Class information for: |
Basic class information |
Hierarchy of classes |
The table includes all classes above and classes immediately below the current class. |
Terms with highest relevance score |
| rank | Category | termType | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|---|
| 1 | STENCIL LITHOGRAPHY | authKW | 1872621 | 6% | 95% | 18 |
| 2 | STRESS INDUCED DEFORMATION | authKW | 457558 | 2% | 83% | 5 |
| 3 | RESIST SPRAY COATING | authKW | 439257 | 1% | 100% | 4 |
| 4 | SHADOW MASK | authKW | 414361 | 7% | 19% | 20 |
| 5 | NANOSTENCIL | authKW | 358719 | 2% | 47% | 7 |
| 6 | THREE DIMENSIONAL PHOTOLITHOGRAPHY | authKW | 329443 | 1% | 100% | 3 |
| 7 | FEEDTHROUGHS | authKW | 247081 | 1% | 75% | 3 |
| 8 | AGILE FAB | authKW | 219629 | 1% | 100% | 2 |
| 9 | ANGLED EXPOSURE | authKW | 219629 | 1% | 100% | 2 |
| 10 | ELECTRODEPOSITION OF PHOTORESIST | authKW | 219629 | 1% | 100% | 2 |
Web of Science journal categories |
| chi_square_rank | Category | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | Nanoscience & Nanotechnology | 6442 | 51% | 0% | 147 |
| 2 | Physics, Applied | 3124 | 66% | 0% | 189 |
| 3 | Engineering, Electrical & Electronic | 2251 | 52% | 0% | 149 |
| 4 | Instruments & Instrumentation | 1879 | 26% | 0% | 74 |
| 5 | Materials Science, Multidisciplinary | 692 | 36% | 0% | 103 |
| 6 | Optics | 255 | 14% | 0% | 39 |
| 7 | Mechanics | 234 | 11% | 0% | 31 |
| 8 | Engineering, Manufacturing | 120 | 4% | 0% | 11 |
| 9 | Physics, Condensed Matter | 119 | 13% | 0% | 36 |
| 10 | Chemistry, Multidisciplinary | 46 | 11% | 0% | 32 |
Address terms |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | MICROSYST 1 | 164718 | 1% | 50% | 3 |
| 2 | 11X MFG | 109814 | 0% | 100% | 1 |
| 3 | AG MEMS | 109814 | 0% | 100% | 1 |
| 4 | AUTOMAT ARCHITECTURE SYST | 109814 | 0% | 100% | 1 |
| 5 | CEA GRENOBLE INAC UMR5819 | 109814 | 0% | 100% | 1 |
| 6 | CEA INAC UMR SPRAM 5819 | 109814 | 0% | 100% | 1 |
| 7 | DIMESEEMCS | 109814 | 0% | 100% | 1 |
| 8 | ELECT RUMENTATET | 109814 | 0% | 100% | 1 |
| 9 | EPFL STN 11 | 109814 | 0% | 100% | 1 |
| 10 | FAB D1C MFG | 109814 | 0% | 100% | 1 |
Journals |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 18528 | 11% | 1% | 31 |
| 2 | MICROELECTRONIC ENGINEERING | 9532 | 10% | 0% | 30 |
| 3 | SENSORS AND ACTUATORS A-PHYSICAL | 4772 | 7% | 0% | 21 |
| 4 | CONNECTOR SPECIFIER | 2966 | 0% | 3% | 1 |
| 5 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2594 | 7% | 0% | 20 |
| 6 | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2525 | 3% | 0% | 8 |
| 7 | RCA REVIEW | 2284 | 1% | 1% | 2 |
| 8 | JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 1739 | 1% | 0% | 4 |
| 9 | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 1708 | 2% | 0% | 5 |
| 10 | NANO LETTERS | 1020 | 4% | 0% | 11 |
Author Key Words |
Core articles |
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c: (1) Number of references referring to publications in the class. (2) Share of total number of active references referring to publications in the class. (3) Age of the article. New articles get higher score than old articles. (4) Citation rate, normalized to year. |
Classes with closest relation at Level 1 |