. Mattsson: "Light and Paper, an approach to light scattering in real paper", poster presentation at Swedish Optical Society conference "Optik i Sverige 1997, Göteborg 2-3 juni 1997
  22. L. Mattson: “Roughness measurement in the micron range by IR-scattering at 10.6 µm", invited presentation at "Symposium on New Ways of Measuring Surface Roughness from the Nano to the Micro Range" Optical Society of America Annual Meeting, Oct. 12 -17, 1997, Long Beach
  23. H. Granberg and L. Mattsson: "Angle-resolved out-of-plane reflection from paper, fines and pigment coatings", Conference summary of Northern Optics 2000, p. 106, ISBN 91-7170-589-9, Swedish Optical Society, 2000
  24. C. Kylner and L. Mattsson: "Smoothening and reflectance enhancement of Al-film mirror coatings by co-evaporation of aluminium and copper", Conference summary of Northern Optics 2000, p. 142, ISBN 91-7170-589-9, Swedish Optical Society, 2000
  25. L. Mattsson and R. Berglind: "Scatter effects of diffractive optics; - influence on IR-image quality", Conference summary of Northern Optics 2000, p. 160, ISBN 91-7170-589-9, Swedish Optical Society, 2000
  26. L. Mattsson: “Svarta tavlan” till studentens bänk", Presentation of a camera computer aid for visually impaired, KTH, aug 2001.
  27. L. Mattsson: “Metrology of 3D microstructures - a demanding task with surprising results”, printed in the handouts of 4 Erlangen Workshop on Microforming, Nov 27-28, 2007.

