Class information for:
Level 1: PERFLUORINATED CARBOXYLATES//CU CVD//ZENTRUM MIKROTECHNOL

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
396 3       LEAD FREE SOLDER//SOLDER//ELECTROMIGRATION 32184
1011 2             ATOMIC LAYER DEPOSITION//DIFFUSION BARRIER//CU METALLIZATION 10645
11897 1                   PERFLUORINATED CARBOXYLATES//CU CVD//ZENTRUM MIKROTECHNOL 974

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PERFLUORINATED CARBOXYLATES authKW 221864 1% 57% 12
2 CU CVD authKW 134817 1% 83% 5
3 ZENTRUM MIKROTECHNOL address 119827 1% 37% 10
4 COPPER CVD authKW 115556 1% 71% 5
5 IR AND NMR authKW 115556 1% 71% 5
6 LOW INDEX SINGLE CRYSTAL SI SURFACES authKW 97070 0% 100% 3
7 COPPER FILMS authKW 95152 1% 29% 10
8 COPPER CVD FILMS authKW 64713 0% 100% 2
9 COPPERICHLORIDE authKW 64713 0% 100% 2
10 CUHFACVTMOS authKW 64713 0% 100% 2

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 9989 23% 0% 226
2 Physics, Applied 3010 37% 0% 358
3 Chemistry, Inorganic & Nuclear 1544 15% 0% 144
4 Materials Science, Multidisciplinary 1481 29% 0% 286
5 Electrochemistry 1297 10% 0% 101
6 Physics, Condensed Matter 992 18% 0% 178
7 Nanoscience & Nanotechnology 532 9% 0% 87
8 Chemistry, Physical 462 17% 0% 167
9 Engineering, Electrical & Electronic 191 11% 0% 105
10 Crystallography 174 4% 0% 41

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ZENTRUM MIKROTECHNOL 119827 1% 37% 10
2 CNRS 7071 58239 0% 60% 3
3 LEHRSTUHL MIKROTECHNOL 43141 0% 67% 2
4 863 PROGRAM NEW MAT MO PRECURSORS RD 32357 0% 100% 1
5 ARTS SCI KAHEAMANMARAS 32357 0% 100% 1
6 BLANKET DIELECT 32357 0% 100% 1
7 CIRIMAT 4 32357 0% 100% 1
8 CORPORATE SCI TECHNOL 32357 0% 100% 1
9 E FISHKILL IL TECHNOL PROD 32357 0% 100% 1
10 ELECT COMP ENGNLAMP 32357 0% 100% 1

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 CHEMICAL VAPOR DEPOSITION 57341 4% 4% 42
2 CHEMISTRY OF MATERIALS 5895 6% 0% 58
3 MICROELECTRONIC ENGINEERING 4226 4% 0% 37
4 ELECTROCHEMICAL AND SOLID STATE LETTERS 3970 2% 1% 23
5 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 3588 6% 0% 59
6 JOURNAL DE PHYSIQUE IV 2247 3% 0% 27
7 THIN SOLID FILMS 1884 5% 0% 47
8 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 1735 3% 0% 28
9 POLISH JOURNAL OF CHEMISTRY 1003 1% 0% 13
10 POLYHEDRON 987 2% 0% 23

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 PERFLUORINATED CARBOXYLATES 221864 1% 57% 12 Search PERFLUORINATED+CARBOXYLATES Search PERFLUORINATED+CARBOXYLATES
2 CU CVD 134817 1% 83% 5 Search CU+CVD Search CU+CVD
3 COPPER CVD 115556 1% 71% 5 Search COPPER+CVD Search COPPER+CVD
4 IR AND NMR 115556 1% 71% 5 Search IR+AND+NMR Search IR+AND+NMR
5 LOW INDEX SINGLE CRYSTAL SI SURFACES 97070 0% 100% 3 Search LOW+INDEX+SINGLE+CRYSTAL+SI+SURFACES Search LOW+INDEX+SINGLE+CRYSTAL+SI+SURFACES
6 COPPER FILMS 95152 1% 29% 10 Search COPPER+FILMS Search COPPER+FILMS
7 COPPER CVD FILMS 64713 0% 100% 2 Search COPPER+CVD+FILMS Search COPPER+CVD+FILMS
8 COPPERICHLORIDE 64713 0% 100% 2 Search COPPERICHLORIDE Search COPPERICHLORIDE
9 CUHFACVTMOS 64713 0% 100% 2 Search CUHFACVTMOS Search CUHFACVTMOS
10 CUI PRECURSOR 64713 0% 100% 2 Search CUI+PRECURSOR Search CUI+PRECURSOR

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 25202 NIPF34//BIS ETHYLCYCLOPENTADIENYL NICKEL//NICKEL CONTAINING FILMS
2 18983 SELF FORMING BARRIER//CUMG ALLOY//CUTI ALLOY FILM
3 20946 SUPERCRITICAL FLUID DEPOSITION//SUPERCRITICAL DEPOSITION//SUPERCRITICAL FLUIDS
4 21611 IRIDIUM COATING//IR COATING//IRIDIUM THIN FILMS
5 27042 INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING//TI HARD MASK//MAGNETIC TUNNEL JUNCTION MATERIALS
6 10235 BETA DIKETONATE//BETA DIKETONATE CHELATES//CRYSTAL CHEMISTRY OF BETA DIKETONATES
7 3456 DIFFUSION BARRIER//CU METALLIZATION//TANTALUM NITRIDE
8 10067 DIMETHYLALUMINUM HYDRIDE//FREEFORM FABRICAT S//SELECTIVE AL CVD
9 2907 ATOMIC LAYER DEPOSITION//ALD//MOLECULAR LAYER DEPOSITION
10 14190 CVD W//BLANKET TUNGSTEN//TUNGSTEN THIN FILMS

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