Class information for:
Level 1: HYDROGEN TERMINATION//NATIVE OXIDE//SHIZUOKA TORY

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
13 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 136516
3314 2             CLEANROOM//PHOTORESIST REMOVAL//MINIENVIRONMENT 1952
7741 1                   HYDROGEN TERMINATION//NATIVE OXIDE//SHIZUOKA TORY 1357

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 HYDROGEN TERMINATION authKW 161085 2% 25% 28
2 NATIVE OXIDE authKW 142271 2% 26% 24
3 SHIZUOKA TORY address 139342 0% 100% 6
4 ECR PLASMA SPUTTERING authKW 99080 1% 53% 8
5 H TERMINATION authKW 96885 1% 38% 11
6 HYDRIDE SPECIES authKW 92895 0% 100% 4
7 NATIVE OXIDE GROWTH authKW 92895 0% 100% 4
8 WET CLEANING authKW 85732 1% 31% 12
9 NATIVE OXIDATION authKW 82939 0% 71% 5
10 H TERMINATED SI SURFACE authKW 75999 0% 55% 6

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 18710 27% 0% 364
2 Physics, Applied 8432 51% 0% 687
3 Electrochemistry 5243 17% 0% 233
4 Physics, Condensed Matter 3083 26% 0% 354
5 Chemistry, Physical 828 19% 0% 257
6 Materials Science, Multidisciplinary 471 16% 0% 220
7 Engineering, Electrical & Electronic 364 12% 0% 164
8 Nanoscience & Nanotechnology 321 6% 0% 85
9 Physics, Atomic, Molecular & Chemical 48 4% 0% 50
10 Engineering, Manufacturing 30 1% 0% 15

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SHIZUOKA TORY 139342 0% 100% 6
2 NINAMI KU 74314 0% 80% 4
3 ABT SILIZIUMPHOTOVOLTAIK 52252 0% 75% 3
4 KDG 46447 0% 100% 2
5 ADV MEMORY DEV 36341 0% 26% 6
6 NEW IND CREAT HATCHERY CENTER 30964 0% 67% 2
7 NEW IND CREAT HATCHERY 29533 3% 3% 39
8 ABT POTOVOLTAIK 23224 0% 100% 1
9 ADV CHEM LTD 23224 0% 100% 1
10 BIMAYAM BIYOMED 23224 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SOLID STATE PHENOMENA 33010 4% 3% 56
2 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 30462 15% 1% 201
3 MICRO 10671 1% 5% 9
4 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 8434 8% 0% 107
5 SOLID STATE TECHNOLOGY 5468 2% 1% 21
6 APPLIED SURFACE SCIENCE 4703 6% 0% 87
7 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 3838 4% 0% 49
8 MICROCONTAMINATION 3712 0% 8% 2
9 IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 3240 1% 1% 15
10 JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 2711 3% 0% 38

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 HYDROGEN TERMINATION 161085 2% 25% 28 Search HYDROGEN+TERMINATION Search HYDROGEN+TERMINATION
2 NATIVE OXIDE 142271 2% 26% 24 Search NATIVE+OXIDE Search NATIVE+OXIDE
3 ECR PLASMA SPUTTERING 99080 1% 53% 8 Search ECR+PLASMA+SPUTTERING Search ECR+PLASMA+SPUTTERING
4 H TERMINATION 96885 1% 38% 11 Search H+TERMINATION Search H+TERMINATION
5 HYDRIDE SPECIES 92895 0% 100% 4 Search HYDRIDE+SPECIES Search HYDRIDE+SPECIES
6 NATIVE OXIDE GROWTH 92895 0% 100% 4 Search NATIVE+OXIDE+GROWTH Search NATIVE+OXIDE+GROWTH
7 WET CLEANING 85732 1% 31% 12 Search WET+CLEANING Search WET+CLEANING
8 NATIVE OXIDATION 82939 0% 71% 5 Search NATIVE+OXIDATION Search NATIVE+OXIDATION
9 H TERMINATED SI SURFACE 75999 0% 55% 6 Search H+TERMINATED+SI+SURFACE Search H+TERMINATED+SI+SURFACE
10 RCA CLEANING 74314 0% 80% 4 Search RCA+CLEANING Search RCA+CLEANING

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 27147 PHOTORESIST REMOVAL//WET OZONE//RESIST REMOVAL
2 12268 MACROPOROUS SILICON//SILICON ELECTROCHEMISTRY//CURRENT BURST MODEL
3 4355 SI OXIDATION//SIO2 SI INTERFACE//SILICON OXIDATION
4 24318 CLEANROOM//MINIENVIRONMENT//AIRBORNE MOLECULAR CONTAMINATION
5 9566 ORGANIC MONOLAYER//NOYES 210//HYDROGEN TERMINATED SILICON
6 33621 DEUTERIUM ANNEALING//SID4//ADSORPTION HYDROGEN PASSIVATION
7 7513 ATOMIC LAYER DOPING//HYDROGEN SURFACTANT//ELECT INTELLIGENT SYST
8 12235 ANISOTROPIC ETCHING//MICRONANOSYST ENGN//MEMS MICRO NANO SYST
9 26411 J AN SCI TECHNOL ORG//DISPLAY TECHNOL DEV GRP//ACOUSTIC DLTS
10 9401 SELECTIVE EPITAXIAL GROWTH//ELEVATED SOURCE DRAIN//GERMANIUM SILICON COMPOUNDS

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