Class information for:
Level 1: SELECTIVE EPITAXIAL GROWTH//ELEVATED SOURCE DRAIN//GERMANIUM SILICON COMPOUNDS

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
893 2             SIGE//STRAINED SI//GERMANIUM 11547
9401 1                   SELECTIVE EPITAXIAL GROWTH//ELEVATED SOURCE DRAIN//GERMANIUM SILICON COMPOUNDS 1191

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SELECTIVE EPITAXIAL GROWTH authKW 268078 2% 35% 29
2 ELEVATED SOURCE DRAIN authKW 190509 1% 60% 12
3 GERMANIUM SILICON COMPOUNDS authKW 136083 1% 86% 6
4 RPCVD authKW 132294 1% 50% 10
5 REDUCED PRESSURE CHEMICAL VAPOUR authKW 105843 0% 100% 4
6 PATTERN DEPENDENCY authKW 84673 0% 80% 4
7 SIGE HYDRIDES VAPOR PHASE EPITAXY authKW 79383 0% 100% 3
8 SIGE SELECTIVE EPITAXY authKW 79383 0% 100% 3
9 SELECTIVE EPITAXY authKW 63197 2% 9% 27
10 UHV CVD authKW 60463 1% 19% 12

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 13479 24% 0% 290
2 Physics, Applied 11960 63% 0% 755
3 Electrochemistry 2643 13% 0% 157
4 Engineering, Electrical & Electronic 1917 25% 0% 300
5 Crystallography 1890 11% 0% 133
6 Physics, Condensed Matter 1590 21% 0% 245
7 Materials Science, Multidisciplinary 1342 26% 0% 308
8 Nanoscience & Nanotechnology 314 7% 0% 78
9 COMPUTER APPLICATIONS & CYBERNETICS 8 0% 0% 1
10 Physics, Multidisciplinary 7 3% 0% 35

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MUSASHINO OFF 56027 1% 35% 6
2 INTEGRATED DEVICES CIRCUITS 28754 0% 22% 5
3 ADV ENGN STUDY 26461 0% 100% 1
4 ADV PROC TEAM 3 26461 0% 100% 1
5 ASM BELGIUM 26461 0% 100% 1
6 CVD DIFFUS 850 26461 0% 100% 1
7 D2NT DPTSGRE 26461 0% 100% 1
8 D2NTDPTSGRE 26461 0% 100% 1
9 DELFT MICROSYST SUBMICROTECHNOL DIMES 26461 0% 100% 1
10 DEP ELE ENG 26461 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 20871 13% 1% 156
2 JOURNAL OF CRYSTAL GROWTH 6861 8% 0% 91
3 SOLID STATE TECHNOLOGY 6236 2% 1% 21
4 CRYSTAL RESEARCH AND TECHNOLOGY 4603 3% 1% 34
5 THIN SOLID FILMS 3967 6% 0% 75
6 APPLIED PHYSICS LETTERS 3567 10% 0% 125
7 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 3411 4% 0% 47
8 IEEE ELECTRON DEVICE LETTERS 2866 3% 0% 32
9 IEEE TRANSACTIONS ON ELECTRON DEVICES 2768 3% 0% 41
10 JOURNAL OF ELECTRONIC MATERIALS 2586 3% 0% 32

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 SELECTIVE EPITAXIAL GROWTH 268078 2% 35% 29 Search SELECTIVE+EPITAXIAL+GROWTH Search SELECTIVE+EPITAXIAL+GROWTH
2 ELEVATED SOURCE DRAIN 190509 1% 60% 12 Search ELEVATED+SOURCE+DRAIN Search ELEVATED+SOURCE+DRAIN
3 GERMANIUM SILICON COMPOUNDS 136083 1% 86% 6 Search GERMANIUM+SILICON+COMPOUNDS Search GERMANIUM+SILICON+COMPOUNDS
4 RPCVD 132294 1% 50% 10 Search RPCVD Search RPCVD
5 REDUCED PRESSURE CHEMICAL VAPOUR 105843 0% 100% 4 Search REDUCED+PRESSURE+CHEMICAL+VAPOUR Search REDUCED+PRESSURE+CHEMICAL+VAPOUR
6 PATTERN DEPENDENCY 84673 0% 80% 4 Search PATTERN+DEPENDENCY Search PATTERN+DEPENDENCY
7 SIGE HYDRIDES VAPOR PHASE EPITAXY 79383 0% 100% 3 Search SIGE+HYDRIDES+VAPOR+PHASE+EPITAXY Search SIGE+HYDRIDES+VAPOR+PHASE+EPITAXY
8 SIGE SELECTIVE EPITAXY 79383 0% 100% 3 Search SIGE+SELECTIVE+EPITAXY Search SIGE+SELECTIVE+EPITAXY
9 SELECTIVE EPITAXY 63197 2% 9% 27 Search SELECTIVE+EPITAXY Search SELECTIVE+EPITAXY
10 UHV CVD 60463 1% 19% 12 Search UHV+CVD Search UHV+CVD

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 7513 ATOMIC LAYER DOPING//HYDROGEN SURFACTANT//ELECT INTELLIGENT SYST
2 15669 SURFACES OF CRYSTALS//B SURFACE PHASE BSP//INDIRECT GAP ALGAAS EPILAYERS
3 9128 SIEMENS PROCESS//INORGAN CHEM GRP//EPITAXIAL REACTOR
4 38229 SI O SUPERLATTICE//OXYGEN ATOMIC LAYER//SIX TRANSISTOR 6T STATIC RAM SRAM
5 32025 HIGH SIDE//MINIMUM ACCELERATION LENGTH//RETARDED LANGEVIN EQUATION RLE
6 14400 SIGEC//SI1 YCY//SI1 X YGEXCY
7 7741 HYDROGEN TERMINATION//NATIVE OXIDE//SHIZUOKA TORY
8 7126 STRAINED SI1 XGEX SI QUANTUM WELLS//SI GE INTERFACE//DIFFRACTOMETER OPTIMISATION
9 22057 POST ETCHING TREATMENTS//111 SPLIT INTERSTITIAL//AL1 WT PERCENT SI
10 7746 SIGEHBT//A AMA MICROELECT SCI TECHNOL//BIPOLAR TRANSISTORS

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