The students will learn about the design of micro-electromechanical systems, and will be guided through a complete microsystem engineering cycle in which they will do design, fabrication, and characterization of their own microdevice concepts. The students will learn to use state-of-the art microsystem engineering tools, including finite-element modeling (FEM), CAD layouting, clean-room microfabrication machines, and electrical/mechanical/optical characterization tools.
FEK3360 Advanced Hands-on MEMS Course 10.0 credits
Information for research students about course offerings
The course is given every year in conjuction with EK2360 in period 2
Choose semester and course offering
Choose semester and course offering to see current information and more about the course, such as course syllabus, study period, and application information.
Application
For course offering
Autumn 2023 Start 30 Oct 2023 programme students
Application code
51400
Headings with content from the Course syllabus FEK3360 (Spring 2019–) are denoted with an asterisk ( )
Content and learning outcomes
Course contents
Intended learning outcomes
Upon completion of the course, the students will be able to:
- conceptualize microsystem/microactuator devices for research tasks and for given real-world specifications,
- model, simulate and design microsystems in state-of-the-art design software,
- fabricate microsystem devices in a state-of-the-art semiconductor clean-room laboratory,
- characterize the performance of microsystem devices,
- analyse failure mechanisms and to propose design improvements for a subsequent engineering cycle
- independently carry out research projects involving micro-electromechanical systems
Literature and preparations
Specific prerequisites
registered as PhD student at Swedish university or equivalent
Recommended prerequisites
Basic knowledge i physics
Equipment
No information inserted
Literature
No information inserted
Examination and completion
If the course is discontinued, students may request to be examined during the following two academic years.
Grading scale
P, F
Examination
- EXA1 - Examination, 10.0 credits, grading scale: P, F
Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.
The examiner may apply another examination format when re-examining individual students.
Other requirements for final grade
- attendance of the introductory lectures
- project work in team
- active participation in weekly review meetings
- keeping of hand-in deadlines (for design, intermediate and final report)
- approved 20 min oral presentation of project results
- approved intermediate and final reports
Opportunity to complete the requirements via supplementary examination
No information inserted
Opportunity to raise an approved grade via renewed examination
No information inserted
Examiner
Ethical approach
- All members of a group are responsible for the group's work.
- In any assessment, every student shall honestly disclose any help received and sources used.
- In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.
Further information
Course room in Canvas
Registered students find further information about the implementation of the course in the course room in Canvas. A link to the course room can be found under the tab Studies in the Personal menu at the start of the course.
Offered by
Main field of study
This course does not belong to any Main field of study.
Education cycle
Third cycle
Add-on studies
No information inserted
Contact
Joachim Oberhammer (joachimo@kth.se)