Class information for:
Level 1: HOLOGRAPHIC LITHOGRAPHY//INTERFERENCE LITHOGRAPHY//LASER INTERFERENCE METALLURGY

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
8 4 POLYMER SCIENCE//CHEMISTRY, PHYSICAL//MATERIALS SCIENCE, MULTIDISCIPLINARY 1554940
54 3       PHOTONIC CRYSTAL//OPTICS//METAMATERIALS 95723
558 2             PHOTONIC CRYSTAL//PHOTONIC BAND GAP//PHOTONIC CRYSTAL WAVEGUIDE 15030
12399 1                   HOLOGRAPHIC LITHOGRAPHY//INTERFERENCE LITHOGRAPHY//LASER INTERFERENCE METALLURGY 939

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 HOLOGRAPHIC LITHOGRAPHY authKW 427638 3% 44% 29
2 INTERFERENCE LITHOGRAPHY authKW 306813 3% 29% 32
3 LASER INTERFERENCE METALLURGY authKW 234939 1% 100% 7
4 PHOTONIC QUASICRYSTAL authKW 187934 1% 40% 14
5 LASER INTERFERENCE LITHOGRAPHY authKW 142616 2% 25% 17
6 DLIP authKW 134251 0% 100% 4
7 JR3CN address 134243 1% 50% 8
8 MULTI BEAM INTERFERENCE authKW 134243 1% 50% 8
9 LASER INTERFERENCE authKW 128893 1% 30% 13
10 EUV LASERS authKW 107399 0% 80% 4

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Optics 8079 39% 0% 365
2 Nanoscience & Nanotechnology 5193 26% 0% 244
3 Physics, Applied 4510 45% 0% 422
4 Materials Science, Multidisciplinary 1070 26% 0% 244
5 Physics, Condensed Matter 655 16% 0% 146
6 Engineering, Electrical & Electronic 568 17% 0% 156
7 Materials Science, Coatings & Films 235 4% 0% 38
8 Chemistry, Physical 107 10% 0% 97
9 Physics, Multidisciplinary 76 6% 0% 55
10 Chemistry, Multidisciplinary 56 8% 0% 77

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JR3CN 134243 1% 50% 8
2 CHAIR EXPT PHYS EUV 104880 1% 63% 5
3 DCSSE 100688 0% 100% 3
4 DIRECT DIGITAL MFG 89498 0% 67% 4
5 CREAT INITIAT INTEGRATED OPTOFLUID S 83309 1% 21% 12
6 PHOTON NANO CRYSTAL PNRL 75515 0% 75% 3
7 IRAC 71066 1% 35% 6
8 CHAIR FUNCT MAT 55004 1% 16% 10
9 SOLDIER NANOTECHNOL 41075 2% 6% 21
10 HENAN LASER OPTOELECT INFORMAT TECHNOL 40266 1% 20% 6

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 8900 7% 0% 67
2 OPTICS EXPRESS 5664 8% 0% 78
3 ADVANCED ENGINEERING MATERIALS 5122 2% 1% 22
4 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 4781 1% 1% 12
5 JOURNAL OF LASER MICRO NANOENGINEERING 3588 1% 1% 8
6 MICROELECTRONIC ENGINEERING 3272 3% 0% 32
7 PHOTONICS AND NANOSTRUCTURES-FUNDAMENTALS AND APPLICATIONS 1550 1% 1% 5
8 APPLIED OPTICS 1510 4% 0% 41
9 ADVANCED MATERIALS 1414 3% 0% 25
10 OPTICS LETTERS 1392 4% 0% 36

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 HOLOGRAPHIC LITHOGRAPHY 427638 3% 44% 29 Search HOLOGRAPHIC+LITHOGRAPHY Search HOLOGRAPHIC+LITHOGRAPHY
2 INTERFERENCE LITHOGRAPHY 306813 3% 29% 32 Search INTERFERENCE+LITHOGRAPHY Search INTERFERENCE+LITHOGRAPHY
3 LASER INTERFERENCE METALLURGY 234939 1% 100% 7 Search LASER+INTERFERENCE+METALLURGY Search LASER+INTERFERENCE+METALLURGY
4 PHOTONIC QUASICRYSTAL 187934 1% 40% 14 Search PHOTONIC+QUASICRYSTAL Search PHOTONIC+QUASICRYSTAL
5 LASER INTERFERENCE LITHOGRAPHY 142616 2% 25% 17 Search LASER+INTERFERENCE+LITHOGRAPHY Search LASER+INTERFERENCE+LITHOGRAPHY
6 DLIP 134251 0% 100% 4 Search DLIP Search DLIP
7 MULTI BEAM INTERFERENCE 134243 1% 50% 8 Search MULTI+BEAM+INTERFERENCE Search MULTI+BEAM+INTERFERENCE
8 LASER INTERFERENCE 128893 1% 30% 13 Search LASER+INTERFERENCE Search LASER+INTERFERENCE
9 EUV LASERS 107399 0% 80% 4 Search EUV+LASERS Search EUV+LASERS
10 TALBOT LITHOGRAPHY 107399 0% 80% 4 Search TALBOT+LITHOGRAPHY Search TALBOT+LITHOGRAPHY

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 468 PHOTONIC CRYSTAL//PHOTONIC BAND GAP//INVERSE OPAL
2 30724 TRANSMISSION GRATING//SPACE NANOTECHNOL//FREESTANDING TRANSMISSION GRATING
3 11450 TWO PHOTON POLYMERIZATION//DIRECT LASER WRITING//ORGAN NANOPHOTON
4 28240 HSQ//HYDROGEN SILSESQUIOXANE//HYDROGEN SILSESQUIOXANE HSQ
5 36376 AUTOCLONING//PHOTON LATTICE INC//TA2O5 SIO2
6 34029 JOURNAL OF OPTICAL TECHNOLOGY//ARC DISCHARGE FUNCTION//BEIJING AEROSP TIMES OPT ELECT TECHNOL CO LTD
7 21211 IMMERSION LITHOGRAPHY//LITHOGRAPHY SIMULATION//DOUBLE PATTERNING
8 5728 TRACE MAP//QUASIREGULAR SYSTEMS//QUASIPERIODIC POTENTIALS
9 1213 PHOTONIC CRYSTAL//PHOTONIC CRYSTAL WAVEGUIDE//SLOW LIGHT
10 27003 NANOCHANNEL MEMBRANES//FLOAT CASTING//MICROCHANNEL SUSPENSION FLOW

Go to start page