F: Technical reports

  1. L. Mattsson: "Reflection polarizers for line sources in the VUV", UUIP-983 report, Institute of Physics, University of Uppsala, Aug. 1978, 80 p.
  2. L. Mattsson: "A focusing VUV-polarizer for valence electron spectroscopy. Design considerations", UUIP-984 report, Institute of Physics, University of Uppsala, Oct. 1978, 30 p.
  3. L. Mattsson, B. Wannberg, H. Veenhuizen, I. Reineck and K. Siegbahn: "A focusing VUV-polarizer for valence electron spectroscopy. Performance and test results", UUIP-1009 report, Institute of Physics, University of Uppsala, Dec. 1979, 22 p.
  4. L. Mattsson and K. Siegbahn: "Focusing VUV-optics for enhanced irradiation of molecular beams and improved resolution of UV-photoelectron spectra" UUIP-1068 report, Institute of Physics, University of Uppsala, Aug. 1982, 37 p.
  5. B. Wannberg, H. Veenhuizen, L. Mattsson, K.-E. Norell and K. Siegbahn:"An instrument for VUV and electron beam excited electron spectroscopy" UUIP-1108 report, Institute of Physics, University of Uppsala, April 1984
  6. K.-E. Norell, B. Wannberg, H. Veenhuizen, C. Nohre, L. Karlsson, L. Mattsson and K. Siegbahn: "Angle-resolved photoelectron spectrum of CS2 excited with polarized radiation in the energy region of 10.2 eV - 40.8 eV", UUIP-1109 report, Institute of Physics, University of Uppsala, April 1984
  7. L. Mattsson: "Toriska speglar och gitter för extrem-UV. Framställningsteknik och resursuppbyggnad för kvalitetskontroll", Final report for STU project , UUIP report, Institute of Physics, University of Uppsala, Sept. 1985
  8. C. Legrande, L. Mattsson and M. Breidne: "TIS investigations of surface roughness on bare and aluminium coated Si-wafers", Institute of Optical Research Technical Report TR 168, 1986
  9. Y.-H. Le Page and L. Mattsson: "Real-time TIS measurements of annealed Al-films", Institute of Optical Research Technical Report 216, 1989
  10. L. Mattsson, J. Ingers and J. M. Bennett: "Wavelength dependence of angle-resolved scattering in the EUV-visible. I. Experimental Results", IOF Technical Report, 1991
  11. J. Ingers, L. Mattsson and J. M. Bennett: "Wavelength dependence of angle-resolved scattering in the EUV-visible. II. Comparison between theory and experiment.", IOF Technical Report, 1991
  12. M. Bjuggren, L. Krummenacher, B. Sahlgren, J.-P. Betend-Bon and L. Mattsson: "Surface defect analysis in the Fourier plane", IOF Technical Report, 1993
  13. W.H. Simmonds, R.J. Smith, R.E. Renton, G. Gregoriou, J. Tripp, C.H.F. Velzel, L. Mattsson, M. Bjuggren, H.J. Tiziani, H.J. Jordan: "Optical Non-Contact Techniques for Engineering Surface Metrology", Final report of the project "Non-Contact Surface Metrology", funded by the European Community under the BCR Programme. Report EUR 16161EN, European Commission, Directorate - General XIII, Telecommunications, Information Market and Exploitation of Research, L-2920 Luxembourg
  14. M. Bjuggren, L. Krummenacher and L. Mattsson: "Metodutveckling för kvalitetskontroll av IR-optik vid 10.6 um", IOF -Technical Report TR 297, 1995.
  15. M. Bjuggren, L. Krummenacher and L. Mattsson: "Measurement of infrared scattering near the specular beam", IOF -Technical Report TR 298, 1995.
  16. M. Bjuggren, L. Krummenacher and L. Mattsson: "Stray light in an ifrared system" IOF -Technical Report TR 300, 1996.
  17. M. Bjuggren, L. Krummenacher and L. Mattsson: "Non-contact roughness measurement of engineering surfaces by total integrated scattering" submitted to Precision Engineering, March 1996, IOF - Technical Report TR 303, 1996
  18. M. Bjuggren, T. Quinteros, M.-C. Béland, L. Krummenacher and L. Mattsson: "Light and Paper Progress report 1995-96", IOF - Technical Report TR 316, March 1997
  19. M. Bjuggren, T. Quinteros, M.-C. Béland, L. Krummenacher and L. Mattsson: "Light and Paper, Collected reports 1995-96", IOF - Technical Report TR 317, March 1997
  20. C. Kylner and L. Mattsson: "Simultaneous overall and local stress analysis of thin metal films by light scattering and beam deflection measurements", in Thin Films: Stresses and Mechanical Properties VI, Eds: W. W. Gerberich, H. Gao, J.-E. Sundgren, S. P. Baker, Mat. Res. Soc. Symp. Proc. Vol 436, (1997) 257 - 262.
  21. M. Bjuggren, L. Krummenacher and L. Mattsson: "High-speed assessment of surface roughness on engineering surfaces", Proc. 7th Int. Conf. on Metrology and Properties of Engineering Surfaces, pp. 515-516, (1997)
  22. T. Quinteros and L. Mattsson: “Stray Light Analysis - Review of available software”, SLIOS project report - DWP 1310-1, IOF Technical Report TR-342 Oct. (1998)
  23. L. Mattsson and J. M. Bennett: “Coupling experimental BSDF data to database”, SLIOS project report - DWP 1320, IOF Technical Report TR-344 Nov. (1998)
  24. L. Mattsson: “Summary: Stray light modelling”, SLIOS project report - DWP 1300, IOF Technical Report TR-345 Nov. (1998).
  25. T. Quinteros, J.M. Bennett, L. Krummenacher and L. Mattsson: “Manufacturing Technologies and Modern Materials in use for production of optical components”, SLIOS project report - DWP 1110, IOF Technical Report TR-346 Dec. (1998)
  26. H. Granberg, J. Jensen, M. Rundlöf and L. Mattsson, "Anisotropic 3D-reflectance distribution from sheet of mechanical pulp fibre fragments, TiO2 coating and LWC paper", report A in H. Granberg, Licentiate thesis, TRITA -IIP-01-20, ISSN 1650-1888, KTH, Stockholm, 2001
