Class information for:
Level 1: PLASMA SOURCES SCIENCE & TECHNOLOGY//CAPACITIVELY COUPLED PLASMA//PLASMA ATOM PHYS

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
15 4 METALLURGY & METALLURGICAL ENGINEERING//MATERIALS SCIENCE, MULTIDISCIPLINARY//MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING 827627
419 3       PLASMA SOURCES SCIENCE & TECHNOLOGY//REVIEW OF SCIENTIFIC INSTRUMENTS//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 30297
1265 2             PLASMA SOURCES SCIENCE & TECHNOLOGY//PLASMA SHEATHS//PHYSICS, FLUIDS & PLASMAS 9130
741 1                   PLASMA SOURCES SCIENCE & TECHNOLOGY//CAPACITIVELY COUPLED PLASMA//PLASMA ATOM PHYS 3139

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PLASMA SOURCES SCIENCE & TECHNOLOGY journal 485929 12% 13% 372
2 CAPACITIVELY COUPLED PLASMA authKW 311946 2% 53% 59
3 PLASMA ATOM PHYS address 183726 1% 43% 43
4 INDUCTIVELY COUPLED PLASMA authKW 180491 4% 14% 125
5 RF DISCHARGE authKW 156541 2% 28% 56
6 ELECTRICAL ASYMMETRY EFFECT authKW 140540 0% 100% 14
7 LADDER SHAPED ELECTRODE authKW 130501 0% 100% 13
8 PLASMA SCI TECHNOL address 120656 2% 17% 71
9 LANGMUIR PROBE authKW 115006 3% 14% 81
10 VHF PLASMA authKW 113232 1% 59% 19

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Physics, Fluids & Plasmas 59868 34% 1% 1063
2 Physics, Applied 21035 52% 0% 1646
3 Materials Science, Coatings & Films 8045 12% 0% 372
4 Physics, Multidisciplinary 425 7% 0% 220
5 Physics, Mathematical 236 3% 0% 98
6 Instruments & Instrumentation 203 3% 0% 107
7 Physics, Condensed Matter 50 4% 0% 139
8 Materials Science, Multidisciplinary 46 7% 0% 209
9 Computer Science, Interdisciplinary Applications 16 1% 0% 41
10 Nanoscience & Nanotechnology 3 1% 0% 46

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PLASMA ATOM PHYS 183726 1% 43% 43
2 PLASMA SCI TECHNOL 120656 2% 17% 71
3 PLASMA PROC 108712 2% 21% 51
4 PHYS TECHNOL PLASMAS 66945 1% 22% 31
5 THEORET ELECT ENGN 56997 1% 20% 29
6 ELECT ENGN COMP SCI 1770 49185 0% 70% 7
7 PHYS OPTOELECT TECHNOL 46164 3% 5% 98
8 LPP CNRS 40985 0% 58% 7
9 IMPEDANS LTD 40154 0% 100% 4
10 VACUUM TECHNOL 38952 1% 19% 20

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PLASMA SOURCES SCIENCE & TECHNOLOGY 485929 12% 13% 372
2 IEEE TRANSACTIONS ON PLASMA SCIENCE 44091 7% 2% 210
3 PHYSICS OF PLASMAS 27857 7% 1% 234
4 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 24935 6% 1% 189
5 JOURNAL OF PHYSICS D-APPLIED PHYSICS 20925 7% 1% 213
6 JOURNAL OF APPLIED PHYSICS 14303 13% 0% 396
7 PLASMA SCIENCE & TECHNOLOGY 10564 2% 2% 50
8 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 5512 4% 0% 133
9 PLASMA CHEMISTRY AND PLASMA PROCESSING 5227 1% 2% 28
10 CONTRIBUTIONS TO PLASMA PHYSICS 5169 1% 1% 36

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 CAPACITIVELY COUPLED PLASMA 311946 2% 53% 59 Search CAPACITIVELY+COUPLED+PLASMA Search CAPACITIVELY+COUPLED+PLASMA
2 INDUCTIVELY COUPLED PLASMA 180491 4% 14% 125 Search INDUCTIVELY+COUPLED+PLASMA Search INDUCTIVELY+COUPLED+PLASMA
3 RF DISCHARGE 156541 2% 28% 56 Search RF+DISCHARGE Search RF+DISCHARGE
4 ELECTRICAL ASYMMETRY EFFECT 140540 0% 100% 14 Search ELECTRICAL+ASYMMETRY+EFFECT Search ELECTRICAL+ASYMMETRY+EFFECT
5 LADDER SHAPED ELECTRODE 130501 0% 100% 13 Search LADDER+SHAPED+ELECTRODE Search LADDER+SHAPED+ELECTRODE
6 LANGMUIR PROBE 115006 3% 14% 81 Search LANGMUIR+PROBE Search LANGMUIR+PROBE
7 VHF PLASMA 113232 1% 59% 19 Search VHF+PLASMA Search VHF+PLASMA
8 LOW INDUCTANCE ANTENNA 101220 0% 92% 11 Search LOW+INDUCTANCE+ANTENNA Search LOW+INDUCTANCE+ANTENNA
9 PLASMA UNIFORMITY 91767 1% 57% 16 Search PLASMA+UNIFORMITY Search PLASMA+UNIFORMITY
10 LOW DAMAGE PROCESS 81310 0% 90% 9 Search LOW+DAMAGE+PROCESS Search LOW+DAMAGE+PROCESS

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 31372 VACUUM TECHNOL//ACTIVE PLASMA RESONANCE SPECTROSCOPY//MULTIPOLE RESONANCE PROBE
2 21175 PLASMA ATOM PHYS//MURMANSK BRANCH//2P STATES
3 1654 SIO2 ETCHING//PLASMA ETCHING//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
4 5695 BOHM CRITERION//OXFORD UNIT//PLASMA SHEATHS
5 10693 SPACE PLASMA POWER PROP GRP//SPACE PLASMA POWER PROP//HELICON WAVE
6 7501 ELECTRON TRANSPORT COEFFICIENTS//ELECTRON SWARM PARAMETERS//ELECTRON VELOCITY DISTRIBUTION FUNCTION
7 37861 NEUTRAL LOOP DISCHARGE//MAGNETIC NEUTRAL LINE//ELECTRON MEANDERING MOTION
8 20297 MOLECULAR HYDRINO//NOVEL HYDRIDE ION//CLASSICAL QUANTUM MECHANICS
9 12620 DUST PARTICLE GROWTH//DUSTY PLASMA//GREMI
10 11639 ECR PLASMA//UNIFORM PLASMA//ELECTRON CYCLOTRON RESONANCE DISCHARGE

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