Class information for: |
Basic class information |
Hierarchy of classes |
The table includes all classes above and classes immediately below the current class. |
| Cluster id | Level | Cluster label | #P |
|---|---|---|---|
| 1 | 4 | PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY | 2188495 |
| 521 | 3 | SILICON CARBIDE//4H SIC//SIC | 21253 |
| 695 | 2 | SILICON CARBIDE//4H SIC//SIC | 13432 |
| 28566 | 1 | NISHI YODOGAWA KU//MEMS NANOTECHNOL EXCHANGE//FLETCHER | 222 |
Terms with highest relevance score |
| rank | Category | termType | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|---|
| 1 | NISHI YODOGAWA KU | address | 319426 | 1% | 75% | 3 |
| 2 | MEMS NANOTECHNOL EXCHANGE | address | 283935 | 1% | 100% | 2 |
| 3 | FLETCHER | authKW | 189289 | 1% | 67% | 2 |
| 4 | GOLDFARB | authKW | 189289 | 1% | 67% | 2 |
| 5 | 3D MICROMACHINING TECHNOLOGY | authKW | 141968 | 0% | 100% | 1 |
| 6 | AND SHANNO BFGS OPTIMIZATION ALGORITHM | authKW | 141968 | 0% | 100% | 1 |
| 7 | AND TRENCH | authKW | 141968 | 0% | 100% | 1 |
| 8 | ANISOTROPIC KINETIC MODEL | authKW | 141968 | 0% | 100% | 1 |
| 9 | ANTI BOSCH | authKW | 141968 | 0% | 100% | 1 |
| 10 | BOSCH ETCHING | authKW | 141968 | 0% | 100% | 1 |
Web of Science journal categories |
| chi_square_rank | Category | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | Materials Science, Coatings & Films | 3004 | 27% | 0% | 59 |
| 2 | Physics, Applied | 1884 | 59% | 0% | 130 |
| 3 | Engineering, Electrical & Electronic | 573 | 31% | 0% | 69 |
| 4 | Materials Science, Multidisciplinary | 452 | 33% | 0% | 74 |
| 5 | Nanoscience & Nanotechnology | 351 | 14% | 0% | 32 |
| 6 | Electrochemistry | 153 | 8% | 0% | 17 |
| 7 | Physics, Condensed Matter | 129 | 14% | 0% | 32 |
| 8 | Optics | 66 | 9% | 0% | 19 |
| 9 | Materials Science, Characterization, Testing | 62 | 2% | 0% | 5 |
| 10 | Instruments & Instrumentation | 38 | 5% | 0% | 11 |
Address terms |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | NISHI YODOGAWA KU | 319426 | 1% | 75% | 3 |
| 2 | MEMS NANOTECHNOL EXCHANGE | 283935 | 1% | 100% | 2 |
| 3 | DIMES NANO IL | 141968 | 0% | 100% | 1 |
| 4 | INFORMAT COMMUN ENGNPARC | 141968 | 0% | 100% | 1 |
| 5 | KTH KISTA | 141968 | 0% | 100% | 1 |
| 6 | MICROMECHTRON | 141968 | 0% | 100% | 1 |
| 7 | MICROPHOT ADV U PARC | 141968 | 0% | 100% | 1 |
| 8 | NORTHROP GRUMMAN SCI TECHNOL | 141968 | 0% | 100% | 1 |
| 9 | PPG BOULDER | 141968 | 0% | 100% | 1 |
| 10 | PRECISON INTELLIGENCE | 141968 | 0% | 100% | 1 |
Journals |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 4805 | 10% | 0% | 22 |
| 2 | JOURNAL OF ELECTRONIC MATERIALS | 3978 | 8% | 0% | 17 |
| 3 | MATERIALS SCIENCE FORUM | 3588 | 9% | 0% | 21 |
| 4 | MICROELECTRONIC ENGINEERING | 1358 | 5% | 0% | 10 |
| 5 | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1316 | 8% | 0% | 17 |
| 6 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1008 | 5% | 0% | 11 |
| 7 | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 813 | 2% | 0% | 4 |
| 8 | JOURNAL OF LASER APPLICATIONS | 559 | 1% | 0% | 2 |
| 9 | CRYSTAL LATTICE DEFECTS AND AMORPHOUS MATERIALS | 435 | 0% | 0% | 1 |
| 10 | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 357 | 1% | 0% | 3 |
Author Key Words |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass | LCSH search | Wikipedia search |
|---|---|---|---|---|---|---|---|
| 1 | FLETCHER | 189289 | 1% | 67% | 2 | Search FLETCHER | Search FLETCHER |
| 2 | GOLDFARB | 189289 | 1% | 67% | 2 | Search GOLDFARB | Search GOLDFARB |
| 3 | 3D MICROMACHINING TECHNOLOGY | 141968 | 0% | 100% | 1 | Search 3D+MICROMACHINING+TECHNOLOGY | Search 3D+MICROMACHINING+TECHNOLOGY |
| 4 | AND SHANNO BFGS OPTIMIZATION ALGORITHM | 141968 | 0% | 100% | 1 | Search AND+SHANNO+BFGS+OPTIMIZATION+ALGORITHM | Search AND+SHANNO+BFGS+OPTIMIZATION+ALGORITHM |
| 5 | AND TRENCH | 141968 | 0% | 100% | 1 | Search AND+TRENCH | Search AND+TRENCH |
| 6 | ANISOTROPIC KINETIC MODEL | 141968 | 0% | 100% | 1 | Search ANISOTROPIC+KINETIC+MODEL | Search ANISOTROPIC+KINETIC+MODEL |
| 7 | ANTI BOSCH | 141968 | 0% | 100% | 1 | Search ANTI+BOSCH | Search ANTI+BOSCH |
| 8 | BOSCH ETCHING | 141968 | 0% | 100% | 1 | Search BOSCH+ETCHING | Search BOSCH+ETCHING |
| 9 | BURST FORCE | 141968 | 0% | 100% | 1 | Search BURST+FORCE | Search BURST+FORCE |
| 10 | C2F6 INDUCTIVELY COUPLED PLASMA | 141968 | 0% | 100% | 1 | Search C2F6+INDUCTIVELY+COUPLED+PLASMA | Search C2F6+INDUCTIVELY+COUPLED+PLASMA |
Core articles |
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c: (1) Number of references referring to publications in the class. (2) Share of total number of active references referring to publications in the class. (3) Age of the article. New articles get higher score than old articles. (4) Citation rate, normalized to year. |
Classes with closest relation at Level 1 |