  27. H. Granberg, M. Rundlöf, and L. Mattsson: "Interpretation of d/0o diffuse reflectance factor measurements of paper coatings on mylar film and base paper", report C in H. Granberg, Licentiate thesis, TRITA -IIP-01-20, ISSN 1650-1888, KTH, Stockholm, 2001
  28. R. Teti, L. Mattsson, I. Goenaga, D5.1 “Report on The future metrology needs in 4M from an industrial and scientific perspective.” within FP6-500274-2, 4M - Multi Material Micro Manufacture project, October 2005, Cardiff University, UK
  29. B. Jurisevic, L. Mattsson, D5.2 “Report on advances in surface roughness metrology at nano-levels” within FP6-500274-2, 4M - Multi Material Micro Manufacture project, April 2006, Cardiff University, UK 
  30. R. Teti, L. Mattsson, M5.1 “Technology Gaps Report and a Strategy to Address Them” within FP6-500274-2, 4M - Multi Material Micro Manufacture project, May 2006, Cardiff University, UK  
  31. L. Mattsson, J. Gustafsson, C. Lindfors, T. Kjellberg: “Tredimensionellt interaktionsbord”, Slutrapport över projekt P22143-1A inom Vinnovas forsknings-, utvecklings- och demonstrationsprogram: Tillverkningsindustrins Produktframtagning KTH-TRITA-IIP-05-06, augusti 2005
  32. L. Mattsson, D5.3 ”Report on European Metrology Centre” within FP6-500274-2, 4M - Multi Material Micro Manufacture project, June 2007, Cardiff University, UK
  33. L. Mattsson, D5.3.1 ”Update Report on European Metrology Centre” within FP6-500274-2, 4M - Multi Material Micro Manufacture project, October 2007, Cardiff University, UK
  34. L, Mattsson, D5.4“Report on high aspect ratio performance of existing measurement facilities” within FP6-500274-2, 4M - Multi Material Micro Manufacture project, October 2007, Cardiff University, UK
  35. L. Mattsson, D5.4.11 “Cross Divisional Project - Next Generation Micro/Nano metrology equipment” within FP6-500274-2, 4M - Multi Material Micro Manufacture project, October 2007, Cardiff University, UK
  36. R. Su and L. Mattsson, FP7 Project: NMP2-LA-2008- 214122, MULTILAYER, Deliverable 7.3.1: “Design for artifact inspection”, April 2010, 13 pages, (confidential report)
  37. R. Su and L. Mattsson, FP7 Project: NMP2-LA-2008- 214122, MULTILAYER, Deliverable 7.2.1: “Parameters for process steering”, October 2010, 14 pages, (confidential report)
  38. R. Su and L. Mattsson, FP7 Project: NMP2-LA-2008- 214122, MULTILAYER, Deliverable 7.1.1: “Pre-study of materials”, October 2010, 22 pages (confidential report)
  39. L. Mattsson and A. Témun, FP7 Infrastructures-2008-1 project FP7-226460 EUMINAfab, Deliverable JRA3.4 “Report on the conducted benchmarking/comparative studies”, 2011 (26 pages)
  40. B. Daemi, P. Ekberg, L. Mattsson, FP7 Infrastructures-2008-1 project FP7-226460 EUMINAfab, Deliverable JRA3.6 “Report on the conducted benchmarking/comparative studies II”, 2012 (40 pages)
  41. P. Ekberg, L. Mattsson, B. Daemi, Project FP7 LOCOMACHS-FP7-314003, Deliverable D31.6 “Metrology to determine fit of parts & measure assemblies”, 2015 (36 pages, confidential)
  42. F. Spiess, L. Rossi, L. Mattsson, Project FP7 LOCOMACHS-FP7-314003, Deliverable D32.8 “Study and test reports of new automated inspection solutions”, 2015 (52 pages, confidential)
  43. L. Mattsson, P. Ekberg, B. Daemi, Project FP7 LOCOMACHS-FP7-314003, Deliverable D35.4 “Trials of solution for integrated metrology in production line evaluated and reported”, 2016 (22 pages, confidential)
  44. L. Mattsson, P. Ekberg, B. Daemi, Project FP7 NMP.2012.1.4-3 NEMI FP7-309672, Deliverable D6.1 “NEMI images, standard objects, using NEMI A”, 2016 (19 pages)
  45. P. Ekberg and L. Mattsson, Project FP7 NMP.2012.1.4-3 NEMI FP7-309672, Deliverable D6.4 “3D Self-calibration: Design Concept for development of 3D Self-Calibration”, 2016 (8 pages)
  46. P. Ekberg, B. Daemi, L. Mattsson, Project FP7 NMP.2012.1.4-3 NEMI FP7-309672, Deliverable D6.5 “3D self-calibration with simulated data”, 2016 (13 pages)
  47. L. Mattsson, P. Ekberg, B. Daemi, Project FP7 NMP.2012.1.4-3 NEMI FP7-309672, Deliverable D6.7 “Report on NEMI and the ISO standardization groups” 2016 (13 pages)
  48. B. Daemi and L. Mattsson:“Analysis of camera image repeatability using manual and automatic lenses”, KTH Technical report, TRITA-IIP-17-03, 2017, 7 p.
  49. B. Daemi and L. Mattsson: ”Performance evaluation of a micro screen printing installation”, KTH Technical report, TRITA-IIP-17-04, 2017, 9 p.

G: Popular science articles

  1. L. Mattsson: "Jonstrålen - ett alternativ vid bearbetning och deponering av tunna filmer", Vakuumnytt nr 33, (1983) 3 - 16
  2. L. Mattsson: "Vad ögat inte ser..." Upptecknaren nr 1 (1984) 3 - 5, Uppsala Universitet Tekniska Högskolan
  3. L. Mattsson: "Optisk ytkaraktärisering för verkstadsindustrin", Verkstäderna nr 12, (1992) 20 – 22

H: Thesis and associate professor presentation

  1. L. Mattsson: "High resolution valence electron spectroscopy. Development of a VUV-polarizer for angular distributions", Acta Universitatis Upsaliensis, Abstracts of Uppsala Dissertations from the Faculty of Science, 562, 1980
  2. L. Mattsson: "VUV-optics for photoelectron spectroscopy", review from the Associate Prof. Presentation April, 1984 
 
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