Class information for:
Level 1: IMMERSION LITHOGRAPHY//LITHOGRAPHY SIMULATION//DOUBLE PATTERNING

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
8 4 POLYMER SCIENCE//CHEMISTRY, PHYSICAL//MATERIALS SCIENCE, MULTIDISCIPLINARY 1554940
397 3       JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//MICROELECTRONIC ENGINEERING//NANOSCIENCE & NANOTECHNOLOGY 32153
806 2             JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//CHEMICALLY AMPLIFIED RESIST//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY 12229
21211 1                   IMMERSION LITHOGRAPHY//LITHOGRAPHY SIMULATION//DOUBLE PATTERNING 452

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 IMMERSION LITHOGRAPHY authKW 2311547 13% 56% 59
2 LITHOGRAPHY SIMULATION authKW 817122 7% 38% 31
3 DOUBLE PATTERNING authKW 658372 5% 39% 24
4 PATTERN COLLAPSE authKW 594984 4% 53% 16
5 VUV LITHOG address 427073 2% 88% 7
6 JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY journal 402215 24% 5% 108
7 RESIST PATTERN COLLAPSE authKW 278906 1% 100% 4
8 RESIST REFLOW authKW 217892 1% 63% 5
9 LITHO ETCH LITHO ETCH authKW 209179 1% 100% 3
10 POSITIVE TONE DEVELOPMENT authKW 209179 1% 100% 3

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Nanoscience & Nanotechnology 2016 23% 0% 106
2 Polymer Science 1943 25% 0% 114
3 Physics, Applied 1750 41% 0% 184
4 Optics 938 20% 0% 90
5 Engineering, Electrical & Electronic 820 27% 0% 120
6 Physics, Multidisciplinary 170 10% 0% 47
7 Materials Science, Multidisciplinary 48 11% 0% 49
8 Materials Science, Coatings & Films 6 1% 0% 6
9 Instruments & Instrumentation 2 2% 0% 7
10 Physics, Condensed Matter 1 3% 0% 14

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 VUV LITHOG 427073 2% 88% 7
2 CLEAN TRACK BU 139453 0% 100% 2
3 INFORMAT COMMUN ELECT ENGN 88232 2% 14% 9
4 ADV LITHPG DEV ALBANY 69726 0% 100% 1
5 AVD MAT DEV 1 69726 0% 100% 1
6 BUSINESS UNIT ELE ON MAT 69726 0% 100% 1
7 CLEAN TRACK BUSINESS UNIT 69726 0% 100% 1
8 DEP C T 69726 0% 100% 1
9 DEV TECHNOL OPERAT 69726 0% 100% 1
10 DUPONT KK 69726 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY 402215 24% 5% 108
2 JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS 151750 5% 9% 23
3 MICROLITHOGRAPHY WORLD 65692 2% 13% 7
4 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 33503 5% 2% 22
5 JOURNAL OF THE KOREAN PHYSICAL SOCIETY 8603 10% 0% 44
6 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 7291 9% 0% 42
7 MICROELECTRONIC ENGINEERING 4879 6% 0% 27
8 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 3916 9% 0% 42
9 JAPANESE JOURNAL OF APPLIED PHYSICS 2020 5% 0% 22
10 SOLID STATE TECHNOLOGY 928 1% 0% 5

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 IMMERSION LITHOGRAPHY 2311547 13% 56% 59 Search IMMERSION+LITHOGRAPHY Search IMMERSION+LITHOGRAPHY
2 LITHOGRAPHY SIMULATION 817122 7% 38% 31 Search LITHOGRAPHY+SIMULATION Search LITHOGRAPHY+SIMULATION
3 DOUBLE PATTERNING 658372 5% 39% 24 Search DOUBLE+PATTERNING Search DOUBLE+PATTERNING
4 PATTERN COLLAPSE 594984 4% 53% 16 Search PATTERN+COLLAPSE Search PATTERN+COLLAPSE
5 RESIST PATTERN COLLAPSE 278906 1% 100% 4 Search RESIST+PATTERN+COLLAPSE Search RESIST+PATTERN+COLLAPSE
6 RESIST REFLOW 217892 1% 63% 5 Search RESIST+REFLOW Search RESIST+REFLOW
7 LITHO ETCH LITHO ETCH 209179 1% 100% 3 Search LITHO+ETCH+LITHO+ETCH Search LITHO+ETCH+LITHO+ETCH
8 POSITIVE TONE DEVELOPMENT 209179 1% 100% 3 Search POSITIVE+TONE+DEVELOPMENT Search POSITIVE+TONE+DEVELOPMENT
9 RESIST REFLOW PROCESS 209179 1% 100% 3 Search RESIST+REFLOW+PROCESS Search RESIST+REFLOW+PROCESS
10 SECOND GENERATION FLUID 209179 1% 100% 3 Search SECOND+GENERATION+FLUID Search SECOND+GENERATION+FLUID

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 2517 LINE EDGE ROUGHNESS//CHEMICALLY AMPLIFIED RESIST//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
2 8822 OPTICAL LITHOGRAPHY//OPTICAL PROXIMITY CORRECTION//PHASE SHIFTING MASK
3 28240 HSQ//HYDROGEN SILSESQUIOXANE//HYDROGEN SILSESQUIOXANE HSQ
4 12399 HOLOGRAPHIC LITHOGRAPHY//INTERFERENCE LITHOGRAPHY//LASER INTERFERENCE METALLURGY
5 7011 SOLID STATE TECHNOLOGY//DRY DEVELOPMENT//PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
6 36059 LADDER SILICONE SPIN ON GLASS LS SOG//POLYSILOXENE BASED FILM//REACTIVE HYDROGEN PLASMA SPUTTERING
7 20276 WATER RUNNING ROBOT//ELASTOCAPILLARITY//WETTING RIDGE
8 10740 SU 8//MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS//LIGA
9 31202 SOLVENT FREE NANOFLUIDS//LIQUID LIKE BEHAVIOR//HIGH TECH ORGAN FIBERS SICHUAN PROV
10 35421 WAFER RINSING//SINGLE WAFER CLEANING TOOLS//ACTIVATED CARBON ADSORPTION PROCESS

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