Class information for: |
Basic class information |
Hierarchy of classes |
The table includes all classes above and classes immediately below the current class. |
Terms with highest relevance score |
| rank | Category | termType | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|---|
| 1 | ECR PLASMA | authKW | 702706 | 7% | 32% | 69 |
| 2 | UNIFORM PLASMA | authKW | 141371 | 1% | 64% | 7 |
| 3 | ELECTRON CYCLOTRON RESONANCE DISCHARGE | authKW | 132238 | 1% | 83% | 5 |
| 4 | ECR POSITION | authKW | 126950 | 0% | 100% | 4 |
| 5 | UPPER HYBRID RESONANCE | authKW | 114250 | 1% | 60% | 6 |
| 6 | MAGNETIC MULTIPOLE FIELD | authKW | 101558 | 0% | 80% | 4 |
| 7 | AR N 2 MIXTURE | authKW | 95212 | 0% | 100% | 3 |
| 8 | MULTI SLOT ANTENNA | authKW | 95212 | 0% | 100% | 3 |
| 9 | ELECTRON CYCLOTRON WAVE | authKW | 95206 | 1% | 50% | 6 |
| 10 | ELECTRON CYCLOTRON RESONANCE | authKW | 89263 | 2% | 12% | 23 |
Web of Science journal categories |
| chi_square_rank | Category | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | Physics, Applied | 13710 | 74% | 0% | 732 |
| 2 | Materials Science, Coatings & Films | 5930 | 18% | 0% | 177 |
| 3 | Instruments & Instrumentation | 3564 | 19% | 0% | 192 |
| 4 | Physics, Fluids & Plasmas | 1475 | 10% | 0% | 98 |
| 5 | Nanoscience & Nanotechnology | 427 | 8% | 0% | 80 |
| 6 | Engineering, Electrical & Electronic | 143 | 10% | 0% | 96 |
| 7 | Physics, Multidisciplinary | 102 | 6% | 0% | 63 |
| 8 | Materials Science, Multidisciplinary | 101 | 11% | 0% | 106 |
| 9 | Nuclear Science & Technology | 40 | 3% | 0% | 26 |
| 10 | Physics, Nuclear | 32 | 2% | 0% | 24 |
Address terms |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | DRY ETCHING ENGN | 63475 | 0% | 100% | 2 |
| 2 | RF MICROWAVE SECT | 63475 | 0% | 100% | 2 |
| 3 | CHEM ENGN YONGSAN KU | 31737 | 0% | 100% | 1 |
| 4 | CNRS UNITE 844 | 31737 | 0% | 100% | 1 |
| 5 | ELE TECHNOL SAKYO KU | 31737 | 0% | 100% | 1 |
| 6 | ELECT THIN FILM | 31737 | 0% | 100% | 1 |
| 7 | FOR UNGSZENTRUM MIKROSTRUKT TECHN FMT | 31737 | 0% | 100% | 1 |
| 8 | FUS ENEGY PROGRAM | 31737 | 0% | 100% | 1 |
| 9 | GRENOBLE INP RECH PLASMAS MAT NANOSTRUCT | 31737 | 0% | 100% | 1 |
| 10 | KOKUBU POWER IND PROD | 31737 | 0% | 100% | 1 |
Journals |
| chi_square_rank | term | chi_square | shrOfCwithTerm | shrOfTermInClass | termInClass |
|---|---|---|---|---|---|
| 1 | REVIEW OF SCIENTIFIC INSTRUMENTS | 27769 | 17% | 1% | 164 |
| 2 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 24485 | 11% | 1% | 105 |
| 3 | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 10327 | 10% | 0% | 101 |
| 4 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 8664 | 7% | 0% | 68 |
| 5 | PLASMA SOURCES SCIENCE & TECHNOLOGY | 8660 | 3% | 1% | 28 |
| 6 | VACUUM | 8092 | 5% | 1% | 50 |
| 7 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 6749 | 1% | 4% | 6 |
| 8 | IEEE TRANSACTIONS ON PLASMA SCIENCE | 2446 | 3% | 0% | 28 |
| 9 | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1598 | 3% | 0% | 25 |
| 10 | SURFACE & COATINGS TECHNOLOGY | 1372 | 3% | 0% | 30 |
Author Key Words |
Core articles |
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c: (1) Number of references referring to publications in the class. (2) Share of total number of active references referring to publications in the class. (3) Age of the article. New articles get higher score than old articles. (4) Citation rate, normalized to year. |
Classes with closest relation at Level 1 |