Class information for:
Level 1: WET ETCHING OF GLASS//EBEP//CURRENT BALANCE EQUATION

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
15 4 METALLURGY & METALLURGICAL ENGINEERING//MATERIALS SCIENCE, MULTIDISCIPLINARY//MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING 827627
419 3       PLASMA SOURCES SCIENCE & TECHNOLOGY//REVIEW OF SCIENTIFIC INSTRUMENTS//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 30297
1480 2             PLASMA ETCHING//ELECT DEVICES MAT TECHNOL//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 7897
28137 1                   WET ETCHING OF GLASS//EBEP//CURRENT BALANCE EQUATION 233

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 WET ETCHING OF GLASS authKW 432847 2% 80% 4
2 EBEP authKW 304345 1% 75% 3
3 CURRENT BALANCE EQUATION authKW 270531 1% 100% 2
4 DEEP GLASS ETCHING authKW 270531 1% 100% 2
5 GLASS STRUCTURING authKW 270531 1% 100% 2
6 NI HARD MASK authKW 270531 1% 100% 2
7 ELECTRON BEAM EXCITED PLASMA authKW 270523 3% 33% 6
8 GLASS ETCHING authKW 216420 2% 40% 4
9 DEEP WET ETCHING authKW 180352 1% 67% 2
10 ACTIVATION ENERGY FOR CRYSTALLISATION authKW 135265 0% 100% 1

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Nanoscience & Nanotechnology 2999 39% 0% 91
2 Physics, Applied 2025 59% 0% 138
3 Instruments & Instrumentation 1739 27% 0% 64
4 Engineering, Electrical & Electronic 1064 40% 0% 94
5 Materials Science, Multidisciplinary 663 39% 0% 90
6 Mechanics 417 15% 0% 36
7 Materials Science, Ceramics 409 9% 0% 20
8 Materials Science, Coatings & Films 141 6% 0% 14
9 Optics 23 6% 0% 13
10 Chemistry, Analytical 16 5% 0% 12

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ADV PLASMA SUR E 135265 0% 100% 1
2 AUTOMAT MECAN INFORMAT IND HUMA 135265 0% 100% 1
3 FAK MA INENBAU HGEBIET GLAS KERAMIKTECHNOL 135265 0% 100% 1
4 FT TECHNOL DEV 135265 0% 100% 1
5 HGEBIET GLAS KERAM TECHNOL 135265 0% 100% 1
6 INORGAN NON MET MAT 135265 0% 100% 1
7 INTEGRAL PROD ASSOC 135265 0% 100% 1
8 INTEGRATED OPTOELECT MICROPT GRP 135265 0% 100% 1
9 MATHIES GRP 135265 0% 100% 1
10 MEMS NEMS NANOTECHNOL 135265 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 27476 15% 1% 34
2 GLASS SCIENCE AND TECHNOLOGY 6123 2% 1% 4
3 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 6109 6% 0% 13
4 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 3114 3% 0% 8
5 SENSORS AND ACTUATORS A-PHYSICAL 1912 5% 0% 12
6 MICROELECTRONIC ENGINEERING 1045 4% 0% 9
7 INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS 910 1% 0% 2
8 VACUUM 670 3% 0% 7
9 MICROMACHINES 658 1% 0% 2
10 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 639 4% 0% 9

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 WET ETCHING OF GLASS 432847 2% 80% 4 Search WET+ETCHING+OF+GLASS Search WET+ETCHING+OF+GLASS
2 EBEP 304345 1% 75% 3 Search EBEP Search EBEP
3 CURRENT BALANCE EQUATION 270531 1% 100% 2 Search CURRENT+BALANCE+EQUATION Search CURRENT+BALANCE+EQUATION
4 DEEP GLASS ETCHING 270531 1% 100% 2 Search DEEP+GLASS+ETCHING Search DEEP+GLASS+ETCHING
5 GLASS STRUCTURING 270531 1% 100% 2 Search GLASS+STRUCTURING Search GLASS+STRUCTURING
6 NI HARD MASK 270531 1% 100% 2 Search NI+HARD+MASK Search NI+HARD+MASK
7 ELECTRON BEAM EXCITED PLASMA 270523 3% 33% 6 Search ELECTRON+BEAM+EXCITED+PLASMA Search ELECTRON+BEAM+EXCITED+PLASMA
8 GLASS ETCHING 216420 2% 40% 4 Search GLASS+ETCHING Search GLASS+ETCHING
9 DEEP WET ETCHING 180352 1% 67% 2 Search DEEP+WET+ETCHING Search DEEP+WET+ETCHING
10 ACTIVATION ENERGY FOR CRYSTALLISATION 135265 0% 100% 1 Search ACTIVATION+ENERGY+FOR+CRYSTALLISATION Search ACTIVATION+ENERGY+FOR+CRYSTALLISATION

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 21873 LIBWE//LASER ETCHING//LASER INDUCED BACKSIDE WET ETCHING
2 17420 SHEAR DRIVEN CHROMATOGRAPHY//PROGRAM MESOFLUID//PILLAR ARRAY COLUMN
3 20750 GLASS PRESSING//GLASS MOLDING//GLASS MOULDING
4 35843 EXCIMER LASER MODIFICATION//AL ANODIZING//AMBIENT GAS SENSITIVITY
5 1654 SIO2 ETCHING//PLASMA ETCHING//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
6 37861 NEUTRAL LOOP DISCHARGE//MAGNETIC NEUTRAL LINE//ELECTRON MEANDERING MOTION
7 4392 PDMS//LAB ON A CHIP//MFG SYST TECHNOL PROGRAMME
8 4923 WAFER BONDING//ANODIC BONDING//DIRECT BONDING
9 17105 ATOMIC LAYER ETCHING//GATE CHARGING//NEUTRAL BEAM ETCHING
10 38559 ASTM G1 90//FORMIC ACID AND CORROSION INHIBITION SUBSTITUTED THIONES//HALIDE IONS AND INHIBITION

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