Class information for: |
Basic class information |
Hierarchy of classes |
The table includes all classes above and classes immediately below the current class. |
Terms with highest relevance score |
| rank | Category | termType | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|---|
| 1 | HSQ | authKW | 1020315 | 10% | 34% | 22 |
| 2 | HYDROGEN SILSESQUIOXANE | authKW | 837667 | 8% | 34% | 18 |
| 3 | HYDROGEN SILSESQUIOXANE HSQ | authKW | 657728 | 5% | 40% | 12 |
| 4 | HSQ RESIST | authKW | 570955 | 2% | 83% | 5 |
| 5 | ELECTRON BEAM LITHOGRAPHY | authKW | 397400 | 25% | 5% | 57 |
| 6 | EVAPORATED RESIST | authKW | 274059 | 1% | 100% | 2 |
| 7 | MAGNETORESISTIVE THIN FILM HEAD | authKW | 274059 | 1% | 100% | 2 |
| 8 | SUPERCRITICAL RESIST DRYING | authKW | 274059 | 1% | 100% | 2 |
| 9 | ELECTRON RESISTS | authKW | 214472 | 3% | 26% | 6 |
| 10 | 10 NM WIDE RESIST LINES | authKW | 137030 | 0% | 100% | 1 |
Web of Science journal categories |
| chi_square_rank | Category | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | Nanoscience & Nanotechnology | 12658 | 80% | 0% | 183 |
| 2 | Physics, Applied | 4302 | 85% | 0% | 196 |
| 3 | Engineering, Electrical & Electronic | 3342 | 70% | 0% | 160 |
| 4 | Optics | 1487 | 34% | 0% | 78 |
| 5 | Materials Science, Multidisciplinary | 123 | 19% | 0% | 44 |
| 6 | Physics, Condensed Matter | 19 | 7% | 0% | 16 |
| 7 | Materials Science, Coatings & Films | 13 | 2% | 0% | 5 |
| 8 | Chemistry, Multidisciplinary | 4 | 6% | 0% | 14 |
| 9 | Instruments & Instrumentation | 2 | 2% | 0% | 4 |
| 10 | Polymer Science | 1 | 2% | 0% | 5 |
Address terms |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | AETS DEV 1 | 137030 | 0% | 100% | 1 |
| 2 | AETS DEV 2 | 137030 | 0% | 100% | 1 |
| 3 | CB390 | 137030 | 0% | 100% | 1 |
| 4 | HGEBIET FESTKORPERELEKTR | 137030 | 0% | 100% | 1 |
| 5 | ISENIEMN | 137030 | 0% | 100% | 1 |
| 6 | ISLE KATZ NANOSCALE SCI TECHNOL | 137030 | 0% | 100% | 1 |
| 7 | QUATTRONE NANOFABRICAT IL | 137030 | 0% | 100% | 1 |
| 8 | SILOXANE POLYMER GRP | 137030 | 0% | 100% | 1 |
| 9 | JAMES WATT NANOFABRICAT | 137026 | 1% | 33% | 3 |
| 10 | AMICA | 104948 | 3% | 13% | 6 |
Journals |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | MICROELECTRONIC ENGINEERING | 70724 | 32% | 1% | 73 |
| 2 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 52421 | 35% | 0% | 80 |
| 3 | NANOTECHNOLOGY | 961 | 4% | 0% | 10 |
| 4 | POLYMER REVIEWS | 594 | 0% | 0% | 1 |
| 5 | JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 541 | 1% | 0% | 2 |
| 6 | KOREA POLYMER JOURNAL | 479 | 0% | 0% | 1 |
| 7 | OPTICAL MATERIALS EXPRESS | 279 | 1% | 0% | 2 |
| 8 | JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY | 267 | 1% | 0% | 2 |
| 9 | NANOSCALE RESEARCH LETTERS | 254 | 1% | 0% | 3 |
| 10 | MATERIALS TODAY | 222 | 0% | 0% | 1 |
Author Key Words |
Core articles |
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c: (1) Number of references referring to publications in the class. (2) Share of total number of active references referring to publications in the class. (3) Age of the article. New articles get higher score than old articles. (4) Citation rate, normalized to year. |
Classes with closest relation at Level 1 |