Class information for: |
Basic class information |
Hierarchy of classes |
The table includes all classes above and classes immediately below the current class. |
Terms with highest relevance score |
| rank | Category | termType | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|---|
| 1 | INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING | authKW | 1053042 | 6% | 58% | 15 |
| 2 | TI HARD MASK | authKW | 486745 | 2% | 100% | 4 |
| 3 | MAGNETIC TUNNEL JUNCTION MATERIALS | authKW | 365059 | 1% | 100% | 3 |
| 4 | CL 2 BASED PLASMA | authKW | 273793 | 1% | 75% | 3 |
| 5 | ETCH PRODUCT | authKW | 273793 | 1% | 75% | 3 |
| 6 | CH3OH AR | authKW | 243373 | 1% | 100% | 2 |
| 7 | CH4 O 2 AR GAS | authKW | 243373 | 1% | 100% | 2 |
| 8 | MAGNETIC TUNNEL JUNCTION STACK | authKW | 243373 | 1% | 100% | 2 |
| 9 | THIN FILM MICROELECT | address | 176993 | 2% | 36% | 4 |
| 10 | CH3OH AR GAS | authKW | 162247 | 1% | 67% | 2 |
Web of Science journal categories |
| chi_square_rank | Category | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | Materials Science, Coatings & Films | 4403 | 30% | 0% | 77 |
| 2 | Physics, Applied | 3385 | 72% | 0% | 186 |
| 3 | Nanoscience & Nanotechnology | 555 | 17% | 0% | 43 |
| 4 | Physics, Condensed Matter | 540 | 25% | 0% | 65 |
| 5 | Materials Science, Multidisciplinary | 292 | 26% | 0% | 67 |
| 6 | Engineering, Electrical & Electronic | 258 | 20% | 0% | 53 |
| 7 | Electrochemistry | 162 | 7% | 0% | 19 |
| 8 | Engineering, Chemical | 11 | 4% | 0% | 11 |
| 9 | Chemistry, Physical | 9 | 7% | 0% | 19 |
| 10 | Optics | 8 | 4% | 0% | 10 |
Address terms |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | THIN FILM MICROELECT | 176993 | 2% | 36% | 4 |
| 2 | DESIGN PLICAT MOL CATALYSIS | 121686 | 0% | 100% | 1 |
| 3 | FILM NANO MICROELECT | 121686 | 0% | 100% | 1 |
| 4 | MOSAIC COPPER RD GRP | 121686 | 0% | 100% | 1 |
| 5 | MOSAIC EPUU CMP INTEGRAT PROGRAM | 121686 | 0% | 100% | 1 |
| 6 | MRAM SPINTRON RD | 121686 | 0% | 100% | 1 |
| 7 | NANOMACHINING NANOTRIBOL | 121686 | 0% | 100% | 1 |
| 8 | TECHNOL DEV MFG | 121686 | 0% | 100% | 1 |
| 9 | INNOVAT TECHNOL PLANNING | 60842 | 0% | 50% | 1 |
| 10 | DESIGN PLICAT MOL CATALYSTS | 56327 | 2% | 9% | 5 |
Journals |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 5317 | 10% | 0% | 25 |
| 2 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 3487 | 8% | 0% | 22 |
| 3 | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1407 | 7% | 0% | 19 |
| 4 | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | 1314 | 2% | 0% | 4 |
| 5 | THIN SOLID FILMS | 1306 | 8% | 0% | 20 |
| 6 | MICROELECTRONIC ENGINEERING | 1161 | 4% | 0% | 10 |
| 7 | VACUUM | 1000 | 3% | 0% | 9 |
| 8 | PLASMA CHEMISTRY AND PLASMA PROCESSING | 729 | 1% | 0% | 3 |
| 9 | JAPANESE JOURNAL OF APPLIED PHYSICS | 724 | 4% | 0% | 10 |
| 10 | ANNUAL REVIEW OF CHEMICAL AND BIOMOLECULAR ENGINEERING | 722 | 0% | 1% | 1 |
Author Key Words |
Core articles |
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c: (1) Number of references referring to publications in the class. (2) Share of total number of active references referring to publications in the class. (3) Age of the article. New articles get higher score than old articles. (4) Citation rate, normalized to year. |
Classes with closest relation at Level 1 |