Class information for:
Level 1: DYNAMIC CHEMICAL POLISHING//ACOUSTIC DROPLET EJECTOR//AL AL2O3 NANO PARTICLE

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
15 4 METALLURGY & METALLURGICAL ENGINEERING//MATERIALS SCIENCE, MULTIDISCIPLINARY//MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING 827627
472 3       ENGINEERING, MANUFACTURING//INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE//CUTTING FORCE 25360
3452 2             ELECTROCHEMICAL MACHINING//TOY GAME DESIGN//ELECTROCHEMICAL MICROMACHINING 1629
28194 1                   DYNAMIC CHEMICAL POLISHING//ACOUSTIC DROPLET EJECTOR//AL AL2O3 NANO PARTICLE 231

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 DYNAMIC CHEMICAL POLISHING authKW 181914 1% 67% 2
2 ACOUSTIC DROPLET EJECTOR authKW 136436 0% 100% 1
3 AL AL2O3 NANO PARTICLE authKW 136436 0% 100% 1
4 DIFFUSION AND KINETICALLY CONTROLLED ETCHING WET ETCHING authKW 136436 0% 100% 1
5 ELECTRIC ARC ION DEPOSITION authKW 136436 0% 100% 1
6 ENCLOSED MICROCHANNELS AND RESERVOIRS authKW 136436 0% 100% 1
7 EPITAXIAL MASK authKW 136436 0% 100% 1
8 EPOXY WICKING authKW 136436 0% 100% 1
9 ETCH SHAPE CONTROL authKW 136436 0% 100% 1
10 ETCHED LASER MIRRORS authKW 136436 0% 100% 1

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 2140 22% 0% 51
2 Electrochemistry 1326 21% 0% 48
3 Physics, Applied 626 35% 0% 80
4 Engineering, Electrical & Electronic 275 22% 0% 51
5 Mechanics 89 8% 0% 18
6 Materials Science, Multidisciplinary 62 15% 0% 34
7 Thermodynamics 50 4% 0% 10
8 Optics 40 7% 0% 16
9 Engineering, General 34 3% 0% 8
10 Mathematics, Interdisciplinary Applications 20 3% 0% 6

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 NANOTECHNOL NANOSYST CNRS UMI LN2 3463 68217 0% 50% 1
2 PROC TECHNOL SOLUT 68217 0% 50% 1
3 MICROSYST FABRICAT 7578 0% 6% 1
4 LASHKAREV SEMICOND PHYS 7051 1% 2% 3
5 ADV ELECT TECHNOL 5051 0% 4% 1
6 TWENTE MECH 4703 0% 3% 1
7 INTERDISCIPLINAIRE INNOVAT TECHNOL 3IT 3686 0% 3% 1
8 LASHKARYOV SEMICOND PHYS 3634 1% 1% 2
9 ELE 2480 1% 1% 3
10 MN2S 2164 0% 2% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 9819 20% 0% 47
2 PHILIPS TECHNICAL REVIEW 6818 1% 3% 2
3 SOVIET MICROELECTRONICS 1821 1% 1% 2
4 RESEARCH & DEVELOPMENT 1016 0% 1% 1
5 IEEE JOURNAL OF QUANTUM ELECTRONICS 1006 3% 0% 8
6 INORGANIC MATERIALS 905 3% 0% 8
7 ELECTRONICS LETTERS 860 7% 0% 16
8 NUMERICAL HEAT TRANSFER PART B-FUNDAMENTALS 858 1% 0% 3
9 KVANTOVAYA ELEKTRONIKA 741 3% 0% 6
10 BULLETIN OF THE JAPAN SOCIETY OF PRECISION ENGINEERING 562 0% 0% 1

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 DYNAMIC CHEMICAL POLISHING 181914 1% 67% 2 Search DYNAMIC+CHEMICAL+POLISHING Search DYNAMIC+CHEMICAL+POLISHING
2 ACOUSTIC DROPLET EJECTOR 136436 0% 100% 1 Search ACOUSTIC+DROPLET+EJECTOR Search ACOUSTIC+DROPLET+EJECTOR
3 AL AL2O3 NANO PARTICLE 136436 0% 100% 1 Search AL+AL2O3+NANO+PARTICLE Search AL+AL2O3+NANO+PARTICLE
4 DIFFUSION AND KINETICALLY CONTROLLED ETCHING WET ETCHING 136436 0% 100% 1 Search DIFFUSION+AND+KINETICALLY+CONTROLLED+ETCHING+WET+ETCHING Search DIFFUSION+AND+KINETICALLY+CONTROLLED+ETCHING+WET+ETCHING
5 ELECTRIC ARC ION DEPOSITION 136436 0% 100% 1 Search ELECTRIC+ARC+ION+DEPOSITION Search ELECTRIC+ARC+ION+DEPOSITION
6 ENCLOSED MICROCHANNELS AND RESERVOIRS 136436 0% 100% 1 Search ENCLOSED+MICROCHANNELS+AND+RESERVOIRS Search ENCLOSED+MICROCHANNELS+AND+RESERVOIRS
7 EPITAXIAL MASK 136436 0% 100% 1 Search EPITAXIAL+MASK Search EPITAXIAL+MASK
8 EPOXY WICKING 136436 0% 100% 1 Search EPOXY+WICKING Search EPOXY+WICKING
9 ETCH SHAPE CONTROL 136436 0% 100% 1 Search ETCH+SHAPE+CONTROL Search ETCH+SHAPE+CONTROL
10 ETCHED LASER MIRRORS 136436 0% 100% 1 Search ETCHED+LASER+MIRRORS Search ETCHED+LASER+MIRRORS

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 33213 METHYL PERYLENE PIGMENT//MICRORELIEF INTERFACE//10 PERYLENETETRACARBOXYLIC ACID DIIMIDE
2 38202 SPRAY ETCHING//ETCHING FACTOR//MICROLAMINATION
3 6201 FUJIMI KU//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//DRY ETCHING
4 6747 CATASTROPHIC OPTICAL DAMAGE//OPT TRANSMISS COMPONENTS//IEEE JOURNAL OF QUANTUM ELECTRONICS
5 27996 SEMICONDUCTOR RING LASER SRL//MICRORING LASERS//SEMICONDUCTOR RING LASERS SRLS
6 22334 ZINC DIFFUSION//ACCEPTOR DIFFUSION//CHEM PHYS LUCAS HTS S
7 9654 METAL SEMICONDUCTOR METAL STRUCTURES//MO N SI MO//PLANAR METAL SEMICONDUCTOR METAL STRUCTURE
8 11068 SELECTIVE AREA GROWTH//SELECTIVE EPITAXY//TERTIARYBUTYLCHLORIDE
9 12235 ANISOTROPIC ETCHING//MICRONANOSYST ENGN//MEMS MICRO NANO SYST
10 38501 CAVITY ENHANCED DETECTION//ENS PSLCNRSCDF//FIBER TIP CAVITY

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