Class information for:
Level 1: SILICON NITRIDE//SILICON OXYNITRIDE//SILICON NITRIDE FILM

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
1116 2             SILICON OXYNITRIDE//BORON PENETRATION//SILICON NITRIDE 10021
3355 1                   SILICON NITRIDE//SILICON OXYNITRIDE//SILICON NITRIDE FILM 2036

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SILICON NITRIDE authKW 300440 11% 9% 227
2 SILICON OXYNITRIDE authKW 237899 3% 25% 61
3 SILICON NITRIDE FILM authKW 207880 1% 45% 30
4 PECVD authKW 69556 4% 6% 78
5 ION ENERGY DIAGNOSTICS authKW 61912 0% 100% 4
6 AMORPHOUS SILICON NITRIDE authKW 60400 1% 35% 11
7 EFFECTIVE TRAPPED CARRIER DENSITY authKW 46434 0% 100% 3
8 ELECTRON CYCLOTRON RESONANCE PLASMA DEPOSITION authKW 46434 0% 100% 3
9 SIH4 N 2 authKW 46434 0% 100% 3
10 SIH4 NH3 authKW 46434 0% 100% 3

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 25701 26% 0% 523
2 Physics, Applied 17022 58% 0% 1184
3 Physics, Condensed Matter 4265 25% 0% 512
4 Materials Science, Ceramics 4114 9% 0% 187
5 Materials Science, Multidisciplinary 4000 33% 0% 668
6 Electrochemistry 641 5% 0% 110
7 Nanoscience & Nanotechnology 593 7% 0% 139
8 Engineering, Electrical & Electronic 588 12% 0% 253
9 Instruments & Instrumentation 105 3% 0% 64
10 Optics 77 4% 0% 83

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 EPUSP 41248 1% 17% 16
2 ABT SF 4 30956 0% 100% 2
3 DEV MIDORI KU 30956 0% 100% 2
4 ELECT TECNOL COMPUTADO PROYECTOS 27858 0% 60% 3
5 FIS LICADA 3 21438 1% 6% 24
6 SIMULAC DISPOSIT SEMICOND 20636 0% 67% 2
7 2121 HISAKATA 15478 0% 100% 1
8 ABT SILIZIUM PHOTOVOLTAIK IONENSTRAHL OR 15478 0% 100% 1
9 ADV TECH CORP 15478 0% 100% 1
10 AGT 14 15478 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF NON-CRYSTALLINE SOLIDS 16577 8% 1% 158
2 THIN SOLID FILMS 14438 9% 1% 186
3 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 13724 6% 1% 113
4 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 5197 5% 0% 103
5 JOURNAL OF APPLIED PHYSICS 4452 9% 0% 180
6 SOVIET MICROELECTRONICS 4176 0% 3% 9
7 PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES 2978 1% 1% 25
8 SOLID STATE TECHNOLOGY 2662 1% 1% 18
9 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 2261 3% 0% 69
10 VACUUM 2232 2% 0% 38

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 SILICON NITRIDE 300440 11% 9% 227 Search SILICON+NITRIDE Search SILICON+NITRIDE
2 SILICON OXYNITRIDE 237899 3% 25% 61 Search SILICON+OXYNITRIDE Search SILICON+OXYNITRIDE
3 SILICON NITRIDE FILM 207880 1% 45% 30 Search SILICON+NITRIDE+FILM Search SILICON+NITRIDE+FILM
4 PECVD 69556 4% 6% 78 Search PECVD Search PECVD
5 ION ENERGY DIAGNOSTICS 61912 0% 100% 4 Search ION+ENERGY+DIAGNOSTICS Search ION+ENERGY+DIAGNOSTICS
6 AMORPHOUS SILICON NITRIDE 60400 1% 35% 11 Search AMORPHOUS+SILICON+NITRIDE Search AMORPHOUS+SILICON+NITRIDE
7 EFFECTIVE TRAPPED CARRIER DENSITY 46434 0% 100% 3 Search EFFECTIVE+TRAPPED+CARRIER+DENSITY Search EFFECTIVE+TRAPPED+CARRIER+DENSITY
8 ELECTRON CYCLOTRON RESONANCE PLASMA DEPOSITION 46434 0% 100% 3 Search ELECTRON+CYCLOTRON+RESONANCE+PLASMA+DEPOSITION Search ELECTRON+CYCLOTRON+RESONANCE+PLASMA+DEPOSITION
9 SIH4 N 2 46434 0% 100% 3 Search SIH4+N+2 Search SIH4+N+2
10 SIH4 NH3 46434 0% 100% 3 Search SIH4+NH3 Search SIH4+NH3

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 5396 BORON PENETRATION//NITRIDED OXIDE//SI OXYNITRIDE
2 29260 MSOS O P STRUCTURE//SEMI INSULATING POLYCRYSTALLINE SILICON//SIPOS
3 26088 F 2 LASER//CHEMICAL WET TREATMENT//DIELECTRIC TANGENT
4 19541 SILICON CARBONITRIDE//SICN//SILICON CARBON NITRIDE
5 25340 GAMMA SI3N4//TIN NITRIDE//CUBIC SILICON NITRIDE
6 1748 SI NANOCRYSTALS//SILICON NANOCRYSTALS//NANOPHOTON PHYS
7 7916 HMDSO//HEXAMETHYLDISILOXANE//HEXAMETHYLDISILOXANE HMDSO
8 15929 FLOW SHAPED STEP COVERAGE//FLOWING LIKE PROFILE//LPCVD SILICON NITRIDE
9 18924 A S H ZNS MULTILAYER FILMS//A SIH NC SIH SUPERLATTICE//AMORPHOUS HYDROGENED SILICON NITRIDE
10 17530 HOT WIRE CVD//HOT WIRE CHEMICAL VAPOR DEPOSITION//CAT CVD

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