RF/Microwave MEMS

RF (radio-frequency) MEMS are microdevices which are interacting with electrical signals by switching, modulating, filtering or tuning electrical circuits. The most common components are microswitches, tunable capacitors, micromachined inductors and RF MEMS based filters. These components offer superior signal performance as compared to semiconductor devices, especially in terms of very high isolation, very low insertion loss, high Q-factors, high linearity, extremely low power consumption, and extremely large bandwidth. Because of these superior properties, RF MEMS are near-ideal devices for reconfigurable RF and microwave systems, and find applications in reconfigurable telecommunication networks, antenna tuning/matching networks, high-performance remote sensing/radar safety/security systems, but also in many other applications, for instance microwave/THz imaging in medical diagnosis.

Team leader of this research topic:

Joachim Oberhammer

Joachim Oberhammer

The RF MEMS team at the Microsystem Technology Laboratory at the School of Electrical Engineering at KTH currently consists of 7 members (2012). Focus is on developing innovative micromachined MEMS-tuneable components for RF and microwave applications. The trend is towards higher frequencies (E-bands, W-band, and the THz gap: 100 GHz to 3 THz), reconfigurable circuits, millimeter-wave and submillimeter-wave microsystems, and new applications such as medical diagnosis and material analysis.

Major awards during 2009-2013 were: Best Paper Award at IEEE European Microwave Integrated Circuit Conference 2009, Best Paper Award at IEEE Asia-Pacific Microwave Conference 2010, Honorable mention at IEEE Antenna and Propagation Symposium 2012, Best Papaer Award at European Antenna and Propagation Symposium 2013 (published by IEEE), Best Paper Award at Micromechanics Europe 2014, Best Paper Award at IEEE Micro Electro Mechanical Systems 2014. Furthermore, the members of KTH's RF MEMS team received: Graduate Fellowships Award by the IEEE Microwave Theory and Techniques Society in 2010, 2011, and 2014, Graduate Fellowship Award by the IEEE Antenna and Propagation Society in 2012, European Research Council (ERC) Consolidator Award in 2013.

Current team members:

- Joachm Oberhammer (Assoc-Prof)

- Umer Shah (post-doc since 2014)

- Fritzi Töpfer (PhD student since 2011)

- Bernhard Beuerle (PhD student since 2014)

- Henrik Frid (PhD student since 2014)

Former team members:

- Dong Wang (post-doc 2009-2010)

- Nutapong Somjit (PhD student, graduated in 2012)

- Mikael Sterner (PhD student, graduated in 2012)

- Sergey Dudorov (post-doc, 2010-2012)

- Zargham Bagchehsaraei (PhD student, graduated in 2014)

- Umer Shah (PhD student, graduated in 2014)

Major projects in RF/microwave MEMS are listed below.

Overview and projects in RF/Microwave/THz MEMS

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