Class information for:
Level 1: SOLID STATE TECHNOLOGY//AFTER CORROSION//AL SI CU ETCHING

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
15 4 METALLURGY & METALLURGICAL ENGINEERING//MATERIALS SCIENCE, MULTIDISCIPLINARY//MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING 827627
419 3       PLASMA SOURCES SCIENCE & TECHNOLOGY//REVIEW OF SCIENTIFIC INSTRUMENTS//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 30297
1480 2             PLASMA ETCHING//ELECT DEVICES MAT TECHNOL//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 7897
7198 1                   SOLID STATE TECHNOLOGY//AFTER CORROSION//AL SI CU ETCHING 1421

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SOLID STATE TECHNOLOGY journal 68761 5% 4% 76
2 AFTER CORROSION authKW 66533 0% 100% 3
3 AL SI CU ETCHING authKW 66533 0% 100% 3
4 PHYSICOCHIM MOLEC ORSAY address 44355 0% 100% 2
5 PLASMALESS ETCHING authKW 44355 0% 100% 2
6 POST METAL ETCH STRIP authKW 44355 0% 100% 2
7 SURFACE STRUCTURE AND ROUGHNESS authKW 44355 0% 100% 2
8 ZERO ENERGY SIMS authKW 44355 0% 100% 2
9 PLASMA NANOTECHNOL PLANT address 39917 0% 60% 3
10 CHLORINE TRIFLUORIDE authKW 39597 0% 36% 5

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 12677 22% 0% 308
2 Physics, Applied 8583 50% 0% 710
3 Physics, Condensed Matter 3351 27% 0% 377
4 Electrochemistry 1828 10% 0% 145
5 Chemistry, Physical 1025 20% 0% 288
6 Engineering, Electrical & Electronic 922 17% 0% 243
7 Nanoscience & Nanotechnology 819 9% 0% 130
8 COMPUTER APPLICATIONS & CYBERNETICS 128 0% 0% 4
9 Physics, Atomic, Molecular & Chemical 97 5% 0% 65
10 Materials Science, Multidisciplinary 89 9% 0% 132

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PHYSICOCHIM MOLEC ORSAY 44355 0% 100% 2
2 PLASMA NANOTECHNOL PLANT 39917 0% 60% 3
3 SHIBUKAWA 24946 0% 38% 3
4 CIENCIA MAT FIS SUPERFICIES 22178 0% 100% 1
5 ELECT GASES 22178 0% 100% 1
6 ION BEAM ENGN EXPTL SAKYO KU 22178 0% 100% 1
7 LETIG SI 22178 0% 100% 1
8 LPD DFA 22178 0% 100% 1
9 NASMRJ 22178 0% 100% 1
10 PHYSICOCHIM MOLEC ORSAYCNRS 22178 0% 100% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 SOLID STATE TECHNOLOGY 68761 5% 4% 76
2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 14837 7% 1% 98
3 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 14427 10% 0% 142
4 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 14176 7% 1% 104
5 SURFACE SCIENCE 11118 8% 0% 117
6 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY 6049 1% 2% 18
7 HIGH ENERGY CHEMISTRY 2520 1% 1% 18
8 VACUUM 2001 2% 0% 30
9 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 1775 4% 0% 51
10 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 1711 0% 1% 7

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 AFTER CORROSION 66533 0% 100% 3 Search AFTER+CORROSION Search AFTER+CORROSION
2 AL SI CU ETCHING 66533 0% 100% 3 Search AL+SI+CU+ETCHING Search AL+SI+CU+ETCHING
3 PLASMALESS ETCHING 44355 0% 100% 2 Search PLASMALESS+ETCHING Search PLASMALESS+ETCHING
4 POST METAL ETCH STRIP 44355 0% 100% 2 Search POST+METAL+ETCH+STRIP Search POST+METAL+ETCH+STRIP
5 SURFACE STRUCTURE AND ROUGHNESS 44355 0% 100% 2 Search SURFACE+STRUCTURE+AND+ROUGHNESS Search SURFACE+STRUCTURE+AND+ROUGHNESS
6 ZERO ENERGY SIMS 44355 0% 100% 2 Search ZERO+ENERGY+SIMS Search ZERO+ENERGY+SIMS
7 CHLORINE TRIFLUORIDE 39597 0% 36% 5 Search CHLORINE+TRIFLUORIDE Search CHLORINE+TRIFLUORIDE
8 CHLORINE TRIFLUORIDE GAS 29569 0% 67% 2 Search CHLORINE+TRIFLUORIDE+GAS Search CHLORINE+TRIFLUORIDE+GAS
9 1356 MHZ GENERATOR 22178 0% 100% 1 Search 1356+MHZ+GENERATOR Search 1356+MHZ+GENERATOR
10 2 MHZ GENERATOR 22178 0% 100% 1 Search 2+MHZ+GENERATOR Search 2+MHZ+GENERATOR

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 1654 SIO2 ETCHING//PLASMA ETCHING//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
2 26716 SYNCHROTRON RADIATION STIMULATED ETCHING//VACUUM UV PHOTOSCI//SYNCHROTRON RADIATION EXCITED GROWTH
3 27042 INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING//TI HARD MASK//MAGNETIC TUNNEL JUNCTION MATERIALS
4 22057 POST ETCHING TREATMENTS//111 SPLIT INTERSTITIAL//AL1 WT PERCENT SI
5 6201 FUJIMI KU//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//DRY ETCHING
6 35843 EXCIMER LASER MODIFICATION//AL ANODIZING//AMBIENT GAS SENSITIVITY
7 23837 SF6 DECOMPOSITION PRODUCTS//INFLUENCE REGULARITY//SF6
8 17105 ATOMIC LAYER ETCHING//GATE CHARGING//NEUTRAL BEAM ETCHING
9 16132 ELECT DEVICES MAT TECHNOL//ETCH MECHANISM//MICROELECT DEVICES MAT TECHNOL
10 11639 ECR PLASMA//UNIFORM PLASMA//ELECTRON CYCLOTRON RESONANCE DISCHARGE

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