Class information for: |
Basic class information |
Hierarchy of classes |
The table includes all classes above and classes immediately below the current class. |
| Cluster id | Level | Cluster label | #P |
|---|---|---|---|
| 8 | 4 | POLYMER SCIENCE//CHEMISTRY, PHYSICAL//MATERIALS SCIENCE, MULTIDISCIPLINARY | 1554940 |
| 397 | 3 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//MICROELECTRONIC ENGINEERING//NANOSCIENCE & NANOTECHNOLOGY | 32153 |
| 2484 | 2 | TWO PHOTON POLYMERIZATION//MICROLENS ARRAY//MICROLENS | 4177 |
| 10740 | 1 | SU 8//MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS//LIGA | 1067 |
Terms with highest relevance score |
| rank | Category | termType | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|---|
| 1 | SU 8 | authKW | 1072813 | 12% | 28% | 128 |
| 2 | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | journal | 250822 | 17% | 5% | 178 |
| 3 | LIGA | authKW | 208660 | 3% | 23% | 31 |
| 4 | DEEP X RAY LITHOGRAPHY | authKW | 208174 | 2% | 41% | 17 |
| 5 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING | journal | 183524 | 18% | 3% | 188 |
| 6 | MIKROSTRUKTURTECH | address | 161892 | 2% | 22% | 25 |
| 7 | ZNCL2 NACL KCL | authKW | 147681 | 0% | 100% | 5 |
| 8 | UV LIGA | authKW | 125079 | 1% | 35% | 12 |
| 9 | SU 8 REMOVAL | authKW | 118145 | 0% | 100% | 4 |
| 10 | DEVICE TECHNOL GRP | address | 118137 | 1% | 50% | 8 |
Web of Science journal categories |
| chi_square_rank | Category | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | Nanoscience & Nanotechnology | 30786 | 58% | 0% | 618 |
| 2 | Instruments & Instrumentation | 12739 | 34% | 0% | 368 |
| 3 | Engineering, Electrical & Electronic | 11245 | 60% | 0% | 637 |
| 4 | Physics, Applied | 8844 | 58% | 0% | 618 |
| 5 | Materials Science, Multidisciplinary | 4456 | 46% | 0% | 490 |
| 6 | Mechanics | 2592 | 18% | 0% | 190 |
| 7 | Optics | 713 | 12% | 0% | 128 |
| 8 | Electrochemistry | 208 | 4% | 0% | 47 |
| 9 | Materials Science, Coatings & Films | 96 | 3% | 0% | 28 |
| 10 | Polymer Science | 63 | 4% | 0% | 44 |
Address terms |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | MIKROSTRUKTURTECH | 161892 | 2% | 22% | 25 |
| 2 | DEVICE TECHNOL GRP | 118137 | 1% | 50% | 8 |
| 3 | DMT IMS | 66455 | 0% | 75% | 3 |
| 4 | PLICAT MICRO ENGN | 66455 | 0% | 75% | 3 |
| 5 | MICROSTRUCT GRP | 61528 | 0% | 42% | 5 |
| 6 | CNR INORGAN METHODOL PLASMAS | 59072 | 0% | 100% | 2 |
| 7 | MICRO NANO INTEGRATED DEVICES | 59072 | 0% | 100% | 2 |
| 8 | SING ORE MIT ALLIANCE INNOVAT MFG SYST TECHNOL | 59072 | 0% | 100% | 2 |
| 9 | IMMR | 52504 | 0% | 44% | 4 |
| 10 | CHEM MAT PROC MODELING | 39380 | 0% | 67% | 2 |
Journals |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 250822 | 17% | 5% | 178 |
| 2 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 183524 | 18% | 3% | 188 |
| 3 | MICROELECTRONIC ENGINEERING | 25142 | 9% | 1% | 94 |
| 4 | MICROSYSTEM TECHNOLOGIES | 13124 | 0% | 22% | 2 |
| 5 | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 10871 | 3% | 1% | 32 |
| 6 | SENSORS AND ACTUATORS A-PHYSICAL | 9761 | 5% | 1% | 58 |
| 7 | JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS | 5942 | 1% | 3% | 7 |
| 8 | JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 4936 | 1% | 1% | 13 |
| 9 | VERPACKUNGS RUNDSCHAU | 4921 | 0% | 17% | 1 |
| 10 | MICROMACHINES | 3595 | 1% | 1% | 10 |
Author Key Words |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass | LCSH search | Wikipedia search |
|---|---|---|---|---|---|---|---|
| 1 | SU 8 | 1072813 | 12% | 28% | 128 | Search SU+8 | Search SU+8 |
| 2 | LIGA | 208660 | 3% | 23% | 31 | Search LIGA | Search LIGA |
| 3 | DEEP X RAY LITHOGRAPHY | 208174 | 2% | 41% | 17 | Search DEEP+X+RAY+LITHOGRAPHY | Search DEEP+X+RAY+LITHOGRAPHY |
| 4 | ZNCL2 NACL KCL | 147681 | 0% | 100% | 5 | Search ZNCL2+NACL+KCL | Search ZNCL2+NACL+KCL |
| 5 | UV LIGA | 125079 | 1% | 35% | 12 | Search UV+LIGA | Search UV+LIGA |
| 6 | SU 8 REMOVAL | 118145 | 0% | 100% | 4 | Search SU+8+REMOVAL | Search SU+8+REMOVAL |
| 7 | SU8 | 106314 | 1% | 30% | 12 | Search SU8 | Search SU8 |
| 8 | 3 D MICROMESH STRUCTURES | 88609 | 0% | 100% | 3 | Search 3+D+MICROMESH+STRUCTURES | Search 3+D+MICROMESH+STRUCTURES |
| 9 | CONFORMAL MASK | 88609 | 0% | 100% | 3 | Search CONFORMAL+MASK | Search CONFORMAL+MASK |
| 10 | SU 8 PHOTORESIST | 83097 | 1% | 26% | 11 | Search SU+8+PHOTORESIST | Search SU+8+PHOTORESIST |
Core articles |
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c: (1) Number of references referring to publications in the class. (2) Share of total number of active references referring to publications in the class. (3) Age of the article. New articles get higher score than old articles. (4) Citation rate, normalized to year. |
Classes with closest relation at Level 1 |