Class information for:
Level 2: TRANSIENT ENHANCED DIFFUSION//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//ION IMPLANTATION

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
1481 2             TRANSIENT ENHANCED DIFFUSION//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//ION IMPLANTATION 7893
736 1                   TRANSIENT ENHANCED DIFFUSION//SWAMP//SHALLOW JUNCTION 3144
11801 1                   IBIEC//SOLID PHASE EPITAXIAL GROWTH//LATERAL SOLID PHASE EPITAXY 981
11918 1                   ION CUT//SMART CUT//GETTERING 972
12036 1                   NEUTRON DEPTH PROFILING//RANGE PARAMETERS//LATERAL STRAGGLING 964
12852 1                   SIMOX//CONTACTLESS I V METHOD//BURIED OXIDE LAYER 907
21577 1                   SOFT ERROR MAPPING//HIGH ENERGY ION IMPLANTATION//DYNAMIC RANDOM ACCESS MEMORY 437
32025 1                   HIGH SIDE//MINIMUM ACCELERATION LENGTH//RETARDED LANGEVIN EQUATION RLE 158
32896 1                   ARBITRARY INITIAL DISTRIBUTION OF CONCENTRATION//ION BEAM HYDROGENATION//PATTERNED AND SELECTIVE AREA GROWTH 145
36556 1                   OPTICAL ANALOG SIGNAL TRANSMISSION//COOLED LEDS//GALVANICALLY ISOLATED AMPLIFIER 96
37062 1                   MATH MODELLING UKRAINIAN//THERMAL STRESSED STATE//PIDSTRYHACH PL PROBLEMS MECH MATH 89

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 TRANSIENT ENHANCED DIFFUSION authKW 241661 1% 83% 73
2 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS journal 176886 15% 4% 1191
3 ION IMPLANTATION authKW 143735 6% 8% 446
4 SHALLOW JUNCTION authKW 105312 1% 41% 65
5 SWAMP address 98712 0% 85% 29
6 ULTRA SHALLOW JUNCTION authKW 95776 1% 49% 49
7 ION CUT authKW 68094 0% 74% 23
8 SIMOX authKW 66996 1% 31% 55
9 IMETEM address 65896 1% 30% 55
10 HIGH ENERGY ION IMPLANTATION authKW 64377 0% 73% 22

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 44084 48% 0% 3803
2 Nuclear Science & Technology 34392 20% 1% 1550
3 Instruments & Instrumentation 21359 17% 0% 1335
4 Physics, Nuclear 21100 16% 0% 1226
5 Physics, Condensed Matter 13296 23% 0% 1800
6 Physics, Atomic, Molecular & Chemical 10812 15% 0% 1222
7 Materials Science, Coatings & Films 4823 6% 0% 477
8 Engineering, Electrical & Electronic 4653 16% 0% 1298
9 Materials Science, Multidisciplinary 2883 17% 0% 1304
10 Electrochemistry 733 3% 0% 257

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SWAMP 98712 0% 85% 29
2 IMETEM 65896 1% 30% 55
3 ION IMPLANTAT GRP 61571 0% 86% 18
4 MATIS 37781 1% 18% 52
5 PARAMETR CONDUCT IMPLANT 19955 0% 100% 5
6 CEMES 16358 1% 5% 76
7 NODUS ACCELERATOR 15964 0% 100% 4
8 PETRO PHYS GRP 15964 0% 100% 4
9 E ELECT 13056 0% 55% 6
10 CESIA SETTORE RETI COMUNICAZ 11973 0% 100% 3

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 176886 15% 4% 1191
2 APPLIED PHYSICS LETTERS 26156 11% 1% 870
3 JOURNAL OF APPLIED PHYSICS 24968 11% 1% 834
4 MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY 24308 3% 3% 213
5 RADIATION EFFECTS AND DEFECTS IN SOLIDS 15755 2% 3% 137
6 IEEE TRANSACTIONS ON ELECTRON DEVICES 13075 3% 1% 230
7 SOLID STATE PHENOMENA 12046 1% 4% 82
8 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 7215 3% 1% 242
9 RADIATION EFFECTS LETTERS 6485 0% 9% 19
10 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 5054 3% 1% 205

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 TRANSIENT ENHANCED DIFFUSION 241661 1% 83% 73 Search TRANSIENT+ENHANCED+DIFFUSION Search TRANSIENT+ENHANCED+DIFFUSION
2 ION IMPLANTATION 143735 6% 8% 446 Search ION+IMPLANTATION Search ION+IMPLANTATION
3 SHALLOW JUNCTION 105312 1% 41% 65 Search SHALLOW+JUNCTION Search SHALLOW+JUNCTION
4 ULTRA SHALLOW JUNCTION 95776 1% 49% 49 Search ULTRA+SHALLOW+JUNCTION Search ULTRA+SHALLOW+JUNCTION
5 ION CUT 68094 0% 74% 23 Search ION+CUT Search ION+CUT
6 SIMOX 66996 1% 31% 55 Search SIMOX Search SIMOX
7 HIGH ENERGY ION IMPLANTATION 64377 0% 73% 22 Search HIGH+ENERGY+ION+IMPLANTATION Search HIGH+ENERGY+ION+IMPLANTATION
8 SMART CUT 63964 0% 70% 23 Search SMART+CUT Search SMART+CUT
9 SILICON 57469 7% 3% 518 Search SILICON Search SILICON
10 GETTERING 55527 1% 23% 61 Search GETTERING Search GETTERING

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 2


rank cluster_id2 link
1 1185 OXYGEN PRECIPITATION//CZOCHRALSKI SILICON//THERMAL DONORS
2 1594 POLYCRYSTALLINE SILICON//POLY SI//THIN FILM TRANSISTORS
3 893 SIGE//STRAINED SI//GERMANIUM
4 3171 WAFER BONDING//ANODIC BONDING//DIRECT BONDING
5 3133 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//ION PHOTON EMISSION//SPUTTERING
6 1116 SILICON OXYNITRIDE//BORON PENETRATION//SILICON NITRIDE
7 1498 PLASMA IMMERSION ION IMPLANTATION//PLASMA BASED ION IMPLANTATION//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
8 1733 HETEROJUNCTION BIPOLAR TRANSISTORS//SIGEHBT//HBT
9 3509 ELECTRON BEAM ANNEALING//ION SPUTTERING//NANORIPPLES
10 2162 POSITRON ANNIHILATION//POSITRONIUM//FREE VOLUME

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