Class information for:
Level 1: INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING//TI HARD MASK//MAGNETIC TUNNEL JUNCTION MATERIALS

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
15 4 METALLURGY & METALLURGICAL ENGINEERING//MATERIALS SCIENCE, MULTIDISCIPLINARY//MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING 827627
419 3       PLASMA SOURCES SCIENCE & TECHNOLOGY//REVIEW OF SCIENTIFIC INSTRUMENTS//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 30297
1480 2             PLASMA ETCHING//ELECT DEVICES MAT TECHNOL//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 7897
27042 1                   INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING//TI HARD MASK//MAGNETIC TUNNEL JUNCTION MATERIALS 259

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING authKW 1053042 6% 58% 15
2 TI HARD MASK authKW 486745 2% 100% 4
3 MAGNETIC TUNNEL JUNCTION MATERIALS authKW 365059 1% 100% 3
4 CL 2 BASED PLASMA authKW 273793 1% 75% 3
5 ETCH PRODUCT authKW 273793 1% 75% 3
6 CH3OH AR authKW 243373 1% 100% 2
7 CH4 O 2 AR GAS authKW 243373 1% 100% 2
8 MAGNETIC TUNNEL JUNCTION STACK authKW 243373 1% 100% 2
9 THIN FILM MICROELECT address 176993 2% 36% 4
10 CH3OH AR GAS authKW 162247 1% 67% 2

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 4403 30% 0% 77
2 Physics, Applied 3385 72% 0% 186
3 Nanoscience & Nanotechnology 555 17% 0% 43
4 Physics, Condensed Matter 540 25% 0% 65
5 Materials Science, Multidisciplinary 292 26% 0% 67
6 Engineering, Electrical & Electronic 258 20% 0% 53
7 Electrochemistry 162 7% 0% 19
8 Engineering, Chemical 11 4% 0% 11
9 Chemistry, Physical 9 7% 0% 19
10 Optics 8 4% 0% 10

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 THIN FILM MICROELECT 176993 2% 36% 4
2 DESIGN PLICAT MOL CATALYSIS 121686 0% 100% 1
3 FILM NANO MICROELECT 121686 0% 100% 1
4 MOSAIC COPPER RD GRP 121686 0% 100% 1
5 MOSAIC EPUU CMP INTEGRAT PROGRAM 121686 0% 100% 1
6 MRAM SPINTRON RD 121686 0% 100% 1
7 NANOMACHINING NANOTRIBOL 121686 0% 100% 1
8 TECHNOL DEV MFG 121686 0% 100% 1
9 INNOVAT TECHNOL PLANNING 60842 0% 50% 1
10 DESIGN PLICAT MOL CATALYSTS 56327 2% 9% 5

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 5317 10% 0% 25
2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 3487 8% 0% 22
3 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 1407 7% 0% 19
4 ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY 1314 2% 0% 4
5 THIN SOLID FILMS 1306 8% 0% 20
6 MICROELECTRONIC ENGINEERING 1161 4% 0% 10
7 VACUUM 1000 3% 0% 9
8 PLASMA CHEMISTRY AND PLASMA PROCESSING 729 1% 0% 3
9 JAPANESE JOURNAL OF APPLIED PHYSICS 724 4% 0% 10
10 ANNUAL REVIEW OF CHEMICAL AND BIOMOLECULAR ENGINEERING 722 0% 1% 1

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING 1053042 6% 58% 15 Search INDUCTIVELY+COUPLED+PLASMA+REACTIVE+ION+ETCHING Search INDUCTIVELY+COUPLED+PLASMA+REACTIVE+ION+ETCHING
2 TI HARD MASK 486745 2% 100% 4 Search TI+HARD+MASK Search TI+HARD+MASK
3 MAGNETIC TUNNEL JUNCTION MATERIALS 365059 1% 100% 3 Search MAGNETIC+TUNNEL+JUNCTION+MATERIALS Search MAGNETIC+TUNNEL+JUNCTION+MATERIALS
4 CL 2 BASED PLASMA 273793 1% 75% 3 Search CL+2+BASED+PLASMA Search CL+2+BASED+PLASMA
5 ETCH PRODUCT 273793 1% 75% 3 Search ETCH+PRODUCT Search ETCH+PRODUCT
6 CH3OH AR 243373 1% 100% 2 Search CH3OH+AR Search CH3OH+AR
7 CH4 O 2 AR GAS 243373 1% 100% 2 Search CH4+O+2+AR+GAS Search CH4+O+2+AR+GAS
8 MAGNETIC TUNNEL JUNCTION STACK 243373 1% 100% 2 Search MAGNETIC+TUNNEL+JUNCTION+STACK Search MAGNETIC+TUNNEL+JUNCTION+STACK
9 CH3OH AR GAS 162247 1% 67% 2 Search CH3OH+AR+GAS Search CH3OH+AR+GAS
10 DRY ETCHING OF COPPER 162247 1% 67% 2 Search DRY+ETCHING+OF+COPPER Search DRY+ETCHING+OF+COPPER

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 16132 ELECT DEVICES MAT TECHNOL//ETCH MECHANISM//MICROELECT DEVICES MAT TECHNOL
2 22187 INT JOINT IMTAS//ADSORBATE BONDING//ADSORBATE CHARGES
3 7198 SOLID STATE TECHNOLOGY//AFTER CORROSION//AL SI CU ETCHING
4 6294 MAGNETIC TUNNEL JUNCTION MTJ//SPINTRON INTEGRATED SYST//SPIN TRANSFER TORQUE STT
5 18983 SELF FORMING BARRIER//CUMG ALLOY//CUTI ALLOY FILM
6 11897 PERFLUORINATED CARBOXYLATES//CU CVD//ZENTRUM MIKROTECHNOL
7 28240 HSQ//HYDROGEN SILSESQUIOXANE//HYDROGEN SILSESQUIOXANE HSQ
8 6201 FUJIMI KU//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//DRY ETCHING
9 35843 EXCIMER LASER MODIFICATION//AL ANODIZING//AMBIENT GAS SENSITIVITY
10 2949 MAGNETIC TUNNEL JUNCTION//TUNNEL MAGNETORESISTANCE//TUNNELING MAGNETORESISTANCE

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