Class information for:
Level 1: POST ETCHING TREATMENTS//111 SPLIT INTERSTITIAL//AL1 WT PERCENT SI

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
15 4 METALLURGY & METALLURGICAL ENGINEERING//MATERIALS SCIENCE, MULTIDISCIPLINARY//MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING 827627
419 3       PLASMA SOURCES SCIENCE & TECHNOLOGY//REVIEW OF SCIENTIFIC INSTRUMENTS//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 30297
1480 2             PLASMA ETCHING//ELECT DEVICES MAT TECHNOL//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 7897
22057 1                   POST ETCHING TREATMENTS//111 SPLIT INTERSTITIAL//AL1 WT PERCENT SI 418

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 POST ETCHING TREATMENTS authKW 150796 0% 100% 2
2 111 SPLIT INTERSTITIAL authKW 75398 0% 100% 1
3 AL1 WT PERCENT SI authKW 75398 0% 100% 1
4 B DEACTIVATION authKW 75398 0% 100% 1
5 C AND O RELATED DEFECTS authKW 75398 0% 100% 1
6 CARBON CPDS CONTAINING HETEROATOM address 75398 0% 100% 1
7 CDE WITH NF3 GAS authKW 75398 0% 100% 1
8 CIRCUIT TECHNOL DEV address 75398 0% 100% 1
9 CURRENT TRANSPORT IN METAL SEMICONDUCTOR INTERFACE authKW 75398 0% 100% 1
10 DONOR LIKE DEFECTS authKW 75398 0% 100% 1

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 3710 60% 0% 250
2 Materials Science, Coatings & Films 3194 20% 0% 84
3 Physics, Condensed Matter 749 23% 0% 98
4 Electrochemistry 662 11% 0% 47
5 Engineering, Electrical & Electronic 433 21% 0% 87
6 Nanoscience & Nanotechnology 197 8% 0% 35
7 Materials Science, Multidisciplinary 114 15% 0% 62
8 Nuclear Science & Technology 40 4% 0% 15
9 Instruments & Instrumentation 16 3% 0% 12
10 Physics, Nuclear 9 2% 0% 9

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 CARBON CPDS CONTAINING HETEROATOM 75398 0% 100% 1
2 CIRCUIT TECHNOL DEV 75398 0% 100% 1
3 INNOVAT MAT DEV ISOHARA PLANT 75398 0% 100% 1
4 INTERDISCIPLINARY MAT PROGRAM 75398 0% 100% 1
5 JUNGWON GU 75398 0% 100% 1
6 SEMICONDUCTOR MFG EQUIPMENT 75398 0% 100% 1
7 ELE MAT DEVICES 37698 0% 50% 1
8 SEMICONDUCTOR BUSINESS UNIT 37698 0% 50% 1
9 SEMICONDUCTOR TECHNOL DEV GRP 37698 0% 50% 1
10 NANO DEVICE ELE 25131 0% 33% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 5385 11% 0% 47
2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 4283 7% 0% 31
3 JOURNAL OF APPLIED PHYSICS 2234 14% 0% 57
4 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 2089 5% 0% 20
5 PHYSICS OF METALS 1729 0% 1% 2
6 SOLID-STATE ELECTRONICS 1257 3% 0% 13
7 SOLID STATE PHENOMENA 1222 1% 0% 6
8 MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY 1009 2% 0% 10
9 SOLID STATE TECHNOLOGY 1004 1% 0% 5
10 IEEE ELECTRON DEVICE LETTERS 795 2% 0% 10

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 POST ETCHING TREATMENTS 150796 0% 100% 2 Search POST+ETCHING+TREATMENTS Search POST+ETCHING+TREATMENTS
2 111 SPLIT INTERSTITIAL 75398 0% 100% 1 Search 111+SPLIT+INTERSTITIAL Search 111+SPLIT+INTERSTITIAL
3 AL1 WT PERCENT SI 75398 0% 100% 1 Search AL1+WT+PERCENT+SI Search AL1+WT+PERCENT+SI
4 B DEACTIVATION 75398 0% 100% 1 Search B+DEACTIVATION Search B+DEACTIVATION
5 C AND O RELATED DEFECTS 75398 0% 100% 1 Search C+AND+O+RELATED+DEFECTS Search C+AND+O+RELATED+DEFECTS
6 CDE WITH NF3 GAS 75398 0% 100% 1 Search CDE+WITH+NF3+GAS Search CDE+WITH+NF3+GAS
7 CURRENT TRANSPORT IN METAL SEMICONDUCTOR INTERFACE 75398 0% 100% 1 Search CURRENT+TRANSPORT+IN+METAL+SEMICONDUCTOR+INTERFACE Search CURRENT+TRANSPORT+IN+METAL+SEMICONDUCTOR+INTERFACE
8 DONOR LIKE DEFECTS 75398 0% 100% 1 Search DONOR+LIKE+DEFECTS Search DONOR+LIKE+DEFECTS
9 ELECTRON IMPACT IONIZATION CELL 75398 0% 100% 1 Search ELECTRON+IMPACT+IONIZATION+CELL Search ELECTRON+IMPACT+IONIZATION+CELL
10 ETCH PLASMA 75398 0% 100% 1 Search ETCH+PLASMA Search ETCH+PLASMA

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 17105 ATOMIC LAYER ETCHING//GATE CHARGING//NEUTRAL BEAM ETCHING
2 5197 MULTIVACANCY//HYDROGEN IN SILICON//HYDROGEN ATOM TREATMENT
3 7198 SOLID STATE TECHNOLOGY//AFTER CORROSION//AL SI CU ETCHING
4 1654 SIO2 ETCHING//PLASMA ETCHING//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
5 6201 FUJIMI KU//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//DRY ETCHING
6 30846 CROSS KELVIN RESISTOR CKR//CROSS BRIDGE KELVIN RESISTOR CBKR//POLYMETAL GATE
7 9860 LIFETIME CONTROL//SOVIET PHYSICS SEMICONDUCTORS-USSR//DLTS
8 26607 LOW TEMPERATURE SILICON OXIDATION//ANODIC PLASMA OXIDATION//DIRECTIONAL OXIDATION
9 9401 SELECTIVE EPITAXIAL GROWTH//ELEVATED SOURCE DRAIN//GERMANIUM SILICON COMPOUNDS
10 11918 ION CUT//SMART CUT//GETTERING

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