Class information for:
Level 1: MICROSYST IMICRO//ATOMIC LAYER DEPOSITION//FLOW RATE INTERRUPTION

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
214 3       ZNO//ZINC OXIDE//GAS SENSOR 51365
68 2             ZNO//ZINC OXIDE//ZNO THIN FILMS 28596
26429 1                   MICROSYST IMICRO//ATOMIC LAYER DEPOSITION//FLOW RATE INTERRUPTION 275

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MICROSYST IMICRO address 431450 3% 47% 8
2 ATOMIC LAYER DEPOSITION authKW 239852 25% 3% 70
3 FLOW RATE INTERRUPTION authKW 152807 1% 67% 2
4 NANOSPRINGS authKW 143250 2% 25% 5
5 002 PREFERRED ORIENTATION authKW 114606 0% 100% 1
6 3D ZNO THIN LAYER authKW 114606 0% 100% 1
7 ANTIBACTERIAL ZINC authKW 114606 0% 100% 1
8 BAMBOO FIBER TEMPLATE authKW 114606 0% 100% 1
9 BANL address 114606 0% 100% 1
10 BAR ILAN NANOTECHNOL address 114606 0% 100% 1

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 2004 20% 0% 54
2 Physics, Applied 1574 49% 0% 134
3 Materials Science, Multidisciplinary 1163 46% 0% 127
4 Physics, Condensed Matter 519 24% 0% 66
5 Nanoscience & Nanotechnology 397 14% 0% 38
6 Physics, Multidisciplinary 90 10% 0% 27
7 Engineering, Electrical & Electronic 46 10% 0% 28
8 Chemistry, Physical 41 11% 0% 31
9 Metallurgy & Metallurgical Engineering 35 5% 0% 13
10 Electrochemistry 34 4% 0% 10

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 MICROSYST IMICRO 431450 3% 47% 8
2 BANL 114606 0% 100% 1
3 BAR ILAN NANOTECHNOL 114606 0% 100% 1
4 CHARGE CARRIER DYNAM EI4 114606 0% 100% 1
5 INSATITUTE PHYS 2 114606 0% 100% 1
6 MAT MICROSISTEMI PLASMA ADV MAT 114606 0% 100% 1
7 ORGAN DISPLAY TEAM 114606 0% 100% 1
8 ZENT EINRICHTUNG IONENSTRAHLEN RADIONUKLIDE 114606 0% 100% 1
9 NAT SCI SCI 107859 1% 24% 4
10 MAT NAT SCI 93764 1% 27% 3

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 ACTA PHYSICA POLONICA A 3778 7% 0% 20
2 THIN SOLID FILMS 1356 8% 0% 21
3 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 1341 5% 0% 13
4 TRIBOLOGY & LUBRICATION TECHNOLOGY 716 1% 0% 2
5 OPTICA APPLICATA 620 1% 0% 3
6 NANOTECHNOLOGY 509 3% 0% 8
7 SEMICONDUCTOR SCIENCE AND TECHNOLOGY 496 2% 0% 6
8 INTERNATIONAL JOURNAL OF NANOTECHNOLOGY 488 1% 0% 2
9 CHEMICAL VAPOR DEPOSITION 457 1% 0% 2
10 AIP ADVANCES 382 1% 0% 4

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 ATOMIC LAYER DEPOSITION 239852 25% 3% 70 Search ATOMIC+LAYER+DEPOSITION Search ATOMIC+LAYER+DEPOSITION
2 FLOW RATE INTERRUPTION 152807 1% 67% 2 Search FLOW+RATE+INTERRUPTION Search FLOW+RATE+INTERRUPTION
3 NANOSPRINGS 143250 2% 25% 5 Search NANOSPRINGS Search NANOSPRINGS
4 002 PREFERRED ORIENTATION 114606 0% 100% 1 Search 002+PREFERRED+ORIENTATION Search 002+PREFERRED+ORIENTATION
5 3D ZNO THIN LAYER 114606 0% 100% 1 Search 3D+ZNO+THIN+LAYER Search 3D+ZNO+THIN+LAYER
6 ANTIBACTERIAL ZINC 114606 0% 100% 1 Search ANTIBACTERIAL+ZINC Search ANTIBACTERIAL+ZINC
7 BAMBOO FIBER TEMPLATE 114606 0% 100% 1 Search BAMBOO+FIBER+TEMPLATE Search BAMBOO+FIBER+TEMPLATE
8 CDS SOLID SOLUTION 114606 0% 100% 1 Search CDS+SOLID+SOLUTION Search CDS+SOLID+SOLUTION
9 CHARGE TRAPPING MEMORY DEVICES 114606 0% 100% 1 Search CHARGE+TRAPPING+MEMORY+DEVICES Search CHARGE+TRAPPING+MEMORY+DEVICES
10 CONTACT BASED SENSORS 114606 0% 100% 1 Search CONTACT+BASED+SENSORS Search CONTACT+BASED+SENSORS

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 2907 ATOMIC LAYER DEPOSITION//ALD//MOLECULAR LAYER DEPOSITION
2 25433 ZINC OXIDE ZNO THIN FILM//WIDE BANDGAP MATERIAL//ADHESION LITHOGRAPHY
3 16903 HETEROJUNCTION DIODES//VAPOR COOLING CONDENSATION SYSTEM//EFFICIENCY GAIN PRODUCT
4 2864 ZNO FILMS//ZNO THIN FILMS//ZNO
5 153 AL DOPED ZNO//TRANSPARENT CONDUCTIVE OXIDE//ZNOAL
6 792 P TYPE ZNO//ZNO//P TYPE CONDUCTION
7 35449 SOURCE GATED TRANSISTOR SGT//SOURCE GATED TRANSISTOR//MIPLAZA
8 356 THIN FILM TRANSISTORS//THIN FILM TRANSISTORS TFTS//IGZO
9 29851 CENT PROD SOLUT//CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY//POP IN
10 30929 COMBINATORIAL SPUTTER COATING//LEVITATION TRANSPORT//VACUUM TRIBOMETER

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