Class information for:
Level 1: EXCIMER LASER MODIFICATION//AL ANODIZING//AMBIENT GAS SENSITIVITY

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
15 4 METALLURGY & METALLURGICAL ENGINEERING//MATERIALS SCIENCE, MULTIDISCIPLINARY//MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING 827627
419 3       PLASMA SOURCES SCIENCE & TECHNOLOGY//REVIEW OF SCIENTIFIC INSTRUMENTS//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 30297
1480 2             PLASMA ETCHING//ELECT DEVICES MAT TECHNOL//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 7897
35843 1                   EXCIMER LASER MODIFICATION//AL ANODIZING//AMBIENT GAS SENSITIVITY 106

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 EXCIMER LASER MODIFICATION authKW 891992 3% 100% 3
2 AL ANODIZING authKW 297331 1% 100% 1
3 AMBIENT GAS SENSITIVITY authKW 297331 1% 100% 1
4 AMORPHOUS AL2O3 FILMS authKW 297331 1% 100% 1
5 CENT PHOTOPROC JORDAN MALINOWKSI address 297331 1% 100% 1
6 CHAMBER TO CHAMBER MATCHING authKW 297331 1% 100% 1
7 CHROMIUM MOLYBDENUM ALLOY authKW 297331 1% 100% 1
8 DOPED NANO SIZED MAGNETITE authKW 297331 1% 100% 1
9 EMBEDDED ATTENUATED PHASE SHIFT MASKS authKW 297331 1% 100% 1
10 GALINOBISUITITE BI2S3PBS THIN FILM authKW 297331 1% 100% 1

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Imaging Science & Photographic Technology 1175 15% 0% 16
2 Physics, Applied 992 61% 0% 65
3 Materials Science, Coatings & Films 865 21% 0% 22
4 Materials Science, Multidisciplinary 240 35% 0% 37
5 Nanoscience & Nanotechnology 185 15% 0% 16
6 Optics 119 15% 0% 16
7 Engineering, Electrical & Electronic 98 20% 0% 21
8 Physics, Condensed Matter 69 15% 0% 16
9 Electrochemistry 37 6% 0% 6
10 Chemistry, Physical 9 9% 0% 10

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 CENT PHOTOPROC JORDAN MALINOWKSI 297331 1% 100% 1
2 JORDAN MLAINOWSKI 297331 1% 100% 1
3 PHYS PROPERTIES MAT SUR ES STRUCT 297331 1% 100% 1
4 SCANNING MICROSCOPY STEREOL 297331 1% 100% 1
5 CENT PHOTOPROC JORDAN MALINOWSKI 297327 3% 33% 3
6 J MALINOWSKI 250378 4% 21% 4
7 ELECT ENGN SEONGBUK KU 148664 1% 50% 1
8 POLYMER DYNAM 148664 1% 50% 1
9 CENT PHOTOG PROC 148662 2% 25% 2
10 CENT PHOTOPROC 118917 8% 5% 8

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL FUR SIGNALAUFZEICHNUNGSMATERIALIEN 78119 6% 4% 6
2 JOURNAL OF PHOTOGRAPHIC SCIENCE 13240 5% 1% 5
3 JOURNAL OF IMAGING TECHNOLOGY 4952 2% 1% 2
4 JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS 4890 2% 1% 2
5 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY 4020 4% 0% 4
6 JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS 2009 6% 0% 6
7 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 1426 8% 0% 9
8 MICROELECTRONIC ENGINEERING 1400 7% 0% 7
9 VACUUM 1093 6% 0% 6
10 JOURNAL OF IMAGING SCIENCE 896 1% 0% 1

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 EXCIMER LASER MODIFICATION 891992 3% 100% 3 Search EXCIMER+LASER+MODIFICATION Search EXCIMER+LASER+MODIFICATION
2 AL ANODIZING 297331 1% 100% 1 Search AL+ANODIZING Search AL+ANODIZING
3 AMBIENT GAS SENSITIVITY 297331 1% 100% 1 Search AMBIENT+GAS+SENSITIVITY Search AMBIENT+GAS+SENSITIVITY
4 AMORPHOUS AL2O3 FILMS 297331 1% 100% 1 Search AMORPHOUS+AL2O3+FILMS Search AMORPHOUS+AL2O3+FILMS
5 CHAMBER TO CHAMBER MATCHING 297331 1% 100% 1 Search CHAMBER+TO+CHAMBER+MATCHING Search CHAMBER+TO+CHAMBER+MATCHING
6 CHROMIUM MOLYBDENUM ALLOY 297331 1% 100% 1 Search CHROMIUM+MOLYBDENUM+ALLOY Search CHROMIUM+MOLYBDENUM+ALLOY
7 DOPED NANO SIZED MAGNETITE 297331 1% 100% 1 Search DOPED+NANO+SIZED+MAGNETITE Search DOPED+NANO+SIZED+MAGNETITE
8 EMBEDDED ATTENUATED PHASE SHIFT MASKS 297331 1% 100% 1 Search EMBEDDED+ATTENUATED+PHASE+SHIFT+MASKS Search EMBEDDED+ATTENUATED+PHASE+SHIFT+MASKS
9 GALINOBISUITITE BI2S3PBS THIN FILM 297331 1% 100% 1 Search GALINOBISUITITE+BI2S3PBS+THIN+FILM Search GALINOBISUITITE+BI2S3PBS+THIN+FILM
10 LASER ASSISTED SURFACE MICROSTRUCTURING 297331 1% 100% 1 Search LASER+ASSISTED+SURFACE+MICROSTRUCTURING Search LASER+ASSISTED+SURFACE+MICROSTRUCTURING

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 37224 RMS ANALYSES//NITROGEN AMBIENT GAS//NONLINEAR SAW PROPAGATION
2 28137 WET ETCHING OF GLASS//EBEP//CURRENT BALANCE EQUATION
3 7198 SOLID STATE TECHNOLOGY//AFTER CORROSION//AL SI CU ETCHING
4 7011 SOLID STATE TECHNOLOGY//DRY DEVELOPMENT//PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
5 33606 ANAL TESTING EXPT//N C7H16//MICRO PLASMA SPRAYING
6 4994 ZHURNAL NAUCHNOI I PRIKLADNOI FOTOGRAFII//JOURNAL OF IMAGING SCIENCE//PHOTOGRAPHIC SCIENCE AND ENGINEERING
7 37691 HYDROTHERMAL EXCHANGE//LAHZSM 5 ZEOLITE//NI3AL PHASE FORMATION
8 27042 INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING//TI HARD MASK//MAGNETIC TUNNEL JUNCTION MATERIALS
9 34874 AMMONIUM URANATES//URANOUS SULFATE//ACTIVATED ZINC OXIDE
10 24263 HIGH POWER DIODE LASER HPDL//SURFACE GLAZING//WETTABILITY CHARACTERISTICS

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