Class information for:
Level 1: ANISOTROPIC ETCHING//MICRONANOSYST ENGN//MEMS MICRO NANO SYST

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
390 3       SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS 32897
276 2             JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS//SENSORS AND ACTUATORS A-PHYSICAL 19184
12235 1                   ANISOTROPIC ETCHING//MICRONANOSYST ENGN//MEMS MICRO NANO SYST 951

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ANISOTROPIC ETCHING authKW 1116892 9% 38% 89
2 MICRONANOSYST ENGN address 318131 1% 80% 12
3 MEMS MICRO NANO SYST address 308446 1% 85% 11
4 TMAH authKW 234290 3% 21% 33
5 ELECTROCHEMICAL ETCH STOP authKW 223685 1% 75% 9
6 MICRO NANOSYST ENGN address 192805 1% 73% 8
7 SILICON ANISOTROPIC ETCHING authKW 176737 1% 67% 8
8 ETCHING SIMULATION authKW 170428 1% 86% 6
9 CONVEX CORNER authKW 162378 1% 70% 7
10 CORNER COMPENSATION authKW 138078 1% 83% 5

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Instruments & Instrumentation 18847 44% 0% 420
2 Engineering, Electrical & Electronic 8022 54% 0% 511
3 Nanoscience & Nanotechnology 6229 28% 0% 268
4 Physics, Applied 3118 38% 0% 359
5 Materials Science, Multidisciplinary 1720 32% 0% 301
6 Materials Science, Coatings & Films 1703 10% 0% 95
7 Electrochemistry 1508 11% 0% 107
8 Mechanics 1418 14% 0% 135
9 Optics 46 4% 0% 42
10 Engineering, Manufacturing 44 1% 0% 14

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MICRONANOSYST ENGN 318131 1% 80% 12
2 MEMS MICRO NANO SYST 308446 1% 85% 11
3 MICRO NANOSYST ENGN 192805 1% 73% 8
4 MICRONANO MED DEVICES 106044 0% 80% 4
5 RIM SOLID STATE CHEM 69117 1% 19% 11
6 INTRUMENTAC IMAGEN MOL 66278 0% 100% 2
7 JIANGING SECT 66278 0% 100% 2
8 MEMS MICRONANO SYST 66278 0% 100% 2
9 YONSEI MICROSYST 66278 0% 100% 2
10 INTEGRAT SENSORS ACTUATORS 66274 0% 50% 4

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 102999 14% 2% 133
2 SENSORS AND ACTUATORS A-PHYSICAL 102845 19% 2% 177
3 SENSORS AND MATERIALS 34292 4% 3% 34
4 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 13783 4% 1% 34
5 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 9044 3% 1% 32
6 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 5664 8% 0% 73
7 SENSORS AND ACTUATORS 2439 1% 1% 7
8 MICROELECTRONICS JOURNAL 1403 1% 0% 13
9 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 1174 1% 1% 6
10 CANADIAN JOURNAL OF ELECTRICAL AND COMPUTER ENGINEERING-REVUE CANADIENNE DE GENIE ELECTRIQUE ET INFORMATIQUE 1020 0% 1% 4

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 ANISOTROPIC ETCHING 1116892 9% 38% 89 Search ANISOTROPIC+ETCHING Search ANISOTROPIC+ETCHING
2 TMAH 234290 3% 21% 33 Search TMAH Search TMAH
3 ELECTROCHEMICAL ETCH STOP 223685 1% 75% 9 Search ELECTROCHEMICAL+ETCH+STOP Search ELECTROCHEMICAL+ETCH+STOP
4 SILICON ANISOTROPIC ETCHING 176737 1% 67% 8 Search SILICON+ANISOTROPIC+ETCHING Search SILICON+ANISOTROPIC+ETCHING
5 ETCHING SIMULATION 170428 1% 86% 6 Search ETCHING+SIMULATION Search ETCHING+SIMULATION
6 CONVEX CORNER 162378 1% 70% 7 Search CONVEX+CORNER Search CONVEX+CORNER
7 CORNER COMPENSATION 138078 1% 83% 5 Search CORNER+COMPENSATION Search CORNER+COMPENSATION
8 ANISOTROPIC ETCHING OF SILICON 118351 1% 71% 5 Search ANISOTROPIC+ETCHING+OF+SILICON Search ANISOTROPIC+ETCHING+OF+SILICON
9 ANISOTROPIC WET CHEMICAL ETCHING 118351 1% 71% 5 Search ANISOTROPIC+WET+CHEMICAL+ETCHING Search ANISOTROPIC+WET+CHEMICAL+ETCHING
10 TETRAMETHYLAMMONIUM HYDROXIDE TMAH 106028 1% 27% 12 Search TETRAMETHYLAMMONIUM+HYDROXIDE+TMAH Search TETRAMETHYLAMMONIUM+HYDROXIDE+TMAH

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 9903 PRESSURE SENSOR//PIEZORESISTANCE//CAPACITIVE PRESSURE SENSOR
2 12268 MACROPOROUS SILICON//SILICON ELECTROCHEMISTRY//CURRENT BURST MODEL
3 7741 HYDROGEN TERMINATION//NATIVE OXIDE//SHIZUOKA TORY
4 28194 DYNAMIC CHEMICAL POLISHING//ACOUSTIC DROPLET EJECTOR//AL AL2O3 NANO PARTICLE
5 4711 MEMS GYROSCOPE//GYROSCOPE//ANGULAR RATE SENSOR
6 26014 STENCIL LITHOGRAPHY//STRESS INDUCED DEFORMATION//RESIST SPRAY COATING
7 22863 RESONANT PRESSURE SENSOR//PHOTOTHERMAL VIBRATION//SMALL MOTOR
8 3694 MICROMIRROR//JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//VARIABLE OPTICAL ATTENUATOR VOA
9 5443 BULGE TEST//STRIP BENDING TEST//SINGLE CRYSTAL SILICON
10 1368 LIGHT TRAPPING//ANTIREFLECTION//TEXTURIZATION

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