Class information for: |
Basic class information |
Hierarchy of classes |
The table includes all classes above and classes immediately below the current class. |
| Cluster id | Level | Cluster label | #P |
|---|---|---|---|
| 1 | 4 | PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY | 2188495 |
| 13 | 3 | PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON | 136516 |
| 3314 | 2 | CLEANROOM//PHOTORESIST REMOVAL//MINIENVIRONMENT | 1952 |
| 24318 | 1 | CLEANROOM//MINIENVIRONMENT//AIRBORNE MOLECULAR CONTAMINATION | 339 |
Terms with highest relevance score |
| rank | Category | termType | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|---|
| 1 | CLEANROOM | authKW | 1733651 | 15% | 36% | 52 |
| 2 | MINIENVIRONMENT | authKW | 937439 | 3% | 92% | 11 |
| 3 | AIRBORNE MOLECULAR CONTAMINATION | authKW | 684589 | 3% | 82% | 9 |
| 4 | ORGANIC CONTAMINATION | authKW | 546629 | 6% | 28% | 21 |
| 5 | AIRBORNE MOLECULAR CONTAMINANTS AMCS | authKW | 464847 | 1% | 100% | 5 |
| 6 | FRONT OPENING UNIFIED POD FOUP | authKW | 464847 | 1% | 100% | 5 |
| 7 | AIRBORNE MOLECULAR CONTAMINATION AMC | authKW | 297500 | 1% | 80% | 4 |
| 8 | AIRBORNE MOLECULAR CONTAMINANT AMC | authKW | 278908 | 1% | 100% | 3 |
| 9 | FAN FILTER UNIT | authKW | 278908 | 1% | 100% | 3 |
| 10 | FAN FILTER UNIT FFU | authKW | 278908 | 1% | 100% | 3 |
Web of Science journal categories |
| chi_square_rank | Category | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | Construction & Building Technology | 2463 | 15% | 0% | 50 |
| 2 | Physics, Applied | 1333 | 41% | 0% | 139 |
| 3 | Materials Science, Coatings & Films | 953 | 12% | 0% | 42 |
| 4 | Engineering, Environmental | 576 | 11% | 0% | 37 |
| 5 | Engineering, Manufacturing | 568 | 7% | 0% | 25 |
| 6 | Physics, Condensed Matter | 550 | 22% | 0% | 76 |
| 7 | Engineering, Civil | 448 | 11% | 0% | 36 |
| 8 | Engineering, Electrical & Electronic | 380 | 22% | 0% | 73 |
| 9 | Electrochemistry | 321 | 9% | 0% | 30 |
| 10 | Thermodynamics | 221 | 7% | 0% | 24 |
Address terms |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | CONTAMINAT QUAL ENGN MFG TECHNOL | 185939 | 1% | 100% | 2 |
| 2 | AIR CONDITIONING REFRIGERAT ENGN | 179284 | 3% | 21% | 9 |
| 3 | ENERGY REFRIGERATING AIR CONDITIONING ENGN | 148121 | 6% | 8% | 20 |
| 4 | ADVANCE SCI MATTER | 92969 | 0% | 100% | 1 |
| 5 | BUILT ENVIRONM VRT 6 29 | 92969 | 0% | 100% | 1 |
| 6 | BUR ETUD RECH MECAN FLUIDES HOTEL TECHNOL | 92969 | 0% | 100% | 1 |
| 7 | CHAIR COMP AIDED ARCHITECTURAL DESIGN CAAD | 92969 | 0% | 100% | 1 |
| 8 | CHIBA S | 92969 | 0% | 100% | 1 |
| 9 | CORP CONTAMINAT CONTROL GRP | 92969 | 0% | 100% | 1 |
| 10 | DTSCEA GRE 17 | 92969 | 0% | 100% | 1 |
Journals |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | JOURNAL OF THE IEST | 66398 | 1% | 14% | 5 |
| 2 | MICRO | 42770 | 3% | 5% | 9 |
| 3 | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 23232 | 6% | 1% | 20 |
| 4 | SOLID STATE TECHNOLOGY | 22013 | 6% | 1% | 21 |
| 5 | MICROCONTAMINATION | 14871 | 1% | 8% | 2 |
| 6 | ASHRAE JOURNAL-AMERICAN SOCIETY OF HEATING REFRIGERATING AND AIR-CONDITIONING ENGINEERS | 11257 | 2% | 2% | 6 |
| 7 | BUILDING AND ENVIRONMENT | 9401 | 7% | 0% | 23 |
| 8 | JOURNAL OF THE IES | 7148 | 1% | 4% | 2 |
| 9 | SOLID STATE PHENOMENA | 5094 | 3% | 1% | 11 |
| 10 | AEROSOL AND AIR QUALITY RESEARCH | 4174 | 2% | 1% | 8 |
Author Key Words |
Core articles |
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c: (1) Number of references referring to publications in the class. (2) Share of total number of active references referring to publications in the class. (3) Age of the article. New articles get higher score than old articles. (4) Citation rate, normalized to year. |
Classes with closest relation at Level 1 |