Class information for:
Level 2: SILICON OXYNITRIDE//BORON PENETRATION//SILICON NITRIDE

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
1116 2             SILICON OXYNITRIDE//BORON PENETRATION//SILICON NITRIDE 10021
3355 1                   SILICON NITRIDE//SILICON OXYNITRIDE//SILICON NITRIDE FILM 2036
4355 1                   SI OXIDATION//SIO2 SI INTERFACE//SILICON OXIDATION 1832
5396 1                   BORON PENETRATION//NITRIDED OXIDE//SI OXYNITRIDE 1660
9128 1                   SIEMENS PROCESS//INORGAN CHEM GRP//EPITAXIAL REACTOR 1215
15929 1                   FLOW SHAPED STEP COVERAGE//FLOWING LIKE PROFILE//LPCVD SILICON NITRIDE 710
18908 1                   CHEMICAL AFFINITY TENSOR//GUIDED MODES OF ELECTRON WAVE//FILM EDGE 554
20412 1                   POLYOXIDE//INTER POLY DIELECTRIC IPD//INTERPOLY DIELECTRIC 484
23492 1                   A SIOX IR SPECTROSCOPY//ADV GLASS RD CNT//ASTRONOMICAL TELESCOPE MIRROR 367
26088 1                   F 2 LASER//CHEMICAL WET TREATMENT//DIELECTRIC TANGENT 285
26411 1                   J AN SCI TECHNOL ORG//DISPLAY TECHNOL DEV GRP//ACOUSTIC DLTS 276
26607 1                   LOW TEMPERATURE SILICON OXIDATION//ANODIC PLASMA OXIDATION//DIRECTIONAL OXIDATION 270
29260 1                   MSOS O P STRUCTURE//SEMI INSULATING POLYCRYSTALLINE SILICON//SIPOS 207
34428 1                   AL CR FILM//CARBONIC STRUCTURES//EDS SPECTRA 125

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SILICON OXYNITRIDE authKW 109817 1% 38% 92
2 BORON PENETRATION authKW 79851 0% 71% 36
3 SILICON NITRIDE authKW 79067 3% 10% 259
4 MATERIALS SCIENCE, COATINGS & FILMS WoSSC 78776 20% 1% 2042
5 PHYSICS, APPLIED WoSSC 70689 54% 0% 5382
6 JOURNAL OF THE ELECTROCHEMICAL SOCIETY journal 67591 8% 3% 818
7 SILICON OXIDE authKW 57009 1% 12% 146
8 SILICON OXIDATION authKW 51804 0% 63% 26
9 SILICON NITRIDE FILM authKW 42188 0% 45% 30
10 SIO2 SI INTERFACE authKW 35690 0% 45% 25

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 78776 20% 1% 2042
2 Physics, Applied 70689 54% 0% 5382
3 Physics, Condensed Matter 15865 22% 0% 2223
4 Electrochemistry 8999 9% 0% 866
5 Materials Science, Multidisciplinary 8296 23% 0% 2281
6 Engineering, Electrical & Electronic 7769 18% 0% 1845
7 Materials Science, Ceramics 2478 3% 0% 347
8 Nanoscience & Nanotechnology 1863 6% 0% 569
9 Crystallography 1296 4% 0% 369
10 Physics, Multidisciplinary 466 5% 0% 491

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SYST SOLUT PLANNING 13095 0% 83% 5
2 J AN SCI TECHNOL ORG 11841 0% 54% 7
3 LEMEAMED 11223 0% 71% 5
4 INORGAN CHEM GRP 10009 0% 15% 21
5 DISPLAY TECHNOL DEV GRP 9618 0% 44% 7
6 EPUSP 9434 0% 18% 17
7 DIFFUS 8698 0% 46% 6
8 PHYS CHEM SUR E INTER E 7181 0% 57% 4
9 UPR 8001 6925 0% 28% 8
10 ABT SF 4 6286 0% 100% 2

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 67591 8% 3% 818
2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 17838 3% 2% 288
3 IEEE ELECTRON DEVICE LETTERS 16469 2% 2% 223
4 THIN SOLID FILMS 16342 4% 1% 445
5 IEEE TRANSACTIONS ON ELECTRON DEVICES 15129 3% 2% 279
6 JOURNAL OF APPLIED PHYSICS 14008 7% 1% 715
7 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 13050 4% 1% 367
8 SOLID STATE TECHNOLOGY 10668 1% 4% 80
9 SOLID-STATE ELECTRONICS 10127 2% 2% 182
10 APPLIED SURFACE SCIENCE 10056 4% 1% 351

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 SILICON OXYNITRIDE 109817 1% 38% 92 Search SILICON+OXYNITRIDE Search SILICON+OXYNITRIDE
2 BORON PENETRATION 79851 0% 71% 36 Search BORON+PENETRATION Search BORON+PENETRATION
3 SILICON NITRIDE 79067 3% 10% 259 Search SILICON+NITRIDE Search SILICON+NITRIDE
4 SILICON OXIDE 57009 1% 12% 146 Search SILICON+OXIDE Search SILICON+OXIDE
5 SILICON OXIDATION 51804 0% 63% 26 Search SILICON+OXIDATION Search SILICON+OXIDATION
6 SILICON NITRIDE FILM 42188 0% 45% 30 Search SILICON+NITRIDE+FILM Search SILICON+NITRIDE+FILM
7 SIO2 SI INTERFACE 35690 0% 45% 25 Search SIO2+SI+INTERFACE Search SIO2+SI+INTERFACE
8 SI OXIDATION 31691 0% 92% 11 Search SI+OXIDATION Search SI+OXIDATION
9 NITRIDED OXIDE 24630 0% 56% 14 Search NITRIDED+OXIDE Search NITRIDED+OXIDE
10 POLYOXIDE 23142 0% 82% 9 Search POLYOXIDE Search POLYOXIDE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 2


rank cluster_id2 link
1 3314 CLEANROOM//PHOTORESIST REMOVAL//MINIENVIRONMENT
2 197 IEEE TRANSACTIONS ON ELECTRON DEVICES//MOSFET//FLASH MEMORY
3 1628 HFO2//HIGH K DIELECTRICS//HIGH K
4 1481 TRANSIENT ENHANCED DIFFUSION//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//ION IMPLANTATION
5 893 SIGE//STRAINED SI//GERMANIUM
6 1594 POLYCRYSTALLINE SILICON//POLY SI//THIN FILM TRANSISTORS
7 1393 PLASMA POLYMERIZATION//LOW K//PLASMA PROCESSES AND POLYMERS
8 389 MICROCRYSTALLINE SILICON//JOURNAL OF NON-CRYSTALLINE SOLIDS//AMORPHOUS SILICON
9 813 POROUS SILICON//SILICON NANOCRYSTALS//SI NANOCRYSTALS
10 1061 SURFACE SCIENCE//SILICON//SCANNING TUNNELING MICROSCOPY

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