Class information for:
Level 1: ION CUT//SMART CUT//GETTERING

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
1481 2             TRANSIENT ENHANCED DIFFUSION//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//ION IMPLANTATION 7893
11918 1                   ION CUT//SMART CUT//GETTERING 972

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ION CUT authKW 553274 2% 74% 23
2 SMART CUT authKW 433276 2% 64% 21
3 GETTERING authKW 367254 6% 21% 55
4 HYDROGEN IMPLANTATION authKW 280202 2% 39% 22
5 HELIUM IMPLANTATION authKW 130250 2% 27% 15
6 HE AND H ION IMPLANTATION authKW 129693 0% 100% 4
7 SI HE authKW 129693 0% 100% 4
8 SMART CUT TECHNOLOGY authKW 129693 0% 100% 4
9 SURFACE BLISTERING authKW 129689 1% 67% 6
10 SMART CUT TM authKW 103753 0% 80% 4

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 6660 53% 0% 515
2 Nuclear Science & Technology 4103 19% 0% 188
3 Physics, Nuclear 3502 18% 0% 174
4 Instruments & Instrumentation 3185 19% 0% 180
5 Physics, Condensed Matter 2010 25% 0% 243
6 Physics, Atomic, Molecular & Chemical 1784 18% 0% 172
7 Materials Science, Multidisciplinary 1050 25% 0% 247
8 Materials Science, Coatings & Films 346 5% 0% 46
9 Engineering, Electrical & Electronic 163 10% 0% 99
10 Nanoscience & Nanotechnology 78 4% 0% 40

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 UMR6630 79571 1% 27% 9
2 GRP NMAT 74107 0% 57% 4
3 ION BEAM PL GRP 64846 0% 100% 2
4 ANALOG MIXED SIGNAL TECHNOL 57637 0% 44% 4
5 CERI 49811 2% 9% 17
6 DEVICE PERFORMANCE 43230 0% 67% 2
7 LTFC 43230 0% 67% 2
8 FAK MIPA 41678 1% 21% 6
9 LMP 35101 1% 8% 13
10 AEROSP MECH MECH ENGN AMME J07 32423 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SOLID STATE PHENOMENA 32479 5% 2% 47
2 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 29318 17% 1% 170
3 APPLIED PHYSICS LETTERS 5104 14% 0% 134
4 JOURNAL OF APPLIED PHYSICS 3476 11% 0% 109
5 MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY 3173 3% 0% 27
6 ELECTROCHEMICAL AND SOLID STATE LETTERS 899 1% 0% 11
7 VACUUM 825 2% 0% 16
8 JOURNAL OF ELECTRONIC MATERIALS 780 2% 0% 16
9 SEMICONDUCTORS 651 1% 0% 12
10 MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 573 1% 0% 8

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 ION CUT 553274 2% 74% 23 Search ION+CUT Search ION+CUT
2 SMART CUT 433276 2% 64% 21 Search SMART+CUT Search SMART+CUT
3 GETTERING 367254 6% 21% 55 Search GETTERING Search GETTERING
4 HYDROGEN IMPLANTATION 280202 2% 39% 22 Search HYDROGEN+IMPLANTATION Search HYDROGEN+IMPLANTATION
5 HELIUM IMPLANTATION 130250 2% 27% 15 Search HELIUM+IMPLANTATION Search HELIUM+IMPLANTATION
6 HE AND H ION IMPLANTATION 129693 0% 100% 4 Search HE+AND+H+ION+IMPLANTATION Search HE+AND+H+ION+IMPLANTATION
7 SI HE 129693 0% 100% 4 Search SI+HE Search SI+HE
8 SMART CUT TECHNOLOGY 129693 0% 100% 4 Search SMART+CUT+TECHNOLOGY Search SMART+CUT+TECHNOLOGY
9 SURFACE BLISTERING 129689 1% 67% 6 Search SURFACE+BLISTERING Search SURFACE+BLISTERING
10 SMART CUT TM 103753 0% 80% 4 Search SMART+CUT+TM Search SMART+CUT+TM

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 5197 MULTIVACANCY//HYDROGEN IN SILICON//HYDROGEN ATOM TREATMENT
2 12852 SIMOX//CONTACTLESS I V METHOD//BURIED OXIDE LAYER
3 4923 WAFER BONDING//ANODIC BONDING//DIRECT BONDING
4 736 TRANSIENT ENHANCED DIFFUSION//SWAMP//SHALLOW JUNCTION
5 3643 GETTERING//DLTS//SI AU
6 22057 POST ETCHING TREATMENTS//111 SPLIT INTERSTITIAL//AL1 WT PERCENT SI
7 36556 OPTICAL ANALOG SIGNAL TRANSMISSION//COOLED LEDS//GALVANICALLY ISOLATED AMPLIFIER
8 11801 IBIEC//SOLID PHASE EPITAXIAL GROWTH//LATERAL SOLID PHASE EPITAXY
9 37616 LOW ENERGY MASS SELECTED IBD//OBERFLACHENMODIFIZIERUNG EV//PROMETEI CENT
10 5565 JOURNAL OF NUCLEAR MATERIALS//HELIUM BUBBLE//HE BUBBLES

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