Class information for:
Level 1: RUTHENIUM FILMS//RUO2//RU

Basic class information

Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
1 4 PHYSICS, CONDENSED MATTER//PHYSICS, APPLIED//MATERIALS SCIENCE, MULTIDISCIPLINARY 2188495
396 3       LEAD FREE SOLDER//SOLDER//ELECTROMIGRATION 32184
1011 2             ATOMIC LAYER DEPOSITION//DIFFUSION BARRIER//CU METALLIZATION 10645
17999 1                   RUTHENIUM FILMS//RUO2//RU 598

Terms with highest relevance score



rank Category termType chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 RUTHENIUM FILMS authKW 263512 1% 100% 5
2 RUO2 authKW 229515 6% 13% 33
3 RU authKW 210898 6% 11% 37
4 RUO2 THIN FILM authKW 210810 1% 100% 4
5 RUOD3 authKW 210810 1% 100% 4
6 RUTHENIUM DIOXIDE authKW 209046 4% 18% 22
7 RUTHENIUM OXIDE authKW 187976 6% 10% 34
8 RUOX authKW 118579 1% 75% 3
9 CONDUCTIVE RUO2 authKW 105405 0% 100% 2
10 ELECTRODE MATERIAL OF DRAM CAPACITOR authKW 105405 0% 100% 2

Web of Science journal categories



chi_square_rank Category chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 Materials Science, Coatings & Films 6805 24% 0% 146
2 Physics, Applied 3618 50% 0% 299
3 Materials Science, Multidisciplinary 1993 41% 0% 248
4 Physics, Condensed Matter 1264 25% 0% 151
5 Electrochemistry 615 9% 0% 55
6 Nanoscience & Nanotechnology 409 10% 0% 59
7 Chemistry, Physical 202 15% 0% 90
8 Materials Science, Ceramics 50 2% 0% 13
9 Engineering, Electrical & Electronic 49 8% 0% 48
10 Metallurgy & Metallurgical Engineering 18 3% 0% 17

Address terms



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 PASMANT GRP 105405 0% 100% 2
2 ADV PROC C ACITOR 56210 1% 27% 4
3 BEREICH INGENIEURWISSEN 52702 0% 100% 1
4 CENIDEIVG 52702 0% 100% 1
5 CHEM N ANO SCI 52702 0% 100% 1
6 ELE OMAGNET TECHNOL BRANCH CODE 6850 52702 0% 100% 1
7 MAT AVIAT ENGN 52702 0% 100% 1
8 PLATFORM TECHNOL TEAM 52702 0% 100% 1
9 SEMICOND DEV 2 52702 0% 100% 1
10 THERMODYNAM CENIDEIVG 52702 0% 100% 1

Journals



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass
1 CHEMICAL VAPOR DEPOSITION 15290 3% 2% 17
2 INTEGRATED FERROELECTRICS 4263 3% 0% 18
3 THIN SOLID FILMS 3544 8% 0% 50
4 ELECTROCHEMICAL AND SOLID STATE LETTERS 3540 3% 0% 17
5 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 2273 6% 0% 37
6 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 1936 6% 0% 34
7 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 1756 4% 0% 22
8 CHEMISTRY OF MATERIALS 1242 4% 0% 21
9 JOURNAL OF MATERIALS RESEARCH 1092 3% 0% 16
10 MICROELECTRONIC ENGINEERING 597 2% 0% 11

Author Key Words



chi_square_rank term chi_square shrOfCwithTerm shrOfTermInClass termInClass LCSH search Wikipedia search
1 RUTHENIUM FILMS 263512 1% 100% 5 Search RUTHENIUM+FILMS Search RUTHENIUM+FILMS
2 RUO2 229515 6% 13% 33 Search RUO2 Search RUO2
3 RU 210898 6% 11% 37 Search RU Search RU
4 RUO2 THIN FILM 210810 1% 100% 4 Search RUO2+THIN+FILM Search RUO2+THIN+FILM
5 RUOD3 210810 1% 100% 4 Search RUOD3 Search RUOD3
6 RUTHENIUM DIOXIDE 209046 4% 18% 22 Search RUTHENIUM+DIOXIDE Search RUTHENIUM+DIOXIDE
7 RUTHENIUM OXIDE 187976 6% 10% 34 Search RUTHENIUM+OXIDE Search RUTHENIUM+OXIDE
8 RUOX 118579 1% 75% 3 Search RUOX Search RUOX
9 CONDUCTIVE RUO2 105405 0% 100% 2 Search CONDUCTIVE+RUO2 Search CONDUCTIVE+RUO2
10 ELECTRODE MATERIAL OF DRAM CAPACITOR 105405 0% 100% 2 Search ELECTRODE+MATERIAL+OF+DRAM+CAPACITOR Search ELECTRODE+MATERIAL+OF+DRAM+CAPACITOR

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.

Classes with closest relation at Level 1



rank cluster_id2 link
1 21611 IRIDIUM COATING//IR COATING//IRIDIUM THIN FILMS
2 2907 ATOMIC LAYER DEPOSITION//ALD//MOLECULAR LAYER DEPOSITION
3 3456 DIFFUSION BARRIER//CU METALLIZATION//TANTALUM NITRIDE
4 4386 IRIDIUM OXIDE//WATER ELECTROLYSIS//IRO2
5 35165 SCI TECHNOL CHEMKIOICHO 71//1 1 1 5 5 5 HEXAFLUOROACETYLACETONATE ACETONITRILE COMPLEXES//BETA DIKEEONE COMPLEX
6 10002 FIRST PRINCIPLES KINETIC MONTE CARLO//FRITZ HABER//AMBIENT PRESSURE X RAY PHOTOELECTRON SPECTROSCOPY
7 17178 THICK FILM RESISTORS//ELECTROCOMPONENT SCIENCE AND TECHNOLOGY//ELECT FUNDAMENTALS
8 31719 PT TI LAYER//PT BOTTOM ELECTRODE//ADHESION LAYER
9 16132 ELECT DEVICES MAT TECHNOL//ETCH MECHANISM//MICROELECT DEVICES MAT TECHNOL
10 11897 PERFLUORINATED CARBOXYLATES//CU CVD//ZENTRUM MIKROTECHNOL

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