Class information for:
Level 1: GAS PUFF TARGET//EUV SOURCE//DISCHARGE PRODUCED PLASMA

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
588 3       X RAY OPTICS//X RAY MICROSCOPY//JOURNAL OF SYNCHROTRON RADIATION 15045
1435 2             X RAY MICROSCOPY//X RAY OPTICS//MULTILAYER MIRROR 8135
11673 1                   GAS PUFF TARGET//EUV SOURCE//DISCHARGE PRODUCED PLASMA 990

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 GAS PUFF TARGET authKW 509330 2% 80% 20
2 EUV SOURCE authKW 428911 2% 84% 16
3 DISCHARGE PRODUCED PLASMA authKW 327428 1% 86% 12
4 LASER PRODUCED PLASMA authKW 274247 6% 15% 57
5 MAT EXTREME ENVIRONM address 218891 3% 25% 27
6 EXTREME ULTRAVIOLET authKW 213941 4% 17% 40
7 EUV LITHOGRAPHY authKW 198862 3% 18% 34
8 ADV INTERDISCIPLINARY SCI address 162229 2% 21% 24
9 EXTREME ULTRAVIOLET LITHOGRAPHY authKW 148368 3% 18% 26
10 DEBRIS MITIGATION authKW 143242 1% 50% 9

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 7450 55% 0% 548
2 Optics 3945 27% 0% 267
3 Instruments & Instrumentation 1152 11% 0% 113
4 Nanoscience & Nanotechnology 902 11% 0% 111
5 Physics, Fluids & Plasmas 883 8% 0% 77
6 Engineering, Electrical & Electronic 358 14% 0% 134
7 Nuclear Science & Technology 143 4% 0% 42
8 Physics, Multidisciplinary 132 7% 0% 69
9 Physics, Nuclear 120 4% 0% 39
10 Spectroscopy 111 4% 0% 35

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MAT EXTREME ENVIRONM 218891 3% 25% 27
2 ADV INTERDISCIPLINARY SCI 162229 2% 21% 24
3 OPT TECHNOL INNOVAT OPTIC 113689 1% 71% 5
4 ADV SCI TECHNOL IND 111677 4% 9% 37
5 PHYS AS 95501 0% 100% 3
6 PLASMA MAT INTERACT GRP 72344 1% 45% 5
7 LASER ENGN 70184 7% 3% 71
8 GRP PLICAT PLASMAS 63667 0% 100% 2
9 HIRATSUKA DEV 63667 0% 100% 2
10 OPT CORE 63667 0% 100% 2

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 32341 3% 3% 32
2 APPLIED PHYSICS B-LASERS AND OPTICS 5294 4% 0% 36
3 JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS 4704 1% 2% 6
4 REVIEW OF SCIENTIFIC INSTRUMENTS 3653 6% 0% 60
5 MICROELECTRONIC ENGINEERING 3299 3% 0% 33
6 APPLIED PHYSICS LETTERS 2304 9% 0% 92
7 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 2269 4% 0% 35
8 JOURNAL OF PHYSICS D-APPLIED PHYSICS 2079 4% 0% 38
9 JOURNAL OF APPLIED PHYSICS 2037 9% 0% 85
10 LASER AND PARTICLE BEAMS 1355 1% 0% 10

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 GAS PUFF TARGET 509330 2% 80% 20 Search GAS+PUFF+TARGET Search GAS+PUFF+TARGET
2 EUV SOURCE 428911 2% 84% 16 Search EUV+SOURCE Search EUV+SOURCE
3 DISCHARGE PRODUCED PLASMA 327428 1% 86% 12 Search DISCHARGE+PRODUCED+PLASMA Search DISCHARGE+PRODUCED+PLASMA
4 LASER PRODUCED PLASMA 274247 6% 15% 57 Search LASER+PRODUCED+PLASMA Search LASER+PRODUCED+PLASMA
5 EXTREME ULTRAVIOLET 213941 4% 17% 40 Search EXTREME+ULTRAVIOLET Search EXTREME+ULTRAVIOLET
6 EUV LITHOGRAPHY 198862 3% 18% 34 Search EUV+LITHOGRAPHY Search EUV+LITHOGRAPHY
7 EXTREME ULTRAVIOLET LITHOGRAPHY 148368 3% 18% 26 Search EXTREME+ULTRAVIOLET+LITHOGRAPHY Search EXTREME+ULTRAVIOLET+LITHOGRAPHY
8 DEBRIS MITIGATION 143242 1% 50% 9 Search DEBRIS+MITIGATION Search DEBRIS+MITIGATION
9 COLLECTOR OPTICS 127335 0% 100% 4 Search COLLECTOR+OPTICS Search COLLECTOR+OPTICS
10 PLASMA DEBRIS 127335 0% 100% 4 Search PLASMA+DEBRIS Search PLASMA+DEBRIS

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 2343 MULTILAYER MIRROR//PRECIS OPT ENGN//MULTILAYERS
2 12504 HIGH ENERGY DENSITY PHYSICS//OPACITY//RADIATIVE OPACITY
3 2219 X RAY LASER//SOFT X RAY LASER//SPECT ATOM ION
4 26341 LEAF DETAILS//X RAY CONTACT MICROSCOPY//SOFT X RAY CONTACT MICROSCOPY
5 30724 TRANSMISSION GRATING//SPACE NANOTECHNOL//FREESTANDING TRANSMISSION GRATING
6 20046 PSEUDOSPARK DISCHARGE//PSEUDOSPARK//PSEUDOSPARK SWITCH
7 7319 X RAY MICROSCOPY//ZONE PLATE//X RAY OPTICS
8 34155 KOROLEV STATE AEROSP UNIV//VACUUM SPARK//COMPRESSION OF PLASMA STREAMS
9 9883 LASER AND PARTICLE BEAMS//GEOTHERMAL DSC//DIPARTIMENTO FIS G OCCHIALINI
10 10160 TIME OLVED DIFFRACT//MOL MOVIES//SPECT ULTRAR IDE

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