Class information for:
Level 1: LIBWE//LASER ETCHING//LASER INDUCED BACKSIDE WET ETCHING

Basic class information

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.

Cluster id	Level	Cluster label	#P
8	4	POLYMER SCIENCE//CHEMISTRY, PHYSICAL//MATERIALS SCIENCE, MULTIDISCIPLINARY	1554940
506	3	LASER INDUCED BREAKDOWN SPECTROSCOPY//LIBS//LASER ABLATION	22460
508	2	LASER CUTTING//FEMTOSECOND LASER//LASER CLEANING	15709
21873	1	LIBWE//LASER ETCHING//LASER INDUCED BACKSIDE WET ETCHING	425

Terms with highest relevance score

rank	Category	termType	chi_square	shrOfCwithTerm	shrOfTermInClass	termInClass
1	LIBWE	authKW	968974	3%	93%	14
2	LASER ETCHING	authKW	460575	5%	30%	21
3	LASER INDUCED BACKSIDE WET ETCHING	authKW	444938	1%	100%	6
4	LIBDE	authKW	370781	1%	100%	5
5	FUSED SILICA	authKW	329512	9%	11%	40
6	BACKSIDE ETCHING	authKW	308983	1%	83%	5
7	VISIBLE LIBWE	authKW	296625	1%	100%	4
8	TWIN LIBWE	authKW	222469	1%	100%	3
9	DIELECTRIC MASK	authKW	169497	1%	57%	4
10	PLICAT PLASMA PHOTON	address	166844	1%	38%	6

Web of Science journal categories

chi_square_rank	Category	chi_square	shrOfCwithTerm	shrOfTermInClass	termInClass
1	Physics, Applied	5508	72%	0%	304
2	Materials Science, Coatings & Films	2839	19%	0%	80
3	Optics	1522	26%	0%	109
4	Materials Science, Multidisciplinary	1430	42%	0%	177
5	Physics, Condensed Matter	684	22%	0%	95
6	Nanoscience & Nanotechnology	619	14%	0%	59
7	Chemistry, Physical	332	21%	0%	89
8	Materials Science, Ceramics	110	4%	0%	15
9	Engineering, Electrical & Electronic	31	8%	0%	33
10	Instruments & Instrumentation	30	4%	0%	15

Address terms

chi_square_rank	term	chi_square	shrOfCwithTerm	shrOfTermInClass	termInClass
1	PLICAT PLASMA PHOTON	166844	1%	38%	6
2	GRP LASER PHYS	121930	4%	9%	18
3	ION BEAM TECH	98874	0%	67%	2
4	OPT QUANTUM ELECT	95855	7%	4%	31
5	PHOTON NANO PLICAT	95340	1%	43%	3
6	AGC FLAT GLASS RUSSIA	74156	0%	100%	1
7	BEREICH PLASMABASIERTE EUV STRAHLUNGSQUELLEN NI	74156	0%	100%	1
8	CHIM INORGAN CVD	74156	0%	100%	1
9	ENVIRONM PHYS LASER SPECTOSCOPY	74156	0%	100%	1
10	INFORMAT TECHNOL ELECT ENGN MECHATRON	74156	0%	100%	1

Journals

chi_square_rank	term	chi_square	shrOfCwithTerm	shrOfTermInClass	termInClass
1	JOURNAL OF LASER MICRO NANOENGINEERING	143769	8%	6%	34
2	APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING	30878	18%	1%	77
3	APPLIED SURFACE SCIENCE	11115	17%	0%	74
4	JOURNAL OF LASER APPLICATIONS	3587	2%	1%	7
5	GLASS AND CERAMICS	1963	1%	0%	6
6	OPTICS AND LASERS IN ENGINEERING	1682	2%	0%	9
7	GLASTECHNISCHE BERICHTE-GLASS SCIENCE AND TECHNOLOGY	1242	1%	1%	3
8	JOURNAL OF MICROMECHANICS AND MICROENGINEERING	626	2%	0%	7
9	JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS	507	0%	0%	2
10	JOURNAL OF PHOTOCHEMISTRY AND PHOTOBIOLOGY A-CHEMISTRY	309	1%	0%	6

Author Key Words

chi_square_rank	term	chi_square	shrOfCwithTerm	shrOfTermInClass	termInClass	LCSH search	Wikipedia search
1	LIBWE	968974	3%	93%	14	Search LIBWE	Search LIBWE
2	LASER ETCHING	460575	5%	30%	21	Search LASER+ETCHING	Search LASER+ETCHING
3	LASER INDUCED BACKSIDE WET ETCHING	444938	1%	100%	6	Search LASER+INDUCED+BACKSIDE+WET+ETCHING	Search LASER+INDUCED+BACKSIDE+WET+ETCHING
4	LIBDE	370781	1%	100%	5	Search LIBDE	Search LIBDE
5	FUSED SILICA	329512	9%	11%	40	Search FUSED+SILICA	Search FUSED+SILICA
6	BACKSIDE ETCHING	308983	1%	83%	5	Search BACKSIDE+ETCHING	Search BACKSIDE+ETCHING
7	VISIBLE LIBWE	296625	1%	100%	4	Search VISIBLE+LIBWE	Search VISIBLE+LIBWE
8	TWIN LIBWE	222469	1%	100%	3	Search TWIN+LIBWE	Search TWIN+LIBWE
9	DIELECTRIC MASK	169497	1%	57%	4	Search DIELECTRIC+MASK	Search DIELECTRIC+MASK
10	DIODE PUMPED SOLID STATE UV LASER	148313	0%	100%	2	Search DIODE+PUMPED+SOLID+STATE+UV+LASER	Search DIODE+PUMPED+SOLID+STATE+UV+LASER

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1

rank	cluster_id2	link
1	28137	WET ETCHING OF GLASS//EBEP//CURRENT BALANCE EQUATION
2	5497	LASER IMPLANTATION//EXCIMER LASER//EXCIMER LASER ABLATION
3	731	FEMTOSECOND LASER//LIPSS//FEMTOSECOND LASER ABLATION
4	19967	LASER INDUCED FORWARD TRANSFER//LASER PRINTING//LASER DIRECT WRITE
5	2389	FEMTOSECOND LASER//LASER MICROPROC GRP//PHOTON CRAFT PROJECT
6	28566	NISHI YODOGAWA KU//MEMS NANOTECHNOL EXCHANGE//FLETCHER
7	36720	LASER POLISHING//LASERMICRO POLISHING//QUASISTATIC PROBLEM OF THERMOELASTICITY
8	37224	RMS ANALYSES//NITROGEN AMBIENT GAS//NONLINEAR SAW PROPAGATION
9	24563	LASER SCRIBING//LEHRSTUHL PHOTON TECHNOL//SYST CONTROL INTEGRAT
10	15952	ELECTROLESS METALLIZATION//LASER MICRO CLADDING//LASER INDUCED CHEMICAL LIQUID PHASE DEPOSITION

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Class information for: Level 1: LIBWE//LASER ETCHING//LASER INDUCED BACKSIDE WET ETCHING