Class information for:
Level 1: F 2 LASER//CHEMICAL WET TREATMENT//DIELECTRIC TANGENT

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
1116 2             SILICON OXYNITRIDE//BORON PENETRATION//SILICON NITRIDE 10021
26088 1                   F 2 LASER//CHEMICAL WET TREATMENT//DIELECTRIC TANGENT 285

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 F 2 LASER authKW 528631 5% 34% 14
2 CHEMICAL WET TREATMENT authKW 221170 1% 100% 2
3 DIELECTRIC TANGENT authKW 221170 1% 100% 2
4 MU RAMAN SPECTROMETRY authKW 221170 1% 100% 2
5 PHOTOCHEMICAL WELDING authKW 221170 1% 100% 2
6 SI2H6 GAS authKW 221170 1% 100% 2
7 SURF ELE OCHEM SUR E ENGN address 221170 1% 100% 2
8 SILICON TETRAACETATE authKW 199050 1% 60% 3
9 N2O GAS authKW 142177 1% 43% 3
10 ACCELERATOR WEATHER TESTING authKW 110585 0% 100% 1

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 3400 69% 0% 196
2 Materials Science, Coatings & Films 3188 24% 0% 69
3 Physics, Condensed Matter 531 24% 0% 68
4 Materials Science, Multidisciplinary 187 21% 0% 59
5 Chemistry, Physical 182 19% 0% 55
6 Materials Science, Ceramics 152 5% 0% 14
7 Optics 19 5% 0% 14
8 Engineering, Electrical & Electronic 10 6% 0% 18
9 Nanoscience & Nanotechnology 7 3% 0% 8
10 Materials Science, Characterization, Testing 5 1% 0% 2

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SURF ELE OCHEM SUR E ENGN 221170 1% 100% 2
2 CDPCNRS URA 250 DMO 110585 0% 100% 1
3 CDPDTD 110585 0% 100% 1
4 CNET CNS MEYLAN 110585 0% 100% 1
5 CNRS URA 250 CONCEPTS DEVICES PHOTO 196 110585 0% 100% 1
6 DTD CDP 110585 0% 100% 1
7 ENGN SCI ELECT ENGN MACHIKANEYAMA CHOU 110585 0% 100% 1
8 FIS LICADA LAGOAS MARCOSENDE 9 110585 0% 100% 1
9 GROUPMENT INTERET ECON 110585 0% 100% 1
10 KASHIRSKOYE SHOSSE 31 110585 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 APPLIED SURFACE SCIENCE 6398 16% 0% 46
2 JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 5692 9% 0% 25
3 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 1399 7% 0% 20
4 PHYSICS IN TECHNOLOGY 883 0% 1% 1
5 JAPANESE JOURNAL OF APPLIED PHYSICS 797 4% 0% 11
6 ANNALES DE PHYSIQUE 796 1% 0% 3
7 JOURNAL OF LASER MICRO NANOENGINEERING 738 1% 0% 2
8 APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 614 3% 0% 9
9 APPLIED PHYSICS LETTERS 494 8% 0% 23
10 ADVANCED MATERIALS FOR OPTICS AND ELECTRONICS 481 0% 0% 1

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 F 2 LASER 528631 5% 34% 14 Search F+2+LASER Search F+2+LASER
2 CHEMICAL WET TREATMENT 221170 1% 100% 2 Search CHEMICAL+WET+TREATMENT Search CHEMICAL+WET+TREATMENT
3 DIELECTRIC TANGENT 221170 1% 100% 2 Search DIELECTRIC+TANGENT Search DIELECTRIC+TANGENT
4 MU RAMAN SPECTROMETRY 221170 1% 100% 2 Search MU+RAMAN+SPECTROMETRY Search MU+RAMAN+SPECTROMETRY
5 PHOTOCHEMICAL WELDING 221170 1% 100% 2 Search PHOTOCHEMICAL+WELDING Search PHOTOCHEMICAL+WELDING
6 SI2H6 GAS 221170 1% 100% 2 Search SI2H6+GAS Search SI2H6+GAS
7 SILICON TETRAACETATE 199050 1% 60% 3 Search SILICON+TETRAACETATE Search SILICON+TETRAACETATE
8 N2O GAS 142177 1% 43% 3 Search N2O+GAS Search N2O+GAS
9 ACCELERATOR WEATHER TESTING 110585 0% 100% 1 Search ACCELERATOR+WEATHER+TESTING Search ACCELERATOR+WEATHER+TESTING
10 AFM AND SEM ANALYSES 110585 0% 100% 1 Search AFM+AND+SEM+ANALYSES Search AFM+AND+SEM+ANALYSES

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 10067 DIMETHYLALUMINUM HYDRIDE//FREEFORM FABRICAT S//SELECTIVE AL CVD
2 29260 MSOS O P STRUCTURE//SEMI INSULATING POLYCRYSTALLINE SILICON//SIPOS
3 16742 EXCILAMP//EXCIMER LAMP//HIGH CURRENT ELECT
4 16142 SILANE PLASMA//SIH2//HYDROGENATED AMORPHOUS SILICON FILM
5 13569 CONDUCTANCE TRANSIENTS//INDIUM PHOSPHIDE100//INSULATOR DAMAGE
6 15929 FLOW SHAPED STEP COVERAGE//FLOWING LIKE PROFILE//LPCVD SILICON NITRIDE
7 26716 SYNCHROTRON RADIATION STIMULATED ETCHING//VACUUM UV PHOTOSCI//SYNCHROTRON RADIATION EXCITED GROWTH
8 7996 2 CHLOROETHENYLSILANE//DIVALENT STATE STABILIZATION ENERGY//PENTAMETHYLDISILANE
9 3355 SILICON NITRIDE//SILICON OXYNITRIDE//SILICON NITRIDE FILM
10 36059 LADDER SILICONE SPIN ON GLASS LS SOG//POLYSILOXENE BASED FILM//REACTIVE HYDROGEN PLASMA SPUTTERING

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