Class information for:
Level 1: ATOMIC LAYER DEPOSITION//ALD//MOLECULAR LAYER DEPOSITION

Basic class information
Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
396 3       LEAD FREE SOLDER//SOLDER//ELECTROMIGRATION 32184
1011 2             ATOMIC LAYER DEPOSITION//DIFFUSION BARRIER//CU METALLIZATION 10645
2907 1                   ATOMIC LAYER DEPOSITION//ALD//MOLECULAR LAYER DEPOSITION 2147

Terms with highest relevance score


rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ATOMIC LAYER DEPOSITION authKW 1617915 24% 22% 508
2 ALD authKW 290981 5% 18% 108
3 MOLECULAR LAYER DEPOSITION authKW 276549 1% 61% 31
4 ATOMIC LAYER DEPOSITION ALD authKW 178824 3% 19% 64
5 MOLECULAR LAYER DEPOSITION MLD authKW 161454 1% 100% 11
6 PLASMA ENHANCED ALD authKW 75484 0% 86% 6
7 COCOON address 72868 1% 41% 12
8 GROWTH PER CYCLE authKW 58711 0% 100% 4
9 PL PHYS SENSORS address 55486 1% 34% 11
10 CHEMICAL VAPOR DEPOSITION journal 54831 3% 6% 61

Web of Science journal categories


chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 31854 28% 0% 597
2 Physics, Applied 9496 43% 0% 929
3 Materials Science, Multidisciplinary 7806 43% 0% 926
4 Nanoscience & Nanotechnology 5308 18% 0% 381
5 Chemistry, Physical 3276 28% 0% 596
6 Physics, Condensed Matter 2570 20% 0% 421
7 Electrochemistry 1472 8% 0% 164
8 Chemistry, Multidisciplinary 444 12% 0% 261
9 Chemistry, Applied 66 2% 0% 53
10 Materials Science, Ceramics 30 1% 0% 24

Address terms


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 COCOON 72868 1% 41% 12
2 PL PHYS SENSORS 55486 1% 34% 11
3 NANOTECHNOL PLASMAS PROC 46967 0% 80% 4
4 EXPT PHYS TECHNOL 46586 1% 19% 17
5 INTERUNIV SEMICOND 40945 2% 5% 52
6 ASTRAL 36014 0% 27% 9
7 ADV SUR E TECHNOL 33353 0% 45% 5
8 ANGTROM SOLAR 33023 0% 75% 3
9 ARMY AVIAT MISSILE DEV ENGN 29355 0% 100% 2
10 NAT SCI HAS 29355 0% 100% 2

Journals


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 CHEMICAL VAPOR DEPOSITION 54831 3% 6% 61
2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 36240 9% 1% 188
3 CHEMISTRY OF MATERIALS 11626 6% 1% 121
4 THIN SOLID FILMS 5800 6% 0% 122
5 ELECTROCHEMICAL AND SOLID STATE LETTERS 5431 2% 1% 40
6 JOURNAL OF PHYSICAL CHEMISTRY C 4071 5% 0% 98
7 ACTA POLYTECHNICA SCANDINAVICA-ELECTRICAL ENGINEERING SERIES 3911 0% 13% 2
8 APPLIED SURFACE SCIENCE 3795 5% 0% 99
9 JOURNAL OF APPLIED CHEMISTRY OF THE USSR 3507 1% 1% 23
10 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 3401 4% 0% 86

Author Key Words


chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 ATOMIC LAYER DEPOSITION 1617915 24% 22% 508 Search ATOMIC+LAYER+DEPOSITION Search ATOMIC+LAYER+DEPOSITION
2 ALD 290981 5% 18% 108 Search ALD Search ALD
3 MOLECULAR LAYER DEPOSITION 276549 1% 61% 31 Search MOLECULAR+LAYER+DEPOSITION Search MOLECULAR+LAYER+DEPOSITION
4 ATOMIC LAYER DEPOSITION ALD 178824 3% 19% 64 Search ATOMIC+LAYER+DEPOSITION+ALD Search ATOMIC+LAYER+DEPOSITION+ALD
5 MOLECULAR LAYER DEPOSITION MLD 161454 1% 100% 11 Search MOLECULAR+LAYER+DEPOSITION+MLD Search MOLECULAR+LAYER+DEPOSITION+MLD
6 PLASMA ENHANCED ALD 75484 0% 86% 6 Search PLASMA+ENHANCED+ALD Search PLASMA+ENHANCED+ALD
7 GROWTH PER CYCLE 58711 0% 100% 4 Search GROWTH+PER+CYCLE Search GROWTH+PER+CYCLE
8 AREA SELECTIVE ALD 44033 0% 100% 3 Search AREA+SELECTIVE+ALD Search AREA+SELECTIVE+ALD
9 PLASMA ENHANCED ATOMIC LAYER DEPOSITION 42748 1% 22% 13 Search PLASMA+ENHANCED+ATOMIC+LAYER+DEPOSITION Search PLASMA+ENHANCED+ATOMIC+LAYER+DEPOSITION
10 ALUCONE 39138 0% 67% 4 Search ALUCONE Search ALUCONE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1


rank cluster_id2 link
1 26429 MICROSYST IMICRO//ATOMIC LAYER DEPOSITION//FLOW RATE INTERRUPTION
2 17999 RUTHENIUM FILMS//RUO2//RU
3 11925 THIN FILM ENCAPSULATION//PERMEATION BARRIER//WATER VAPOR TRANSMISSION RATE
4 25275 CHEM TECHNOL MAT DEVICES ELECT IND//MOLECULAR LAYERING METHOD//ST PETERSBURG STATE TECHNOL
5 11897 PERFLUORINATED CARBOXYLATES//CU CVD//ZENTRUM MIKROTECHNOL
6 116 HFO2//HIGH K DIELECTRICS//HIGH K
7 3456 DIFFUSION BARRIER//CU METALLIZATION//TANTALUM NITRIDE
8 19118 METAL INSULATOR METAL MIM CAPACITOR//METAL INSULATOR METAL MIM//VOLTAGE COEFFICIENT OF CAPACITANCE VCC
9 37585 FOR ZENTER SOLID STATE PHYS//L EMISSION//MECHANISM FOR HIGH TC
10 11980 AL CR2O 3//KAPPA AL2O3//ALUMINUM OXIDE

Go to start page