Class information for:
Level 1: ADV SCI TECHNOL IND//HELICAL PATTERN//LASER SCAN LITHOGRAPHY

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
8 4 POLYMER SCIENCE//CHEMISTRY, PHYSICAL//MATERIALS SCIENCE, MULTIDISCIPLINARY 1554940
397 3       JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//MICROELECTRONIC ENGINEERING//NANOSCIENCE & NANOTECHNOLOGY 32153
2484 2             TWO PHOTON POLYMERIZATION//MICROLENS ARRAY//MICROLENS 4177
33006 1                   ADV SCI TECHNOL IND//HELICAL PATTERN//LASER SCAN LITHOGRAPHY 144

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ADV SCI TECHNOL IND address 1136350 31% 12% 45
2 HELICAL PATTERN authKW 781668 3% 71% 5
3 LASER SCAN LITHOGRAPHY authKW 700376 3% 80% 4
4 WORM INJECTION MOLDING authKW 656604 2% 100% 3
5 LIGA PROCESS authKW 591520 7% 27% 10
6 FLUID FILTER authKW 437736 1% 100% 2
7 GRAYSCALE MASK authKW 437736 1% 100% 2
8 LASER SCAN EXPOSURE authKW 437736 1% 100% 2
9 MICROFLUID FILTER authKW 437736 1% 100% 2
10 SUBSTRATE TEMPERATURE DEPENDENCE authKW 393960 2% 60% 3

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Applied 1470 64% 0% 92
2 Nanoscience & Nanotechnology 1336 33% 0% 48
3 Engineering, Electrical & Electronic 607 39% 0% 56
4 Instruments & Instrumentation 180 12% 0% 17
5 Materials Science, Multidisciplinary 170 26% 0% 38
6 COMPUTER APPLICATIONS & CYBERNETICS 82 1% 0% 1
7 Nuclear Science & Technology 52 6% 0% 9
8 Optics 49 9% 0% 13
9 Materials Science, Coatings & Films 38 4% 0% 6
10 Polymer Science 26 6% 0% 9

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ADV SCI TECHNOL IND 1136350 31% 12% 45
2 DOCTORAL PROGRAM MECH ENGN 218868 1% 100% 1
3 ENERGY DENS 218868 1% 100% 1
4 MACRO BIOELE OMECH AUTONOMOUS NANOSYST BEANS CT 218868 1% 100% 1
5 REACT DYNAM UNIT 218868 1% 100% 1
6 WASHINGTON WORKS 218868 1% 100% 1
7 ADV SCI TECHNOL IND LASTI 196977 2% 30% 3
8 QUANTUM EQUIPMENT TECHNOL 115866 2% 18% 3
9 LASTI 103657 6% 5% 9
10 ADV SCI ENGN IND 72955 1% 33% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 39657 18% 1% 26
2 JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY 5293 5% 0% 7
3 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 2807 14% 0% 20
4 ELECTRICAL ENGINEERING IN JAPAN 2439 3% 0% 5
5 ELECTRONICS AND COMMUNICATIONS IN JAPAN 1202 1% 0% 2
6 JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING 1107 1% 0% 2
7 JAPANESE JOURNAL OF APPLIED PHYSICS 1066 6% 0% 9
8 MICROELECTRONIC ENGINEERING 1027 5% 0% 7
9 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 866 1% 0% 2
10 PROCEEDINGS OF THE SID 777 1% 0% 1

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 HELICAL PATTERN 781668 3% 71% 5 Search HELICAL+PATTERN Search HELICAL+PATTERN
2 LASER SCAN LITHOGRAPHY 700376 3% 80% 4 Search LASER+SCAN+LITHOGRAPHY Search LASER+SCAN+LITHOGRAPHY
3 WORM INJECTION MOLDING 656604 2% 100% 3 Search WORM+INJECTION+MOLDING Search WORM+INJECTION+MOLDING
4 LIGA PROCESS 591520 7% 27% 10 Search LIGA+PROCESS Search LIGA+PROCESS
5 FLUID FILTER 437736 1% 100% 2 Search FLUID+FILTER Search FLUID+FILTER
6 GRAYSCALE MASK 437736 1% 100% 2 Search GRAYSCALE+MASK Search GRAYSCALE+MASK
7 LASER SCAN EXPOSURE 437736 1% 100% 2 Search LASER+SCAN+EXPOSURE Search LASER+SCAN+EXPOSURE
8 MICROFLUID FILTER 437736 1% 100% 2 Search MICROFLUID+FILTER Search MICROFLUID+FILTER
9 SUBSTRATE TEMPERATURE DEPENDENCE 393960 2% 60% 3 Search SUBSTRATE+TEMPERATURE+DEPENDENCE Search SUBSTRATE+TEMPERATURE+DEPENDENCE
10 INSIDE LITHOGRAPHY 291823 1% 67% 2 Search INSIDE+LITHOGRAPHY Search INSIDE+LITHOGRAPHY

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 26716 SYNCHROTRON RADIATION STIMULATED ETCHING//VACUUM UV PHOTOSCI//SYNCHROTRON RADIATION EXCITED GROWTH
2 10740 SU 8//MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS//LIGA
3 32938 PROBE CARD//MEMS PROBE CARD//POROUS SILICON MICROMACHINING
4 21866 FLUORINATED AMORPHOUS CARBON//A C F//FLUORINATED AMORPHOUS CARBON FILMS
5 30248 SINGLE BUNCH ELECTRON BEAM//BEAM INDUCED FIELD//COLLINEAR LOAD
6 14203 CROSSLINKED PTFE//POLYTETRAFLUOROETHYLENE//ETHYLENE TETRAFLUOROETHYLENE COPOLYMER
7 5497 LASER IMPLANTATION//EXCIMER LASER//EXCIMER LASER ABLATION
8 11632 PHOTOGRAFTING//PHOTOGRAFTING POLYMERIZATION//ADV PACKAGING DEV SUPPORT
9 2497 NANOIMPRINT//NANOIMPRINT LITHOGRAPHY//IMPRINT LITHOGRAPHY
10 18027 CENTRIFUGAL MICROFLUIDICS//MEMS PLICAT//LAB ON A DISC

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