Class information for:
Level 1: BORON PENETRATION//NITRIDED OXIDE//SI OXYNITRIDE

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
1116 2             SILICON OXYNITRIDE//BORON PENETRATION//SILICON NITRIDE 10021
5396 1                   BORON PENETRATION//NITRIDED OXIDE//SI OXYNITRIDE 1660

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 BORON PENETRATION authKW 482404 2% 71% 36
2 NITRIDED OXIDE authKW 128321 1% 52% 13
3 SI OXYNITRIDE authKW 85426 0% 75% 6
4 OXYNITRIDE authKW 81022 3% 9% 45
5 OXYNITRIDATION authKW 80992 0% 53% 8
6 SILICON OXYNITRIDE authKW 70550 2% 12% 30
7 HOT ELECTRON HARDNESS authKW 56953 0% 100% 3
8 REOXIDIZED NITRIDED OXIDE authKW 56953 0% 100% 3
9 STORAGE DIELECTRIC authKW 56953 0% 100% 3
10 TRENCH DRAM authKW 56953 0% 100% 3

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 16559 63% 0% 1049
2 Materials Science, Coatings & Films 10128 18% 0% 299
3 Engineering, Electrical & Electronic 5713 35% 0% 588
4 Physics, Condensed Matter 1426 17% 0% 282
5 Electrochemistry 1222 8% 0% 131
6 Nanoscience & Nanotechnology 730 8% 0% 135
7 Materials Science, Multidisciplinary 235 12% 0% 197
8 Materials Science, Ceramics 120 2% 0% 34
9 Nuclear Science & Technology 64 3% 0% 43
10 Chemistry, Physical 22 6% 0% 100

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SOFTWARE ADV MAT PROC 37969 0% 100% 2
2 DIFFUS 36502 0% 38% 5
3 NON VOLATILE MEMORY PROC DEV 25311 0% 67% 2
4 LEMEAMED 24405 0% 43% 3
5 PHYS CHEM SUR E INTER E 24405 0% 43% 3
6 ADV ULSI PROC ENGN 4 18984 0% 100% 1
7 AKIRUNI TECHNOL 18984 0% 100% 1
8 AUSTIN LOG TECHNOL DEV 18984 0% 100% 1
9 CNRS LP 7251 18984 0% 100% 1
10 DFAE LCMM 18984 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 IEEE ELECTRON DEVICE LETTERS 47754 9% 2% 153
2 IEEE TRANSACTIONS ON ELECTRON DEVICES 16416 7% 1% 117
3 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 10135 8% 0% 129
4 SOLID-STATE ELECTRONICS 7224 4% 1% 62
5 APPLIED PHYSICS LETTERS 5946 11% 0% 190
6 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 5043 6% 0% 92
7 JOURNAL OF APPLIED PHYSICS 3958 9% 0% 153
8 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 3092 3% 0% 53
9 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 2867 3% 0% 47
10 MICROELECTRONICS RELIABILITY 2751 2% 0% 33

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 BORON PENETRATION 482404 2% 71% 36 Search BORON+PENETRATION Search BORON+PENETRATION
2 NITRIDED OXIDE 128321 1% 52% 13 Search NITRIDED+OXIDE Search NITRIDED+OXIDE
3 SI OXYNITRIDE 85426 0% 75% 6 Search SI+OXYNITRIDE Search SI+OXYNITRIDE
4 OXYNITRIDE 81022 3% 9% 45 Search OXYNITRIDE Search OXYNITRIDE
5 OXYNITRIDATION 80992 0% 53% 8 Search OXYNITRIDATION Search OXYNITRIDATION
6 SILICON OXYNITRIDE 70550 2% 12% 30 Search SILICON+OXYNITRIDE Search SILICON+OXYNITRIDE
7 HOT ELECTRON HARDNESS 56953 0% 100% 3 Search HOT+ELECTRON+HARDNESS Search HOT+ELECTRON+HARDNESS
8 REOXIDIZED NITRIDED OXIDE 56953 0% 100% 3 Search REOXIDIZED+NITRIDED+OXIDE Search REOXIDIZED+NITRIDED+OXIDE
9 STORAGE DIELECTRIC 56953 0% 100% 3 Search STORAGE+DIELECTRIC Search STORAGE+DIELECTRIC
10 TRENCH DRAM 56953 0% 100% 3 Search TRENCH+DRAM Search TRENCH+DRAM

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 20412 POLYOXIDE//INTER POLY DIELECTRIC IPD//INTERPOLY DIELECTRIC
2 26607 LOW TEMPERATURE SILICON OXIDATION//ANODIC PLASMA OXIDATION//DIRECTIONAL OXIDATION
3 3355 SILICON NITRIDE//SILICON OXYNITRIDE//SILICON NITRIDE FILM
4 3071 STRESS INDUCED LEAKAGE CURRENT//OXIDE RELIABILITY//OXIDE BREAKDOWN
5 4355 SI OXIDATION//SIO2 SI INTERFACE//SILICON OXIDATION
6 12310 DIRECT TUNNELING//QUANTUM MECHANICAL EFFECTS//ULTRATHIN GATE OXIDE
7 22953 POLY SIGE//SIGE OXIDE//SILICON THIN FILM SOLAR CELL PROJECT
8 33621 DEUTERIUM ANNEALING//SID4//ADSORPTION HYDROGEN PASSIVATION
9 4663 HOT CARRIERS//HOT CARRIER DEGRADATION//HOT CARRIER EFFECT
10 12845 NEGATIVE BIAS TEMPERATURE INSTABILITY NBTI//NEGATIVE BIAS TEMPERATURE INSTABILITY//NBTI

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