Class information for: |
Basic class information |
Hierarchy of classes |
The table includes all classes above and classes immediately below the current class. |
| Cluster id | Level | Cluster label | #P |
|---|---|---|---|
| 1 | 4 | PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY | 2188495 |
| 13 | 3 | PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON | 136516 |
| 1116 | 2 | SILICON OXYNITRIDE//BORON PENETRATION//SILICON NITRIDE | 10021 |
| 15929 | 1 | FLOW SHAPED STEP COVERAGE//FLOWING LIKE PROFILE//LPCVD SILICON NITRIDE | 710 |
Terms with highest relevance score |
| rank | Category | termType | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|---|
| 1 | FLOW SHAPED STEP COVERAGE | authKW | 88777 | 0% | 100% | 2 |
| 2 | FLOWING LIKE PROFILE | authKW | 88777 | 0% | 100% | 2 |
| 3 | LPCVD SILICON NITRIDE | authKW | 88777 | 0% | 100% | 2 |
| 4 | PLASMA DEPOSITED OXIDES | authKW | 88777 | 0% | 100% | 2 |
| 5 | SINCO4 | authKW | 88777 | 0% | 100% | 2 |
| 6 | TEOS O 3 | authKW | 88777 | 0% | 100% | 2 |
| 7 | ATMOSPHERIC PRESSURE CVD | authKW | 69469 | 1% | 26% | 6 |
| 8 | BPSG | authKW | 69469 | 1% | 26% | 6 |
| 9 | BOROPHOSPHOSILICATE GLASS | authKW | 59183 | 0% | 67% | 2 |
| 10 | BOROPHOSPHOSILICATE GLASS BPSG | authKW | 59183 | 0% | 67% | 2 |
Web of Science journal categories |
| chi_square_rank | Category | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | Materials Science, Coatings & Films | 13993 | 32% | 0% | 227 |
| 2 | Electrochemistry | 4947 | 23% | 0% | 162 |
| 3 | Physics, Applied | 2583 | 40% | 0% | 281 |
| 4 | Materials Science, Multidisciplinary | 441 | 20% | 0% | 144 |
| 5 | Materials Science, Ceramics | 407 | 5% | 0% | 36 |
| 6 | Engineering, Electrical & Electronic | 395 | 16% | 0% | 114 |
| 7 | Physics, Condensed Matter | 363 | 14% | 0% | 97 |
| 8 | Nanoscience & Nanotechnology | 155 | 6% | 0% | 43 |
| 9 | Engineering, Chemical | 40 | 5% | 0% | 33 |
| 10 | Instruments & Instrumentation | 35 | 3% | 0% | 22 |
Address terms |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | ATMEL ES2 | 44389 | 0% | 100% | 1 |
| 2 | CHAIR PHYS CHEM ELE OCHEM TECHNOL | 44389 | 0% | 100% | 1 |
| 3 | CNRSENSIGC | 44389 | 0% | 100% | 1 |
| 4 | DIELECT G FILL | 44389 | 0% | 100% | 1 |
| 5 | DIELECT SYST MODULES PBG | 44389 | 0% | 100% | 1 |
| 6 | DISPOSITIFS MICROELECT AVANCEES | 44389 | 0% | 100% | 1 |
| 7 | ELECT DEVICES BUSINESS HEADQUATER | 44389 | 0% | 100% | 1 |
| 8 | HIGH DENS PLASMA RD GRP | 44389 | 0% | 100% | 1 |
| 9 | LA MAT GENIE PHYS | 44389 | 0% | 100% | 1 |
| 10 | RD PLASMA TECHNOL | 44389 | 0% | 100% | 1 |
Journals |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 34768 | 22% | 1% | 155 |
| 2 | SOLID STATE TECHNOLOGY | 13706 | 3% | 1% | 24 |
| 3 | JOURNAL OF THE AUSTRALASIAN CERAMIC SOCIETY | 4032 | 0% | 5% | 2 |
| 4 | RCA REVIEW | 3691 | 1% | 2% | 4 |
| 5 | KAGAKU KOGAKU RONBUNSHU | 3182 | 3% | 0% | 18 |
| 6 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2336 | 4% | 0% | 30 |
| 7 | GLASS TECHNOLOGY | 2335 | 1% | 1% | 6 |
| 8 | JOURNAL OF MATERIALS SCIENCE LETTERS | 1923 | 3% | 0% | 22 |
| 9 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1908 | 4% | 0% | 25 |
| 10 | THIN SOLID FILMS | 1352 | 5% | 0% | 34 |
Author Key Words |
Core articles |
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c: (1) Number of references referring to publications in the class. (2) Share of total number of active references referring to publications in the class. (3) Age of the article. New articles get higher score than old articles. (4) Citation rate, normalized to year. |
Classes with closest relation at Level 1 |