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Publications by Pierre Edinger

Peer reviewed

Articles

[2]
N. Quack et al., "Integrated silicon photonic MEMS," MICROSYSTEMS & NANOENGINEERING, vol. 9, no. 1, 2023.
[3]
P.-H. Huang et al., "Three-dimensional printing of silica glass with sub-micrometer resolution," Nature Communications, vol. 14, no. 1, 2023.
[5]
L. Van Iseghem et al., "Low power optical phase shifter using liquid crystal actuation on a silicon photonics platform," Optical Materials Express, vol. 12, no. 6, pp. 2181-2198, 2022.
[6]
H. Sattari et al., "Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process," JOURNAL OF OPTICAL MICROSYSTEMS, vol. 2, no. 04, 2022.
[7]
G. Jo et al., "Wafer-level hermetically sealed silicon photonic MEMS," Photonics Research, vol. 10, no. 2, pp. A14-A21, 2022.
[8]
A. Y. Takabayashi et al., "Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch," Journal of microelectromechanical systems, vol. 30, no. 2, pp. 322-329, 2021.
[9]
P. Edinger et al., "Silicon photonic microelectromechanical phase shifters for scalable programmable photonics," Optics Letters, vol. 46, no. 22, pp. 5671-5674, 2021.
[10]
C. Errando-Herranz et al., "MEMS for Photonic Integrated Circuits," IEEE Journal of Selected Topics in Quantum Electronics, vol. 26, no. 2, pp. 1-16, 2020.
[11]
N. Quack et al., "MEMS-Enabled Silicon Photonic Integrated Devices and Circuits," IEEE Journal of Quantum Electronics, vol. 56, no. 1, 2020.
[12]
X. Wang et al., "Wafer-Level Vacuum Sealing by Transfer Bonding of Silicon Caps for Small Footprint and Ultra-Thin MEMS Packages," Journal of microelectromechanical systems, vol. 28, no. 3, pp. 460-471, 2019.

