Class information for:
Level 1: KINEMATIC COUPLING//EXACT CONSTRAINT//MO EXPOSURE OPTICS

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
13 4 PHYSICS, PARTICLES & FIELDS//PHYSICS, NUCLEAR//OPTICS 1062565
263 3       OPTICS//APPLIED OPTICS//OPTICS AND LASERS IN ENGINEERING 45499
1616 2             ENGINEERING, MANUFACTURING//THERMAL ERROR//ERROR COMPENSATION 7308
34920 1                   KINEMATIC COUPLING//EXACT CONSTRAINT//MO EXPOSURE OPTICS 119

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 KINEMATIC COUPLING authKW 2648471 17% 50% 20
2 EXACT CONSTRAINT authKW 827650 4% 63% 5
3 MO EXPOSURE OPTICS authKW 794547 3% 100% 3
4 ELASTIC AVERAGING authKW 735687 4% 56% 5
5 MASK ALIGNER authKW 733422 5% 46% 6
6 PROXIMITY PRINTING authKW 601924 4% 45% 5
7 POWER CHUCK authKW 529698 2% 100% 2
8 PRECIS ENGN GRP address 397265 5% 25% 6
9 ADJUSTABLE APERTURE MECHANISM authKW 264849 1% 100% 1
10 ANTI BACKLASH GEARS authKW 264849 1% 100% 1

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Engineering, Manufacturing 5601 38% 0% 45
2 Nanoscience & Nanotechnology 1368 37% 0% 44
3 Instruments & Instrumentation 1348 34% 0% 40
4 Engineering, General 740 19% 0% 23
5 Optics 503 28% 0% 33
6 Engineering, Mechanical 161 13% 0% 15
7 Physics, Applied 133 24% 0% 28
8 Engineering, Electrical & Electronic 115 20% 0% 24
9 Materials Science, Composites 56 3% 0% 4
10 Materials Science, Multidisciplinary 34 15% 0% 18

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PRECIS ENGN GRP 397265 5% 25% 6
2 JIANGSU PROV MED OPT 264849 1% 100% 1
3 NUMER CONTROL TECHNOL PLICAT JIANGXI 264849 1% 100% 1
4 P PALARDO PROF MECH ENGN 264849 1% 100% 1
5 PLANETARY SENSOR SYST 264849 1% 100% 1
6 PRECIS SYST DESIGN MFG 264849 1% 100% 1
7 SLC CHAINES LASERS 264849 1% 100% 1
8 UNIV INVEST OPT NANOFIS IUOYN 264849 1% 100% 1
9 ENGN EXTREME PRECIS OPT 33104 1% 13% 1
10 DEP FIS LICADA 24075 1% 9% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY 70728 17% 1% 20
2 PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING 63452 8% 3% 9
3 SLOVAK REVIEW OF WORLD LITERATURE RESEARCH 29426 1% 11% 1
4 MANUFACTURING ENGINEERING 12756 3% 1% 4
5 SOVIET JOURNAL OF OPTICAL TECHNOLOGY 3277 3% 0% 3
6 MICROELECTRONIC ENGINEERING 1629 7% 0% 8
7 JOURNAL OF OPTICAL TECHNOLOGY 1302 3% 0% 4
8 BULLETIN OF THE JSME-JAPAN SOCIETY OF MECHANICAL ENGINEERS 1299 3% 0% 3
9 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 1156 4% 0% 5
10 INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE 1149 3% 0% 4

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 KINEMATIC COUPLING 2648471 17% 50% 20 Search KINEMATIC+COUPLING Search KINEMATIC+COUPLING
2 EXACT CONSTRAINT 827650 4% 63% 5 Search EXACT+CONSTRAINT Search EXACT+CONSTRAINT
3 MO EXPOSURE OPTICS 794547 3% 100% 3 Search MO+EXPOSURE+OPTICS Search MO+EXPOSURE+OPTICS
4 ELASTIC AVERAGING 735687 4% 56% 5 Search ELASTIC+AVERAGING Search ELASTIC+AVERAGING
5 MASK ALIGNER 733422 5% 46% 6 Search MASK+ALIGNER Search MASK+ALIGNER
6 PROXIMITY PRINTING 601924 4% 45% 5 Search PROXIMITY+PRINTING Search PROXIMITY+PRINTING
7 POWER CHUCK 529698 2% 100% 2 Search POWER+CHUCK Search POWER+CHUCK
8 ADJUSTABLE APERTURE MECHANISM 264849 1% 100% 1 Search ADJUSTABLE+APERTURE+MECHANISM Search ADJUSTABLE+APERTURE+MECHANISM
9 ANTI BACKLASH GEARS 264849 1% 100% 1 Search ANTI+BACKLASH+GEARS Search ANTI+BACKLASH+GEARS
10 AZIMUTH ANGLE OPTIMIZATION 264849 1% 100% 1 Search AZIMUTH+ANGLE+OPTIMIZATION Search AZIMUTH+ANGLE+OPTIMIZATION

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 37702 SELF HETERODYNE//SECONDARY SPUTTERING LITHOGRAPHY//ACCESS TRANSPORT ENGN
2 12922 FIXTURE DESIGN//MODULAR FIXTURE//FIXTURE
3 34029 JOURNAL OF OPTICAL TECHNOLOGY//ARC DISCHARGE FUNCTION//BEIJING AEROSP TIMES OPT ELECT TECHNOL CO LTD
4 8822 OPTICAL LITHOGRAPHY//OPTICAL PROXIMITY CORRECTION//PHASE SHIFTING MASK
5 9958 THERMAL ERROR//GEOMETRIC ERROR//FIVE AXIS MACHINE TOOL
6 19977 FLUIDIC SELF ASSEMBLY//FLUIDIC SELF ASSEMBLY FSA//SELF ALIGNMENT
7 33023 CARBON MEMS//PYROLYSED PHOTORESIST FILMS//PYROLYZED POLYMER
8 35663 KEMIKRO//ULTRASONIC HOT EMBOSSING//MICROPATTERN REPLICATION
9 29664 UDU FACTORISATION//COMPENSATABILITY//DIFFERENTIAL CONTROLLABILITY
10 23585 CAT EYE EFFECT//RETROREFLECTOR//LASER LONG PATH ABSORPTION METHOD

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