Class information for:
Level 1: PROTON BEAM WRITING//ION BEAM PLICAT//PROBE FORMING SYSTEM

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
3 4 GEOSCIENCES, MULTIDISCIPLINARY//GEOCHEMISTRY & GEOPHYSICS//METEOROLOGY & ATMOSPHERIC SCIENCES 1953906
425 3       X-RAY SPECTROMETRY//INTERNATIONAL JOURNAL OF NAUTICAL ARCHAEOLOGY//ARCHAEOLOGY 29746
960 2             X-RAY SPECTROMETRY//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//PIXE 11016
18552 1                   PROTON BEAM WRITING//ION BEAM PLICAT//PROBE FORMING SYSTEM 570

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PROTON BEAM WRITING authKW 4379617 16% 89% 89
2 ION BEAM PLICAT address 1680614 15% 35% 87
3 PROBE FORMING SYSTEM authKW 832623 3% 94% 16
4 LOUISIANA ACCELERATOR address 688270 3% 66% 19
5 QUADRUPOLE LENS authKW 614574 3% 65% 17
6 MEV ION BEAM LITHOGRAPHY authKW 608206 2% 100% 11
7 CIBA address 531308 5% 31% 31
8 PROTON BEAM WRITING PBW authKW 387040 1% 100% 7
9 PROTON BEAM MICROMACHINING authKW 353862 1% 80% 8
10 MAGNETIC QUADRUPOLE LENS authKW 331749 1% 100% 6

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Nuclear Science & Technology 26180 62% 0% 353
2 Physics, Nuclear 25663 61% 0% 349
3 Instruments & Instrumentation 25154 65% 0% 373
4 Physics, Atomic, Molecular & Chemical 12856 58% 0% 333
5 Physics, Applied 603 23% 0% 131
6 Nanoscience & Nanotechnology 503 11% 0% 63
7 Optics 110 7% 0% 41
8 Engineering, Electrical & Electronic 105 11% 0% 60
9 Materials Science, Coatings & Films 70 3% 0% 17
10 Physics, Particles & Fields 63 4% 0% 25

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ION BEAM PLICAT 1680614 15% 35% 87
2 LOUISIANA ACCELERATOR 688270 3% 66% 19
3 CIBA 531308 5% 31% 31
4 RCNM 176931 1% 80% 4
5 HAUTE ECOLE ARC INGN 142585 1% 37% 7
6 NUCL MICROSCOPY 141559 2% 20% 13
7 TAKASAKI ADV RADIAT 139241 4% 11% 23
8 MICROTECHNOL PL ARC 82934 1% 50% 3
9 ANGEW PHYS MESSTECH LRT2 71080 1% 21% 6
10 2 52 55291 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 191066 58% 1% 331
2 MICROELECTRONIC ENGINEERING 2107 4% 0% 20
3 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 1774 2% 0% 11
4 PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY 1631 1% 0% 7
5 TECHNICAL PHYSICS 1352 2% 0% 12
6 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 954 2% 0% 10
7 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 379 2% 0% 11
8 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT 312 3% 0% 16
9 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 216 0% 0% 2
10 ELECTROCHEMICAL AND SOLID STATE LETTERS 200 1% 0% 4

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 PROTON BEAM WRITING 4379617 16% 89% 89 Search PROTON+BEAM+WRITING Search PROTON+BEAM+WRITING
2 PROBE FORMING SYSTEM 832623 3% 94% 16 Search PROBE+FORMING+SYSTEM Search PROBE+FORMING+SYSTEM
3 QUADRUPOLE LENS 614574 3% 65% 17 Search QUADRUPOLE+LENS Search QUADRUPOLE+LENS
4 MEV ION BEAM LITHOGRAPHY 608206 2% 100% 11 Search MEV+ION+BEAM+LITHOGRAPHY Search MEV+ION+BEAM+LITHOGRAPHY
5 PROTON BEAM WRITING PBW 387040 1% 100% 7 Search PROTON+BEAM+WRITING+PBW Search PROTON+BEAM+WRITING+PBW
6 PROTON BEAM MICROMACHINING 353862 1% 80% 8 Search PROTON+BEAM+MICROMACHINING Search PROTON+BEAM+MICROMACHINING
7 MAGNETIC QUADRUPOLE LENS 331749 1% 100% 6 Search MAGNETIC+QUADRUPOLE+LENS Search MAGNETIC+QUADRUPOLE+LENS
8 PBW 301028 1% 78% 7 Search PBW Search PBW
9 NUCLEAR MICROSCOPE 246293 1% 64% 7 Search NUCLEAR+MICROSCOPE Search NUCLEAR+MICROSCOPE
10 NUCLEAR MICROPROBE 243671 6% 12% 36 Search NUCLEAR+MICROPROBE Search NUCLEAR+MICROPROBE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 6314 NUCLEAR MICROPROBE//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//PROTON MICROPROBE
2 29393 NANOSYST MFG//ION PROJECTION//NANOELECT PROC IL
3 37247 MACRO SCALE QUANTUM EFFECTS//CURL FREE VECTOR POTENTIAL//TRANSITION AMPLITUDE WAVE
4 28240 HSQ//HYDROGEN SILSESQUIOXANE//HYDROGEN SILSESQUIOXANE HSQ
5 5758 BYSTANDER EFFECT//RADIATION INDUCED BYSTANDER EFFECT//NON TARGETED EFFECTS
6 10740 SU 8//MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS//LIGA
7 34413 MAGNICON//COLD QUALITY//ELECTRON BEAM ANALYZER
8 20077 IONOLUMINESCENCE//CATHODOLUMINESCENCE//LAPIS LAZULI
9 5224 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//ION BEAM ANALYSIS//ELASTIC RECOIL DETECTION
10 9382 PARTICLE PHYS PARTICLE IRRADIAT MOE//PARTICLE PHYS PARTICLE IRRADIAT//HEAVY ION PHYS

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