Class information for:
Level 1: LADDER SILICONE SPIN ON GLASS LS SOG//POLYSILOXENE BASED FILM//REACTIVE HYDROGEN PLASMA SPUTTERING

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
389 2             MICROCRYSTALLINE SILICON//JOURNAL OF NON-CRYSTALLINE SOLIDS//AMORPHOUS SILICON 17376
36059 1                   LADDER SILICONE SPIN ON GLASS LS SOG//POLYSILOXENE BASED FILM//REACTIVE HYDROGEN PLASMA SPUTTERING 104

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 LADDER SILICONE SPIN ON GLASS LS SOG authKW 606097 2% 100% 2
2 POLYSILOXENE BASED FILM authKW 606097 2% 100% 2
3 REACTIVE HYDROGEN PLASMA SPUTTERING authKW 606097 2% 100% 2
4 SIO2 PATTERN GENERATION authKW 606097 2% 100% 2
5 SOG FILMS authKW 606097 2% 100% 2
6 MICROELE SYST address 404064 2% 67% 2
7 TOPOGRAPHY PLANARIZATION authKW 404064 2% 67% 2
8 DEPOSITION ETCHING authKW 303049 1% 100% 1
9 DIODE TYPE REACTOR authKW 303049 1% 100% 1
10 EB INDUCED REACTION authKW 303049 1% 100% 1

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 855 58% 0% 60
2 Materials Science, Ceramics 282 11% 0% 11
3 Physics, Condensed Matter 234 26% 0% 27
4 Materials Science, Coatings & Films 210 11% 0% 11
5 COMPUTER APPLICATIONS & CYBERNETICS 114 1% 0% 1
6 Materials Science, Multidisciplinary 26 14% 0% 15
7 Engineering, Electrical & Electronic 19 11% 0% 11
8 Nanoscience & Nanotechnology 13 5% 0% 5
9 Instruments & Instrumentation 9 4% 0% 4
10 Chemistry, Physical 7 9% 0% 9

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MICROELE SYST 404064 2% 67% 2
2 COMP SCI ELE 30303 1% 10% 1
3 ST 3403 1% 1% 1
4 CAMD 2597 2% 0% 2
5 MICROMFG 2430 2% 0% 2
6 PL ELECT 779 2% 0% 2
7 MFG 213 1% 0% 1
8 BIOSCI BIOENGN 130 1% 0% 1
9 BECKMAN ADV SCI TECHNOL 110 1% 0% 1
10 ELECT COMP SCI 67 1% 0% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS 10864 4% 1% 4
2 JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 4907 13% 0% 14
3 OPTOELECTRONICS-DEVICES AND TECHNOLOGIES 3292 1% 1% 1
4 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 2187 14% 0% 15
5 INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS 2044 2% 0% 2
6 APPLICATIONS OF SURFACE SCIENCE 2006 2% 0% 2
7 JAPAN ANNUAL REVIEWS IN ELECTRONICS COMPUTERS & TELECOMMUNICATIONS 1720 1% 1% 1
8 JOURNAL OF NON-CRYSTALLINE SOLIDS 1305 10% 0% 10
9 INTERNATIONAL JOURNAL OF APPLIED GLASS SCIENCE 1005 1% 0% 1
10 SOLID STATE COMMUNICATIONS 747 8% 0% 8

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 LADDER SILICONE SPIN ON GLASS LS SOG 606097 2% 100% 2 Search LADDER+SILICONE+SPIN+ON+GLASS+LS+SOG Search LADDER+SILICONE+SPIN+ON+GLASS+LS+SOG
2 POLYSILOXENE BASED FILM 606097 2% 100% 2 Search POLYSILOXENE+BASED+FILM Search POLYSILOXENE+BASED+FILM
3 REACTIVE HYDROGEN PLASMA SPUTTERING 606097 2% 100% 2 Search REACTIVE+HYDROGEN+PLASMA+SPUTTERING Search REACTIVE+HYDROGEN+PLASMA+SPUTTERING
4 SIO2 PATTERN GENERATION 606097 2% 100% 2 Search SIO2+PATTERN+GENERATION Search SIO2+PATTERN+GENERATION
5 SOG FILMS 606097 2% 100% 2 Search SOG+FILMS Search SOG+FILMS
6 TOPOGRAPHY PLANARIZATION 404064 2% 67% 2 Search TOPOGRAPHY+PLANARIZATION Search TOPOGRAPHY+PLANARIZATION
7 DEPOSITION ETCHING 303049 1% 100% 1 Search DEPOSITION+ETCHING Search DEPOSITION+ETCHING
8 DIODE TYPE REACTOR 303049 1% 100% 1 Search DIODE+TYPE+REACTOR Search DIODE+TYPE+REACTOR
9 EB INDUCED REACTION 303049 1% 100% 1 Search EB+INDUCED+REACTION Search EB+INDUCED+REACTION
10 EVAPORATIVE SHRINKAGE 303049 1% 100% 1 Search EVAPORATIVE+SHRINKAGE Search EVAPORATIVE+SHRINKAGE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 35494 CDTE SI HETEROJUNCTION//CERIUM VALENCE STATES//GRP NAZL STRUTTURA MAT UR 24
2 16142 SILANE PLASMA//SIH2//HYDROGENATED AMORPHOUS SILICON FILM
3 36903 OPTICS OF THIN FILMS//ARGONOXYGEN GAS MIXTURE//AUTOMAT ELECT MEASUREMENT
4 26 JOURNAL OF NON-CRYSTALLINE SOLIDS//PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES//STAEBLER WRONSKI EFFECT
5 341 MICROCRYSTALLINE SILICON//ENERGY UNIT//NANOCRYSTALLINE SILICON
6 18924 A S H ZNS MULTILAYER FILMS//A SIH NC SIH SUPERLATTICE//AMORPHOUS HYDROGENED SILICON NITRIDE
7 8137 AMORPHOUS SILICON CARBIDE//SILICON CARBON ALLOYS//A SIC H
8 26088 F 2 LASER//CHEMICAL WET TREATMENT//DIELECTRIC TANGENT
9 28628 PICOSECOND PHOTOINDUCED ABSORPTION//BEREICH SOLARE ENERGET//CNRSGRP OPT NONLINEAIRE OPTOELECT
10 30090 ABSOLUTE REFLECTANCE NORMAL INCIDENCE//CONDENSED SPECT OPTOELECT PHYS//CONDUCTION BAND TAIL BREADTH

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