Conference papers

[13]
P. Edinger et al., "A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits," in Integrated Photonics Research, Silicon and Nanophotonics in Proceedings Advanced Photonics Congress 2023 - Part of Advanced Photonics Congress 2023, 2023.
[14]
P. Edinger et al., "An Integrated Platform for Cavity Optomechanics with Vacuum-Sealed Silicon Photonic MEMS," in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 2023, pp. 425-428.
[15]
Y. Li et al., "Design and Fabrication of A 4-Terminal In-Plane Nanoelectromechanical Relay," in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 2023, pp. 824-826.
[16]
Y. Li et al., "Design and fabrication of a 4-terminal in-plane nanoelectromechanical relay," in Transducers2023 - The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Kyoto, June 25-29, 2023, 2023.
[17]
U. Khan et al., "Low power actuators for programmable photonic processors," in AI and Optical Data Sciences IV, 2023.
[18]
W. Bogaerts et al., "Scaling programmable silicon photonics circuits," in Silicon Photonics XVIII, 2023.
[20]
P. Edinger et al., "Add-drop silicon ring resonator with low-power MEMS tuning of phase and coupling," in 2022 Conference on Lasers and Electro-Optics, CLEO 2022 : Proceedings, 2022.
[21]
P. Edinger et al., "Add-drop silicon ring resonator with low-power MEMS tuning of phase and coupling," in Optics InfoBase Conference Papers, 2022.
[22]
A. Y. Takabayashi et al., "Compact Integrated Silicon Photonic Mems Power Coupler For Programmable Photonics," in 2022 IEEE 35Th International Conference On Micro Electro Mechanical Systems Conference (MEMS), 2022, pp. 216-219.
[23]
U. Khan et al., "Large scale programmable photonic circuits using silicon photonic MEMS," in 2022 Conference on Lasers and Electro-Optics, CLEO 2022 : Proceedings, 2022.
[24]
U. Khan et al., "Large scale programmable photonic circuits using silicon photonic MEMS," in Optics InfoBase Conference Papers, 2022.
[25]
U. Khan et al., "MORPHIC : MEMS enhanced silicon photonics for programmable photonics," in Integrated Photonics Platforms Ii, 2022.
[26]
W. Bogaerts et al., "Programmable Photonic Circuits powered by Silicon Photonic MEMS Technology," in Photonic Networks and Devices, Networks 2022, 2022.
[27]
W. Bogaerts et al., "Programmable silicon photonic circuits powered by MEMS," in Proceedings of SPIE - The International Society for Optical Engineering, 2022.
[28]
A. Y. Takabayashi et al., "Continuously Tunable Silicon Photonic Mems 2 X 2 Power Coupler," in 2021 21St International Conference On Solid-State Sensors, Actuators and Microsystems (Transducers), 2021, pp. 447-450.
[29]
W. Bogaerts et al., "Low-Power Electro-Optic Actuators for Large-Scale Programmable Photonic Circuits," in 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings, 2021.
[30]
W. Bogaerts et al., "Low-power electro-optic actuators for large-scale programmable photonic circuits," in Optics InfoBase Conference Papers, 2021.
[31]
H. Sattari et al., "Low-voltage silicon photonic mems switch with vertical actuation," in 2021 34th ieee international conference on micro electro mechanical systems (mems 2021), 2021, pp. 298-301.
[32]
W. Bogaerts et al., "Programmable photonic circuits using silicon photonic MEMS," in Optics InfoBase Conference Papers, 2021.
[33]
N. Quack et al., "Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics," in 2021 IEEE Photonics Conference, IPC 2021 - Proceedings, 2021.
[34]
H. Sattari et al., "Silicon Photonic MEMS Add-Drop Filter," in 2020 european conference on optical communications (ecoc), 2021.
[35]
P. Edinger et al., "Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platform," in 2021 Conference On Lasers And Electro-Optics (CLEO), 2021.
[36]
P. Edinger et al., "Silicon photonic MEMS phase shifter with µs time constant built on a foundry platform," in Optics InfoBase Conference Papers, 2021.
[37]
P. Edinger et al., "Silicon photonic MEMS phase shifter with µs time constant built on a foundry platform," in 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings, 2021.
[38]
K. Rajendran et al., "Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform," in 2021 IEEE 17Th International Conference On Group Iv Photonics (GFP 2021), 2021.
[39]
P. Edinger et al., "Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics," in Optics InfoBase Conference Papers, 2020.
[40]
P. Edinger et al., "Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics," in 2020 conference on lasers and electro-optics (cleo), 2020.
[41]
N. Quack et al., "Exploiting Mechanics at the Micro- and Nanoscale for Efficient Reconfiguration of Photonic Integrated Circuits," in IEEE Photonics Society Summer Topical Meeting Series 2019, SUM 2019, 2019, pp. 1-1.
[42]
P. Edinger, C. Errando-Herranz and K. Gylfason, "Low-loss MEMS phase shifter for large scale reconfigurable silicon photonics," in 2019 IEEE 32nd international conference on micro electro mechanical systems (MEMS), 2019, pp. 919-921.
[43]
P. Edinger, C. Errando-Herranz and K. Gylfason, "Reducing Actuation Nonlinearity of MEMS Phase Shifters for Reconfigurable Photonic Circuits," in 2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2019.
[44]
N. Quack et al., "Silicon Photonic MEMS : Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits," in 2019 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC), 2019.
[46]
C. Errando-Herranz et al., "New dynamic silicon photonic components enabled by MEMS technology," in Proceedings Volume 10537, Silicon Photonics XIII, 2018.
[47]
C. Errando-Herranz, P. Edinger and K. Gylfason, "Dynamic dispersion tuning of silicon photonic waveguides by microelectromechanical actuation," in Optics InfoBase Conference Papers, 2017.
[48]
C. Errando-Herranz, P. Edinger and K. B. Gylfason, "Dynamic dispersion tuning of silicon photonicwaveguides by microelectromechanical actuation," in CLEO: Science and Innovations, 2017, 2017, p. SW1N. 3.

Non-peer reviewed

Conference papers

[49]
G. Jo et al., "Wafer-level Hermetic Sealing of Silicon Photonic MEMS by Direct Metal-to-Metal Bonding," in WaferBond’22 Conference of Wafer Bonding for Microsystems, 3D- and Wafer Level Integration, October 5-6, 2022., 2022.
[50]
G. Jo et al., "Wafer-Level Vacuum Sealing for Packaging of Silicon Photonic MEMS," in Proceedings SPIE OPTO 6-12 march 2021 silicon photonics XVI, 2021.
[51]
L. Van Iseghem et al., "Liquid crystal phase shifter integrated in a silicon photonics platform," in Proceedings of the 22nd European Conference on Integrated Optics (ECIO) 2020, 2020.
[52]
W. Bogaerts et al., "MORPHIC : Programmable Photonic Circuits enabled by Silicon Photonic MEMS," in Proceedings Volume 11285 SPIE OPTO - 1-6 February 2020 Silicon Photonics XV, 2020.
[53]
N. Quack et al., "MEMS-based silicon photonic integrated devices and circuits," in ECIO 2019, Ghent, Belgium (2019), 2019.

Theses

[54]
P. Edinger, "Silicon photonic MEMS building blocks for low-power programmable circuits," Doctoral thesis : KTH Royal Institute of Technology, TRITA-EECS-AVL, 2022:71, 2022.
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2024-12-11 00:04:41